Pattern recognition system

• US 4,163,212 A
• Filed: 09/08/1977
• Issued: 07/31/1979
• Est. Priority Date: 09/08/1977
• Status: Expired due to Term

• Current Assignee: Excellon Automation Co.
• Original Assignee: Excellon Industries
• Inventors: Buerger, Walter R., Monier, Jacques F., Dixon, Kenneth K.
• Primary Examiner(s): Boudreau, Leo H.
• Application Number:
  US05/831,667
• Time in Patent Office: 691 Days
• Field of Search: 340/146.3 H, 340/146.3 AC, 340/146.3 R, 340/146.3 AH, 364/449, 364/460, 364/463, 364/468, 364/490, 364/491, 364/515
• US Class Current: 382/151
• CPC Class Codes: G06T 7/60 Analysis of geometric attributes
• CPC Class Codes: G06V 10/24 Aligning, centring, orientation detection or correction of the image
• CPC Class Codes: H01L 21/67271 Sorting devices

Abstract

A method and related apparatus for finding center lines or center points of distinguishable areas in a scanned field, such as the field of view of an optical scanning device in which is positioned an integrated-circuit chip. The invention is disclosed in the form of circuitry for analyzing a serial digital data stream representative of the image of the scanned field, and for determining the positions of center lines of center points of distinguishable areas in the field falling within a selected size range. The circuitry includes separate sections for analyzing the scanned image in order to detect center lines with respect to four separate scanning directions, the outputs of these sections being synchronized with each other, although delayed from the original serial data stream, and being representative of center lines of areas falling within the selected size range. The outputs of the four separate sections may be logically combined in any desired manner to produce a serial output signal indicative of center points of areas falling within the selected size range. Selected center points may then be used in conjunction with a wire bonding machine to provide information indicative of the position and orientation of the chip.

Claims

1. A method for locating the centers of distinguishable areas falling within a selected size range in a field of interest, said method comprising the steps of:

scanning the field in a raster scan sequence of parallel lines oriented in a first scanning direction;

generating image signals indicative of portions of the parallel lines that overlap the distinguishable areas; and

processing the image signals to obtain a centerline signal representative of the locus of center points of the portions of the parallel lines that overlap the distinguishable areas, said processing step also including disregarding image signals indicative of distinguishable areas falling outside a selected size range.

2. A method as set forth in claim 1, and further including the steps of:

scanning the field in a second raster scan sequence of parallel lines oriented in a second scanning direction;

generating a second set of image signals indicative of portions of the second set of parallel lines that overlap the distinguishable areas; and

processing the second set of image signals to obtain a second center-line signal representative of the locus of center points of the portions of the second set of parallel lines that overlap the distinguishable areas, said step of processing the second set of image signals also including disregarding image signals indicative of distinguishable areas falling outside the selected size range.

3. A method as set forth in claim 2, and further including the step of logically combining the first and second center-line signals to determine a center point for each distinguishable area falling within the selected size range.

4. A method as set forth in claim 2, wherein the first and second scanning directions are substantially orthogonally related.

5. A method as set forth in claim 4, and further including the steps of:

scanning the field in third and fourth raster scan sequences of parallel lines oriented in third and fourth scanning directions, respectively;

generating third and fourth sets of image signals indicative of portions of the third and fourth sets of parallel lines that overlap the distinguishable areas;

processing the third and fourth sets of image signals to obtain third and fourth center-line signals representative of the loci of center points of the portions of the third and fourth sets of parallel lines that overlap distinguishable areas, said step of processing the third and fourth sets of image signals also including disregarding image signals indicative of distinguishable areas falling outside the selected size range; and

logically combining selected ones of the first, second, third and fourth center lines to determine a center point of each distinguishable area, whereby selection of a logical combination of the third and fourth center lines will usually yield a true center point in instances in which the selection of a logical combination of the first and second center lines does not, because of the shape and orientation of the area.

6. For use with a wire bonding machine, a method for determining the locations of bonding pads on a microcircuit chip, the locations to be utilized as reference points to provide the wire bonding machine with the exact position and orientation of the chip, said method comprising the steps of:

transforming an image of the chip into a serial binary data stream by scanning the image line-by-line in raster fashion, the scan lines following a first scanning direction;

processing the serial binary data stream to determine the centers of all bonding pads on the chip;

generating a serial output signal, time-delayed with respect to the serial binary data stream, and indicative of the center points of the bonding pads; and

selecting two bonding pad centers for use as reference points by the wire bonding machine;

and wherein said processing step includes the step of disregarding distinguishable areas on the chip which fall outside of a preselected size range, whereby the bonding pads can be distinguished from other features of the chip.

7. For use with a wire bonding machine, a method for determining the locations of bonding pads on a microcircuit chip, the locations to be utilized as reference points to provide the wire bonding machine with the exact position and orientation of the chip, said method comprising the steps of:

transforming an image of the chip into a serial binary data stream by scanning the image line-by-line in raster fashion, the scan lines following a first scanning direction;

processing the serial binary data stream to determine the centers of all bonding pads on the chip;

generating a serial output signal, time-delayed with respect to the serial binary data stream, and indicative of the center points of the bonding pads; and

selecting two bonding pad centers for use as reference points by the wire bonding machine;

and wherein said processing step includes

deriving a first set of center lines of the bonding pads, with respect to the first scanning direction,

generating therefrom a first serial output signal indicative of the first set of center lines,

deriving a second set of center lines of the bonding pads, with respect to a second scanning direction,

generating therefrom a second serial output signal indicative of the second set of center lines,

logically combining the first and second serial output signals to obtain the signal indicative of the center points of the pads, and

disregarding distinguishable areas on the chip which fall outside of a preselected size range, whereby the bonding pads can be distinguished from other features of the chip.

8. A method as set forth in claim 7, wherein said processing step further includes:

deriving third and fourth sets of center lines of the bonding pads, with respect to third and fourth scanning directions angularly oriented to the first and second scanning directions;

generating third and fourth serial output signals indictive of the respective third and fourth sets of center lines; and

logically combining the third and fourth serial output signals to provide an alternate determination of the center points of the bonding pads.

9. Apparatus for locating the centers of distinguishable areas falling within a selected size range in a field of interest, said apparatus comprising:

means for scanning the field of interest and generating signals indicative of the image of the field;

signal processing means for determining from the image signals the center points of portions of parallel lines oriented in a first scanning direction with respect to the field, said portions overlapping the distinguishable areas, the determined center points defining a first center line, with respect to the first scanning direction, for each distinguishable area, and said signal processing means including means for disregarding image signals corresponding to distinguishable areas falling outside a selected size range.

10. Apparatus as set forth in claim 9, and further including:

second signal processing means for determining from the image signals the center points of portions of parallel lines oriented in a second scanning direction with respect to the field, said portions overlapping the distinguishable areas, the determined center points defining a second center line, with respect to the second scanning direction, for each distinguishable area; and

means for logically combining said first and second center lines to define a center point for each distinguishable area.

11. Apparatus as set forth in claim 10, wherein said first and second scanning directions are substantially orthogonally related.

12. Apparatus for determining the centers of a plurality of optically distinguishable areas in a two-dimensional field of view, said apparatus comprising:

means for transforming the field of view into a serial data stream representative of the field of view, including the plurality of optically distinguishable areas; and

means for processing said serial data stream and deriving therefrom a serial output signal, time delayed with respect to said serial data stream, and containing information indicative of the center of each of the plurality of distinguishable areas falling within a preselected size range.

13. Apparatus as set forth in claim 12, wherein:

said serial data stream is obtained by scanning the field line-by-line in a first scanning direction; and

said means for processing said serial data stream includes first processing means, for determining the position of a center line of each distinguishable area falling within the preselected size range, said centerline being derived by connecting the center points of portions of scan lines overlapping the optically distinguishable areas, and wherein said first processing means includes means for disregarding portions of scan lines not falling within the preselected size range.

14. Apparatus as set forth in claim 13, wherein said first processing means includes:

accumulator means for accumulating a count indicative of the width of a distinguishable area as scanned along a line in said first scanning direction;

means for determining from the accumulated count the center point of the distinguishable area with respect to a scan line in said first scanning direction; and

means for storing center point images in said serial output signal.

15. Apparatus as set forth in claim 14, wherein said first processing means further includes means for resetting said accumulator means on reaching the end of a scan line, thereby to distinguish between an area at the end of one scan line and an area at the beginning of the next.

16. Apparatus as set forth in claim 13, wherein said means for processing said serial data stream also includes second processing means operating on said serial data stream in parallel with said first processing means, for determining the position of a second center line for each distinguishable area falling within the preselected size range, said second center line being measured in relation to a second scanning direction.

17. Apparatus as set forth in claim 16, wherein said second scanning direction is perpendicular to said first scanning direction.

18. Apparatus as set forth in claim 16, wherein said second processing means includes:

accumulator means for accumulating counts indicative of the widths of distinguishable areas as scanned along lines in said second scanning direction;

means for determining from the accumulated counts the center points of portions of lines overlapping the distinguishable areas in said second scanning direction; and

means for storing the center point images in a serial data output stream from said second processing means.

19. Apparatus as set forth in claim 18, wherein said first processing means includes:

accumulator means for accumulating counts indicative of the width of distinguishable areas as scanned along lines in said first scanning direction;

means for determining from the accumulated counts the center points of the distinguishable areas with respect to scan lines in said first scanning direction; and

means for storing the center point images in a serial data output stream from said first processing means;

and wherein said means for processing said serial data stream includes means for selectively combining said serial data output streams from said first and second processing means, to produce said serial output signal representative of intersections of center lines determined with respect to said first and second scanning directions.

20. Apparatus for determining the centers of optically distinguishable areas in a two-dimensional field of view, said apparatus comprising:

means for transforming the field of view into a serial binary data stream representative of the field of view as scanned along a sequence of lines in a first scanning direction;

first processing means for determining from said binary data stream the position of a first center line for each distinguishable area, said first center lines being measured in relation to said first scanning direction, and for generating a first serial output signal, time-delayed with respect to said binary data stream, and containing binary data indicative of said first center lines;

at least one additional processing means for determining from said binary data stream the position of at least one additional center line for each distinguishable area, said additional center lines being measured in relation to at least one additional scanning direction, and for generating at least one assitional serial output signal, time-delayed with respect to said binary data stream, and containing binary data indicative of said additional center lines;

means for selectively combining said first and additional serial output signals to yield a combined output signal indicative of the center points of the distinguishable areas; and

filter means, included within said first and additional processing means, for disregarding distinguishable areas falling outside of a preselected size range.

21. Apparatus as set forth in claim 20, wherein:

said first processing means includes

first accumulator means for accumulating counts indicative of lengths of unbroken strings of bits of data representing the distinguishable areas, and

means for storing in said first serial output signal data bits indicative of the centers of said unbroken strings, and therefore indicative of the centers of portions of lines overlapping the distinguishable areas in said first scanning direction; and

said additional processing means includes a second processing means having

second accumulator means for accumulating counts indicative of the lengths of unbroken strings, in a second scanning direction, of bits of data representing the distinguishable areas, and

means for storing in a second serial output signal data bits indicative of the centers of said unbroken strings, and therefore indicative of the centers of portions of lines overlapping the distinguishable areas in said second scanning direction.

22. Apparatus as set forth in claim 21, wherein:

said first accumulator means includes

an accumulator register,

means for incrementing said register on the occurrence of a "1" in said binary data stream, and

means for utilizing and resetting the contents of said register on the occurrence of a "0" in said binary data stream; and

said means for storing in said first serial output stream includes

means for dividing the count in said register by two to derive a binary value equivalent to the position of a center point measured from a current scanning position, and

decoder means for transforming said binary value to an equivalent linear distance measured back along said first serial output stream.

23. Apparatus as set forth in claim 21, wherein:

said second accumulator means includes

a plurality of accumulator registers, one for each binary data element in a line of data in said first scanning direction,

means for incrementing a selected one of said registers on the occurrence of a "1" in said binary data stream, whereby each of said registers accumulates a count of unbroken strings of "1" bits in said second scanning direction, and the selection of registers is changed sequentially in synchronism with the data rate of said binary data signal, in order to orient said second scanning direction perpendicular to said first scanning direction, and

means for utilizing and resetting the contents of a selected register on the occurrence of a "0" in said binary data stream; and

said means for storing in said second serial output stream includes

means for dividing an accumulated count by two to derive a binary value equivalent to the position of a center point measured from a current scanning position back along said second scanning direction,

decoder means for transforming said binary value to an equivalent linear distance value measured back along said second scanning direction, and

means for converting said linear distance value to another linear distance value measured along said second output stream, in said first scanning direction.

24. Apparatus as set forth in claim 21, wherein said additional processing means further includes third and fourth processing means, respectively including:

third and fourth accumulator means for accumulating counts indicative of the lengths of unbroken strings, in third and fourth scanning directions, of bits of data representing the distinguishable areas; and

means for storing in third and fourth serial output signals data bits indicative of the centers of said unbroken strings, and therefore indicative of the centers of portions of lines overlapping the distinguishable areas in said third and fourth scanning directions.

25. Apparatus as set forth in claim 24, wherein:

each of said second, third and fourth accumulator means includes

a plurality of accumulator registers, there being at least as many as there are binary elements in a line of data in said first scanning direction,

means for selecting said registers sequentially so that the same register is selected each time that a bit located on a particular line in the scanning direction enters said processing means,

means for incrementing selected registers on the occurrence of a "1" in said binary data stream, and

means for utilizing and resetting selected registers on the occurrence of a "0" in said binary data stream; and

each of said means for storing in said second, third and fourth serial output signals respectively includes

means for dividing an accumulated count by two to derive a binary value equivalent to the position of a center point measured from a current scanning position back along one of said second, third and fourth scanning directions,

decoder means for transforming said binary value to an equivalent linear distance value measured back along one of said second third and fourth scanning directions, and

means for converting said linear distance value to another linear distance value measured along one of said second, third and fourth serial output streams, in said first scanning direction.

26. For use with a wire bonding machine, apparatus for determining the locations of particular bonding pads on a microcircuit chip, the bonding pad locations to be utilized as reference points to provide the wire bonding machine with the exact position and orientation of the chip, said apparatus comprising:

means for transforming an image of the chip placed in a scanning field into a serial binary data stream in which bonding pad areas on the chip are identified as having a particular binary state, said serial binary data stream resulting from scanning the image in raster fashion in a first scanning direction;

processing means for determining from said serial binary data stream the centers of all bonding pads on the chip, and for generating a serial output signal, time-delayed with respect to said serial binary data stream, and indicative of the center points of the bonding pads; and

means for selecting the centers of at least two particular bonding pads, the coordinates of which can be supplied to the wire bonding machine, to define the exact position and orientation of the chip;

and wherein said processing means includes filter means for disregarding distinguishable areas on the chip which fall outside of a preselected size range, whereby bonding pads can be distinguished from other features of the chip.

27. Apparatus for locating the centers of distinguishable areas falling within a selected size range in a field of interest, said apparatus comprising:

means for scanning the field of interest and generating signals indicative of the image of the field;

means for determining from the image signals the center points of portions of parallel lines oriented in a first scanning direction with respect to the field, said portions overlapping the distinguishable areas, the determined center points defining a first center line, with respect to the first scanning direction, for each distinguishable area;

means for determining from the image signals the center points of portions of parallel lines oriented in a second scanning direction with respect to the field, said first and second scanning directions being substantially orthogonally related, said portions overlapping the distinguishable areas, and the determined center points defining a second center line, with respect to the second scanning direction, for each distinguishable area;

means for logically combining said first and second center lines to define a center point for each distinguishable area;

means for determining from the image signals the center points of portions of parallel lines oriented in a third scanning direction with respect to the field, said portions overlapping the distinguishable areas, the determined center points defining a third center line, with respect to said third scanning direction, for each distinguishable area;

means for determining from the image signals the center points of portions of parallel lines oriented in a fourth scanning direction with respect to the field, said portions overlapping the distinguishable areas, the determined center points defining a fourth center line, with respect to said fourth scanning direction, for each distinguishable area; and

means for logically combining said third and fourth center lines to define a center point for each distinguishable area;

said third and fourth scanning directions also being substantially orthogonally related;

whereby the center points of most areas can be determined by employing the logical combination of either said first and second center lines of said third and fourth center lines.

28. Apparatus as set forth in claim 27, wherein said third and fourth scanning directions are oriented at approximately 45°

to said first and second scanning directions.

29. Apparatus for determining the centers of optically distinguishable areas in a two-dimensional field of view, said apparatus comprising:

means for transforming the field of view into a serial data stream representative of the field of view, including the optically distinguishable areas; and

means for processing said serial data stream and deriving therefrom a serial output signal, time delayed with respect to said serial data stream, and containing information indicative of the center of each distinguishable area falling within a preselected size range; and

wherein

said serial data stream is obtained by scanning the field line-by-line in a first scanning direction,

said means for processing said serial data stream includes first processing means, for determining the position of a center line of each distinguishable area falling within the preselected size range, said center line being measured in relation to said first scanning direction, and

said first processing means includes accumulator means for accumulating a count indicative of the width of a distinguishable area as scanned along a line in said first scanning direction, means for determining from the accumulated count the center point of the distinguishable area with respect to a scan line in said first scanning direction, means for storing center point images in said serial output signal, and filter means, for disregarding accumulated counts falling outside of selectable upper and lower limits.

30. Apparatus for determining the centers of optically distinguishable areas in a two-dimensional field of view, said apparatus comprising:

means for transforming the field of view into a serial data stream representative of the field of view, including the optically distinguishable areas; and

means for processing said serial data stream and deriving therefrom a serial output signal, time delayed with respect to said serial data stream, and containing information indicative of the center of each distinguishable area falling within a preselected size range;

wherein said serial data stream is obtained by scanning the field line-by-line in a first scanning direction;

and wherein said means for processing said serial data stream includes

first processing means, for determining the position of a center line of each distinguishable area falling within the preselected size range, said center line being measured in relation to said first scanning direction,

second processing means operating on said serial data stream in parallel with said first processing means, for determining the position of a second center line for each distinguishable area falling within the preselected size range, said second center line being measured in relation to a second scanning direction,

third and fourth processing means operating on said serial data stream in parallel with said first and second processing means, for determining the positions of third and fourth center lines for each distinguishable area falling within the preselected size range, said third and fourth center lines being measured in relation to third and fourth scanning directions, respectively, and

means for selectively combining outputs from said first, second, third and fourth processing means to determine center points of the distinguishable areas.

31. Apparatus as set forth in claim 30, wherein said third and fourth scanning directions are orthogonally related and are oriented at 45°

to said first and second scanning directions.

32. For use with a wire bonding machine, apparatus for determining the locations of particular bonding pads on a microcircuit chip, the bonding pad locations to be utilized as reference points to provide the wire bonding machine with the exact position and orientation of the chip, said apparatus comprising:

means for transforming an image of the chip placed in a scanning field into a serial binary data stream in which bonding pad areas on the chip are identified as having a particular binary state, said serial binary data stream resulting from scanning the image in raster fashion in a first scanning direction;

processing means for determining from said serial binary data stream the centers of all bonding pads on the chip, and for generating a serial output signal, time-delayed with respect to said serial binary data stream, and indicative of the center points of the bonding pads; and

means for selecting the centers of at least two particular bonding pads, the coordinates of which can be supplied to the wire bonding machine, to define the exact position and orientation of the chip;

and wherein said processing means includes

first processing means for deriving a first set of center lines of the bonding pads, said first set of center lines being determined with respect to said first scanning direction, and for generating a first serial output signal indicative of said first set of center lines,

second processing means for deriving a second set of center lines of the bonding pads, said second set of center lines being determined with respect to a second scanning direction orthogonally related with said first scanning direction, and for generating a second serial output signal indicative of said second set of center lines,

means for logically combining said first and second serial output signals to derive said serial output signal indicative of the center points of the pads, and

filter means for disregarding distinguishable areas on the chip which fall outside of a preselected size range, whereby bonding pads can be distinguished from other features of the chip. pg,96

33. Apparatus as set forth in claim 32 wherein said processing means further includes:

third and fourth processing means for deriving third and fourth sets of center lines of the bonding pads, with respect to third and fourth respective scanning directions angularly oriented with respect to said first and second scanning directions, and for generating third and fourth serial output signals indicative of said respective third and fourth sets of center lines; and

means for logically combining said third and fourth serial output signals to provide an alternate determination of the center points of the bonding pads.