Distance measuring instrument

• US 4,171,160 A
• Filed: 10/25/1977
• Issued: 10/16/1979
• Est. Priority Date: 11/03/1976
• Status: Expired due to Term

• Current Assignee: Dr. Johannes Heidenhain GmbH
• Original Assignee: Dr. Johannes Heidenhain GmbH
• Inventors: Ernst, Alfons
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Punter, Wm. H.
• Application Number:
  US05/844,715
• Time in Patent Office: 721 Days
• Field of Search: 356/1, 356/4, 356/120, 356/156, 250/237 R, 250/233
• US Class Current: 356/623
• CPC Class Codes: G01B 11/0608 Height gauges

Abstract

A distance measuring instrument comprising a source of coherent light and a receiver is disclosed which may be used to measure the one dimensional position of an object surface. Coherent light is directed at a predetermined angle onto the object surface and the angle at which diffusely reflected light from this surface enters the receiver is measured. This entrance angle is measured with a photosensor and a movable aperture formed by the intersection of a fixedly mounted diaphragm and a movably mounted diaphragm. By measuring the position of the movably mounted diaphragm when the movable aperture is placed so as to allow reflected light to pass from the illuminated surface to the photosensor, the entrance angle of the reflected light and hence the position of the object is determined.

Claims

1. An apparatus for measuring a length corresponding to the one dimensional position of a surface, said apparatus comprising:

means for directing an incident beam of coherent light at a substantially constant angle onto the surface;

receiving means for detecting a portion of the beam after reflection from the surface;

a rotatable disc positioned within the receiving means;

at least one involutely shaped slit diaphragm defined by the disc;

a fixedly-mounted slot diaphragm positioned within the receiving means adjacent the disc, the slot diaphragm being arranged tangentially to the basic circle of the involute which defines the slit diaphragm;

a movable aperture defined by the intersection of the slit diaphragm and the slot diaphragm;

a photosensor positioned in the receiving means to detect light which has passed through the movable aperture after being reflected from the surface; and

position sensing means for sensing the position of the movable aperture to measure the entrance angle at which reflected light detected by the photosensor enters the receiving means and thereby to determine the length.

2. The apparatus of claim 1 wherein the rotatable disc is arranged substantially parallel to the incident beam.

3. The apparatus of claim 1 wherein a plurality of involutely shaped slit diaphragms are defined by the disc, each of said slit diaphragms having a common basic circle.

4. An apparatus for measuring the angular position of a light source comprising:

a substantially linear, fixedly mounted diaphragm;

a substantially involutely shaped mobile diaphragm mounted to rotate past the fixedly mounted diaphragm, said fixedly mounted diaphragm positioned tangentially to the basic circle of the involute which defines the mobile diaphragm to intersect the mobile diaphragm substantially transversely for a range of positions of said mobile diaphragm;

a movable aperture defined by an intersection between the fixedly mounted and mobile diaphragms;

means for focusing incoming light from the light source on the movable aperture;

photosensor means for detecting focused incoming light which has passed through the movable aperture; and

position sensing means for sensing the position of the movable aperture.

5. A precision measuring instrument for measuring the distance between a surface and a reference plane, said instrument comprising:

means for directing an incident beam of coherent light onto the surface at a substantially constant angle of incidence;

a rotatably mounted member which defines a substantially involutely shaped slit diaphragm;

a substantially straight, fixedly mounted slot diaphragm positioned adjacent the rotatably mounted member substantially parallel to a tangent to the basic circle of the involute of the slit diaphragm to intersect the slit diaphragm substantially transversely;

a movable aperture defined by an intersection between the slit diaphragm and the slot diaphragm, said movable aperture having a position which is a function of the angular position of the rotatably mounted member;

means for focusing a portion of the light reflected from the surface into a region substantially adjacent the rotatable member;

means for detecting reflected coherent light passing from the surface to the focusing means and through the movable aperture; and

position sensing means for sensing the position of the movable aperture to measure the entrance angle at which reflected light detected by the detecting means enters the focusing means and thereby to determine the distance.

6. The instrument of claim 5 wherein a plurality of congruent, substantially involutely shaped slit diaphragms are arranged on the rotatably mounted member.

7. The instrument of claim 5 wherein the slit diaphragm is arranged substantially parallel to the incident beam.