Generation of high vacuums

• US 4,172,477 A
• Filed: 07/20/1979
• Issued: 10/30/1979
• Est. Priority Date: 07/20/1977
• Status: Expired due to Term

• Current Assignee: Leybold-Heraeus GmbH & Company KG
• Original Assignee: Leybold-Heraeus GmbH & Company KG
• Inventors: Reich, Gunter
• Primary Examiner(s): Bell, Houston S.
• Application Number:
  US05/926,229
• Time in Patent Office: 102 Days
• Field of Search: 141/1-12, 141/37-66, 141/392, 141/83, 141/94, 73/40, 73/49.2
• US Class Current: 141/8
• CPC Class Codes: F04F 9/04 in combination with fore pumps, e.g. use of isolating valves
• CPC Class Codes: F04F 9/08 Control
• CPC Class Codes: G01M 3/202 using mass spectrometer detection systems

Abstract

In order to evacuate a receptacle using a pumping arrangement composed of a backing pump connected to the receptacle and a fine or high vacuum pump connected to the receptacle via a cold trap, the receptacle is initially evacuated only by operation of the backing pump, the time taken to achieve a predetermined initial pressure reduction in the receptacle only by the action of the backing pump is measured, then, on the basis of the magnitude of such pressure reduction and the measured time period, the subsequent time period which would be required, if the effect of condensable gases in the receptacle were ignored, to reach a predetermined second pressure, lower than the first pressure, in the operating range of the fine or high vacuum pump is calculated, and the receptacle is then evacuated by operation of the fine or high vacuum pump at the expiration of the subsequent time period.

Claims

1. A method for evacuating a receptacle using a pumping arrangement composed of a backing pump connected to the receptacle and a fine or high vacuum pump connected to the receptacle via a cold trap, comprising:

initially evacuating the receptacle only by operation of the backing pump;

measuring the time taken to achieve a predetermined initial pressure reduction in the receptacle only by the action of the backing pump;

calculating, on the basis of the magnitude of such pressure reduction and the measured time period, the subsequent time period which would be required, if the effect of condensable gases in the receptacle were ignored, to reach a predetermined second pressure, lower than the first pressure, in the operating range of the fine or high vacuum pump; and

evacuating the receptacle by operation of the fine or high vacuum pump at the expiration of the subsequent time period.

2. A method as defined in claim 1 wherein the pumping arrangement further includes a further pump connected to the receptacle via a cold trap, and further comprising:

calculating a further time period which would be required, if the effect of condensable gases in the receptacle were ignored, to reach a predetermined third pressure, lower than the second pressure, in the operating range of the further pump; and

evacuating the receptacle by operation of the further pump at the expiration of the further time period.

3. Apparatus for evacuating a receptacle comprising:

a backing pump;

a fine or high vacuum pump;

a cold trap connected by a line to the suction side of said vacuum pump;

means selectively connecting at least one of said pump and said cold trap to the receptacle; and

control means connected for determining the time taken to effect a predetermined pressure reduction in the receptacle by operation of only said backing pump, and for selectively connecting said vacuum pump to effect evacuation of the receptacle starting at a time after beginning of the predetermined pressure reduction which is a selected multiple of the determined time.

4. An arrangement as defined in claim 3 wherein said connecting means comprise a plurality of valves each connected between said receptacle and a respective pump, and said control means are arranged to open and close each said valve to control operation of its associated pump.

5. An arrangement as defined in claim 4 further comprising an additional value connected between said cold trap and said vacuum pump.

6. An arrangement as defined in claim 4 further comprising:

a leakage detector; and

a controllable valve connected between said detector and the line between said cold trap and vacuum pump.

7. An arrangement as defined in claim 4 further comprising:

a leakage detector; and

a controllable valve connected between said detector and said cold trap.

8. A method for operating the apparatus defined in claim 6 or 7 in order to effect leakage detection, comprising:

calculating, in said control means, the time at which, if the effect of condensable gases in the receptacle were ignored, a pressure would be reached in the receptacle that would enable said detector to be connected; and

opening said controllable valve at such time in order to connect said leakage detector.

9. A method as defined in claim 8, wherein the apparatus has an additional valve connected between said cold trap and said vacuum pump, and further comprising closing said additional valve simultaneously with opening of said controllable valve.