Mechanically biased semiconductor strain sensitive microphone
First Claim
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1. A microphone transducer element of the type in which acoustic vibration generates corresponding resistance changes, including:
- at least two semiconductor plate members;
an integral flexible laminar semiconductor support upon which said plate members are situated; and
at least one laminar semiconductor filament for interconnecting said plate members such that said at least one filament is strain-sensitive.
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Abstract
A piezo-electric transducer element is disclosed which is formed by selected etchings from boron doped silicon. The transducer includes a diaphragm and a spring lever adapted to bias the transducer element into a state of strain so that a vibration of the diaphragm is transmitted to the transducer element. The transducer element is particularly suitable for use in a telephone microphone.
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Citations
6 Claims
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1. A microphone transducer element of the type in which acoustic vibration generates corresponding resistance changes, including:
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at least two semiconductor plate members; an integral flexible laminar semiconductor support upon which said plate members are situated; and at least one laminar semiconductor filament for interconnecting said plate members such that said at least one filament is strain-sensitive. - View Dependent Claims (2, 3, 4)
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5. A microphone assembly comprising:
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housing means; flexible diaphrgam means mounted in said housing means; semiconductor strain gauge transducer element;
first and second contact springs for securing said transducer element to said housing;spring lever means mounted on said housing proximate to said contact springs for biasing said transducer element into a state of strain; and fulcrum means mounted on said diaphragm and in abutment with the spring lever means such that acoustic vibrations of the diaphragm are transmitted to said transducer element.
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6. In a telephone subscriber instrument, a microphone assembly comprising:
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housing means; flexible diaphragm means mounted in said housing means; semiconductor strain gauge transducer element; first and second contact springs for securing said transducer element to said housing; spring lever means mounted on said housing proximate to said contact springs for biasing said transducer element into a state of strain; and fulcrum means mounted on said diaphragm and in abutment with the spring lever means such that acoustic vibrations of the diaphragm are transmitted to said transducer element.
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Specification