Table positioning system including optical reference position measuring transducer

• US 4,191,916 A
• Filed: 11/23/1977
• Issued: 03/04/1980
• Est. Priority Date: 11/23/1977
• Status: Expired due to Term

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Zasio, John J., Samuels, Michael W.
• Primary Examiner(s): Dobeck, B.
• Application Number:
  US05/854,424
• Time in Patent Office: 832 Days
• Field of Search: 318/640, 318/577, 250/201
• US Class Current: 318/640
• CPC Class Codes: B23Q 15/24 of linear position
• CPC Class Codes: G05B 19/4015 going to a reference at the beginning of machine cycle, e.g. for calibration
• CPC Class Codes: H01J 37/3045 Object or beam position registration

Abstract

A table positioning apparatus suitable for use in an electron beam exposure system. A movable table holds a wafer or other work piece. The table is driven by a motor in response to a motor drive signal to position the table at different locations. An optical position measuring transducer is located in fixed relation to the table to establish a reference position for the table in a local region. The transducer provides a position signal as a function of the table position in the local region. An amplifier is provided which is responsive to the position signal to produce a servo signal. A motor drive circuit provides the motor drive signal for driving the motor in response to the servo signal so that the table is driven to the reference position. At the reference position, a reset signal is provided to reset interferometers in both X and Y axes.

Claims

1. A table positioning apparatus including in each of first and second axes,

a movable table,

a motor for driving the table in response to a motor drive signal,

an optical position measuring transducer located to establish a reference position for said table in a local region defined by a light beam, and operative to provide a reference position signal as a function of the table position relative to said reference position in the local region, said position signal having a reference value when the table is at the reference position,

an amplifier responsive to said reference position signal to produce a servo signal having a positive sign when said position signal is less than said reference value, having a zero value when said position signal is equal to said reference value, and having a negative sign when said position signal is greater than said reference value,

a motor drive for providing said motor drive signal in response to said servo signal whereby said table is driven to said reference position and causes said servo signal to have said zero value to indicate that said table is at said reference position,

a zero detector for detecting said zero value to provide a servo zero signal,

an interferometer for measuring the position of said table over a table travel greater than and including said local region, said measurement unit including a digital counter for storing a count representing the position of the table as measured by said measurement unit,

means for connecting said servo zero signal to reset said counter to establish said count to indicate said reference position.

2. A table positioning apparatus comprising,

a movable table,

motor means for driving the table in response to a motor drive signal,

position measuring transducer means located to establish a reference position for said table in a local region and operative to provide a reference position signal as a function of the table position relative to said reference position in the local region, said position signal having a reference value when the table is at the reference position, said transducer means including an optical transducer having a light beam covering an area including said reference position and defining said local region and said table apparatus including means for blocking said light beam as a function of table position to produce said position with a magnitude proportional to the area of the light beam not blocked,

amplifier means responsive to said reference position signal to produce a servo signal having a predetermined value when said position signal is equal to said reference value,

motor drive means for providing said motor drive signal in response to said servo signal whereby said table is driven to said reference position and causes said servo signal to have said predetermined value to indicate that said table is at said reference position.

3. The apparatus of claim 2 including detector means for detecting the predetermined value of said servo signal to provide a servo zero signal for indicating when said table is at said reference position.

4. The apparatus of claim 3 including measurement unit apparatus for measuring the position of said table over a table travel greater than and including said local region and the reference position, said measurement unit including a digital counter for storing a count representing the position of the table as measured by the measurement unit, means for connecting said servo zero signal to reset said counter when said table is at said reference position.

5. The apparatus of claim 4 wherein said connection means includes delay means for delaying the reset of said counter.

6. The apparatus of claim 2 including table control means for providing an analog error signal for driving the table to a commanded-position, and wherein said motor drive means includes switch means for selecting either said error signal or said servo signal to provide said motor drive signal.

7. The apparatus of claim 6 including a mode latch settable to cause said switch means to select said servo signal during a reference mode of operation, including means for providing a reset signal when said table is at said reference position, including means connecting said reset signal to reset said mode latch to cause said switch means to select said error signal during a commanded-position mode of operation.

8. The apparatus of claim 2 wherein said motor drive means includes switch means for connecting said motor drive signal to said motor means in one position and for connecting a common potential to said motor means in a second position, said switch means responsive to a limit signal for connecting the common potential to said motor means, said apparatus including limit transducer means located to establish a limit position for said table, said limit transducer means generating said limit signal when said table has traveled to said limit position.

9. A table positioning apparatus comprising,

a movable table apparatus including an X axis table movable in the X axis direction carried by a Y axis table movable in the Y axis direction,

motor means including X axis and Y axis motors for driving the X axis and Y axis tables, respectively, in response to X axis and Y axis motor drive signals, respectively,

position measuring optical transducer means including an X axis transducer and a Y axis transducer located to establish X axis and Y axis reference positions, respectively, for said tables and operative to provide X axis and Y axis position signals, respectively, as a function of X axis and Y axis table positions relative to said X axis and Y axis reference positions, respectively, said X axis and Y axis position signals having X axis and Y axis reference values when the X axis and Y axis tables, respectively, are at the X axis and Y axis reference positions,

amplifier means including an X axis amplifier and a Y axis amplifier responsive to said X axis and Y axis position signals, respectively, to produce X axis and Y axis servo signals, each of said servo signals having one sign when the corresponding position signal is less than the corresponding reference value, having a zero value when the corresponding position signal is equal to the corresponding reference value, and having the opposite sign when the corresponding position signal is greater than the corresponding reference value,

motor drive means including X axis and Y axis motor drives for providing said X axis and Y axis motor drive signals, respectively, in response to said X axis and Y axis servo signals, respectively, whereby said X axis and Y axis tables are driven to said X axis and Y axis reference positions, respectively, and whereby said table apparatus is simultaneously positioned at both said X axis and Y axis reference positions.

10. The apparatus of claim 9 wherein each of said X axis and Y axis transducers includes means for generating a light beam covering an area including said X axis reference position and said Y axis reference position, respectively, and wherein said X axis and Y axis tables include means for blocking said light beams as a function of table positions to produce said X axis and Y axis position signals, respectively, with magnitudes proportional to the areas of the light beams not blocked.

11. The apparatus of claim 9 including X and Y detector means for detecting the zero values of said X axis and Y axis servo signals, respectively, to provide X axis and Y axis servo zero signals, respectively, for indicating when said tables are at said X axis and Y axis reference positions, respectively.

12. The apparatus of claim 11 including control means for sensing the presence of both said X axis servo zero signal and said Y axis servo zero signal to provide a combined servo zero signal for indicating when said table apparatus is at both said X axis reference position and said Y axis reference position.

13. The apparatus of claim 12 including X axis and Y axis measurement units for measuring the positions of said X axis and Y axis tables, respectively, over X axis and Y axis table travels, respectively, including the X axis and Y axis reference positions, respectively, said X axis and Y axis measurement units including X axis and Y axis digital counters, respectively, for storing counts representing the positions of the X axis and Y axis tables, respectively, as measured by the X axis and Y axis measurement units, respectively, said table positioning apparatus including connection means for connecting said combined servo zero signal to reset said X axis and said Y axis counters.

14. The apparatus of claim 13 wherein said connection means includes a delay circuit for delaying said combined servo zero signal before resetting said counters.

15. In a servo control system for positioning a table wherein a servo motor is rotated by the output of a servo amplifier and a tachometer is driven by the servo motor and feeds back a generating signal to one input of the servo amplifier, a table stopping system comprising;

first photo-coupler provided at a first predetermined end position at which the movement of the table is to be terminated, said photo-coupler providing an output signal,

a knife blade provided on said table for cutting a light beam in said first photo-coupler when the table is positioned at the first predetermined end position, and,

a first comparator having an output connected to another input of the servo amplifier and having first and second inputs, the first input being supplied with a first reference voltage and the second input being supplied with the output signal of the first photo-coupler, whereby a zero signal on the output of said comparator stops the movement of the table at the first predetermined end position.

16. The system of claim 15 wherein said first photo-coupler comprises a light emitting diode and a photosensitive transistor.

17. The system of claim 15 wherein said reference voltage equals approximately one-half the maximum output voltage of said first photo-coupler.

18. The system of claim 15 wherein said table includes a supporting means in the work chamber of an electron beam exposure system for supporting a work piece to be exposed with an electron beam.