Compensated pressure transducer employing digital processing techniques

• US 4,192,005 A
• Filed: 11/21/1977
• Issued: 03/04/1980
• Est. Priority Date: 11/21/1977
• Status: Expired due to Term

• Current Assignee: Kulite Semiconductor Products Inc
• Original Assignee: Kulite Semiconductor Products Inc
• Inventors: Kurtz, Anthony D.
• Primary Examiner(s): Smith, Jerry
• Application Number:
  US05/853,219
• Time in Patent Office: 834 Days
• Field of Search: 364/508, 364/558, 364/571, 364/573, 364/581, 364/582, 73/88.5 SD, 73/345, 338/3
• US Class Current: 702/98
• CPC Class Codes: G01L 9/065 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

A semiconductor sensor configuration employs piezoresistors arranged in a bridge configuration. A memory has stored therein at predetermined locations, values indicative of error voltages associated with the particular bridge circuit due to undesireable variations of temperature and pressure. The bridge circuit is coupled to digital processing circuitry which serves to access the memory at desired locations to retreive the values stored and to process these values in order to compensate the output signal supplied by the bridge during operation to provide a compensated output signal truly determinative of the applied pressure as being compensated for the particular error signals as stored in the memory.

It is also understood that the above described technique has applicability in compensating other sensor configurations which employ non-semiconductor strain gages.

Claims

1. A pressure transducer of the type employing semiconductor sensor elements capable of providing a change in resistance according to the magnitude of an applied pressure, said elements when biased, undesirably providing specified error voltages due to variations inherent in said elements as fabricated with a first error voltage indicative of errors due to a predetermined temperature change, a second error voltage due to changes by a reference pressure applied over a given temperature range, and a third error voltage due to a linear incremental pressure level applied to said elements over a predetermined pressure range, comprising:

(a) memory means having stored at predetermined address locations values indicative of said undesired error voltages,

(b) means coupled to said semiconductor elements and responsive to the temperature of operation for generating a code indicative of one of said predetermined memory address locations,

(c) means for applying said code to said memory to access a value indicative of each of said undesired error voltages,

(d) means for applying a pressure to said semiconductor sensor elements to cause the same to provide a change in resistance according to said pressure, including means coupled to said sensor elements to provide a signal indicative of said pressure,

(e) logic means responsive to said signal and said value indicative of each of said error voltages to compensate said signal sequentially according to the magnitude of each of said values as stored to provide at an output, a compensated signal indicative of said applied pressure and relatively independent of each of said error voltages.

2. The pressure transducer according to claim 1 wherein said logic means includes algorithmic processing circuitry adapted to operate on said error signal to compensate said sensor signal according to the value of said algorithm as processed.

3. The pressure transducer according to claim 2 wherein said algorithmic processor is adapted to solve the relationship:

space="preserve" listing-type="equation">Y=AP+BP.sup.2

where

Y=V OUT voltage of sensor elements

A=constant associated with said elements

B=another constant associated with said elements

P=Pressure.

4. The pressure transducer according to claim 1 wherein said means for generating a code includes temperature responsive means for monitoring the operating temperature of said sensor elements to generate said code according to said temperature.

5. The pressure transducer according to claim 1 further including display means coupled to said logic means and operative to provide a display indicative of said compensated signal.

6. In apparatus for providing an output signal indicative of an applied pressure, said apparatus including a semiconductor bridge circuit including sensor elements which provide a change in resistance according to the magnitude of an applied pressure, said bridge circuit when biased by a reference voltage source, providing a voltage at an output according to said applied pressure, which voltage undesireably includes at least a first error signal due to variations in operating temperature, a second error signal due to variations in pressure offset, the combination therewith of apparatus for providing an output signal indicative of said applied pressure and compensated according to said error signals, comprising:

(a) memory means having a plurality of storage locations, a first location having stored therein values indicative of said first error signal according to temperature, at least a second location having stored therein values indicative of pressure offset,

(b) temperature sensing means responsive to the temperature at which said bridge circuit is operating to provide a signal indicative of the same,

(c) a selectable cycle generator coupled to said memory means and said temperature sensing means, for providing at an output, a first code capable of selecting said first location and a second code capable of selecting said second location,

(d) selection means coupled to said memory means and responsive to said first code to provide at an output, a signal indicative of said first error signal during a first cycle and responsive to said second code to provide an output signal indicative of said values of pressure offset during a second cycle,

(e) means responsive to said voltage from said bridge and said signal indicative of said first error signal to provide a signal indicative of said bridge voltage compensated according to said first error signal, and means responsive to said bridge voltage and said pressure offset signal to provide an output signal indicative of said bridge voltage compensated according to said first error signal and said pressure offset signal.

7. The apparatus according to claim 6 further comprising:

(a) a third memory location having stored therein values indicative of an error signal due to incremental pressure variations over a predetermined pressure range,

(b) means included in said selectable cycle generator to provide a third code capable of selecting said third locations,

(c) means included in said selection means and responsive to said third code to provide at an output, a weighted signal indicative of said incremental pressure variations,

(d) logic means responsive to said output signal and said weighted signal to provide a further output signal compensated according to said first error signal, said pressure offset signal and said pressure increment signal.

8. The apparatus according to claim 7 wherein said temperature sensing means includes a resistor in series with said bridge circuit and said reference source and means for monitoring the voltage across said resistor to provide at an output, a signal indicative of temperature.

9. The apparatus according to claim 8 wherein said logic means is adapted to solve the relationship:

space="preserve" listing-type="equation">Y=AP+BP.sup.2

where

Y=said output signal

A &

B=said weighted signal as stored

P=said further output signal.

10. A method of compensating a pressure sensor bridge array according to predetermined error voltages contained in the output of said array, comprising the steps of:

(a) storing in memory at predetermined address locations, values indicative of said error voltages, with first values indicative of error voltages of said array over a predetermined temperature range, with second values indicative of error voltages due to incremental pressure variations over a predetermined range,

(b) applying a pressure to said bridge array,

(c) measuring and storing the output of said bridge array when said pressure is applied,

(d) measuring the temperature at which said array is operating,

(e) providing a code indicative of said temperature of operation,

(f) sequentially accessing said memory with said code at selected ones of said address locations to retrieve values indicative of said error voltages,

(g) processing said stored output of said bridge array with respect to said retrieved error voltages to provide a first signal indicative of said pressure relatively independent of said error voltage,

(h) processing said first signal according to Y=AP+BP², where Y= output signal of said bridge array, A= constant stored in memory, B= constant stored in memory and P= pressure indicative of said first signal, and

(i) displaying said signal.