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Piezoresistive silicon strain sensors and pressure transducers incorporating them

  • US 4,203,327 A
  • Filed: 06/29/1978
  • Issued: 05/20/1980
  • Est. Priority Date: 06/29/1978
  • Status: Expired due to Term
First Claim
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1. A silicon strain sensor, comprisinga body of spinel, anda silicon piezoresistive element grown on said body to enable a change in the stress in said body to be efficiently transmitted to said element,whereby the latter exhibits resistance changes which are a function of changes in the strain in said body.

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