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Optical measuring system

  • US 4,204,772 A
  • Filed: 09/25/1078
  • Issued: 05/27/1980
  • Est. Priority Date: 09/25/1978
  • Status: Expired due to Term
First Claim
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1. An optical method of measuring the distance between first and second surfaces with an optical system including the steps of:

  • (a) passing a collimated light beam through a first lens having a focal plane coinciding with said first surface in a direction parallel to and displaced from the optical axis of said first lens so that said collimated beam is focused to a first point coinciding with the point of intersection of the optical axis of said first lens in said focal plane;

    (b) re-imaging light from said first point passing back along the optical axis and through said first lens with a second lens onto a sensor surface, said collimated light beam, first and second lens and sensor surface constituting part of said optical system;

    (c) effecting relative movement between said optical system and said second surface to position said second surface to intercept said collimated beam at a second point, said second point being laterally displaced from the point of intersection of the optical axis with said second surface by an amount directly proportional to the distance of said second surface from the focal plane of said first lens;

    (d) re-imaging light from said second point passing back through said first lens with said second lens onto said sensor surface, the image of said second point on said sensor surface being laterally displaced from the position occupied by the image of the first point on said sensor surface; and

    (e) moving said first lens along its optical axis relative to said second surface until the second point image on said sensor surface reaches the position that the first point image on said sensor surface occupied thereby positioning the focal plane of said first lens in a position coplanar with said second surface, the physical distance over which said first lens is moved indicating the distance between said first and second surfaces.

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