High registration photomask machine and computerized numerical control system

• US 4,225,225 A
• Filed: 10/12/1978
• Issued: 09/30/1980
• Est. Priority Date: 10/12/1978
• Status: Expired due to Term

• Current Assignee: Gilbert P. Hyatt
• Original Assignee: Gilbert P. Hyatt
• Inventors: Hyatt, Gilbert P.
• Primary Examiner(s): Wintercorn, Richard A.
• Application Number:
  US05/950,901
• Time in Patent Office: 719 Days
• Field of Search: 354/4, 355/67, 355/69, 355/78, 355/53, 355/95, 355/14, 355/6, 340/147 R, 340/723, 340/724, 340/799, 364/515, 364/519, 364/523, 364/525, 178/15, 358/302
• US Class Current: 355/78
• CPC Class Codes: G03F 7/70525 Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
• CPC Class Codes: G03F 7/70633 Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching

Abstract

A photographic system and a microcomputer based control system are provided for providing photographic exposures. An illumination control system for generating high registration photomasks is provided. A control system implemented with a monolithic microcomputer controls a photographic device through a minimal interface for high capability and economy.

Claims

1. A high registration photographic exposure system comprising:

a command device for generating an input command signal;

an integrated circuit read only memory for storing command information;

an integrated circuit alterable memory for storing processed information;

a processor for processing the information stored in said alterable memory in response to the input command signal from said command device under control of the command information stored in said read only memory;

a control circuit for generating a control signal in response to the processing of information with said processor; and

a high registration machine for generating a plurality of contact exposures having high registration therebetween in response to the control signal.

2. The system as set forth in claim 1 above, wherein said read only memory is a computer main memory, wherein the stored command information includes a computer program, and wherein said processor is a computer processor.

3. An illumination control system comprising:

a monolithic processor for processing information, said processor including;

(a) an integrated circuit read only memory for storing command information,

(b) an integrated circuit alterable memory for storing processed information, and

(c) integrated circuit processing logic for processing the information stored in said alterable memory under control of the command information stored in said read only memory;

a control circuit for generating a control signal in response to the processing of information with said processing logic; and

a machine for exposing an illumination sensitive medium in response to the control signal.

4. The system as set forth in claim 3 above, wherein said machine is a high registration machine for exposing a high registration photomask medium in response to the control signal.

5. The system as set forth in claim 3 above, wherein said machine is a photographic camera for exposing a photographic film medium in response to the control signal.

6. The system as set forth in claim 3 above, wherein said monolithic processor is a stored program digital computer and wherein the command information stored in said read only memory is a stored program.

7. The system as set forth in claim 3 above, further comprising an operator input device for generating an input signal in response to operator actuation, wherein said processing logic includes operator command logic for processing the information stored in said alterable memory in response to the input signal under control of the command information stored in said read only memory.

8. The system as set forth in claim 3 above, wherein said machine includes a shutter for exposing an illumination sensitive medium in response to the control signal.

9. The system as set forth in claim 3 above, further comprising an operator display for displaying information to an operator in response to a display signal, wherein said monolithic processor includes display logic for generating the display signal in response to the processing of information with said processing logic under control of the command information stored in said read only memory.

10. The system as set forth in claim 3 above, wherein said machine includes means for loading an illumination sensitive medium.