Fabrication of capacitive transducers

• US 4,225,632 A
• Filed: 11/11/1977
• Issued: 09/30/1980
• Est. Priority Date: 11/11/1977
• Status: Expired due to Term

• Current Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Ho, Roland K.
• Primary Examiner(s): Kaplan, Morris
• Application Number:
  US05/850,759
• Time in Patent Office: 1,054 Days
• Field of Search: 427/265, 427/282, 427/79, 427/80, 427/81, 427/272, 427/266, 361/283, 101/129, 29/25.42, 148/1 NQ, 118/720
• US Class Current: 427/79
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: Y10T 29/435 Solid dielectric type

Abstract

A method for constructing a capacitive transducer by depositing a uniform glass insulating ring. The capacitive transducer consists of a circular base substrate and a circular diaphragm, each supporting one of two capacitor electrode and separated by a uniform glass insulating ring which determines a uniform air gap between the capacitor electrodes. Pressure changes cause the diaphragm to flex and thereby produce capacitance changes in relation to the pressure being sensed. The thickness of the glass insulating ring is critical to the production of an accurate pressure transducer and is produced in the following manner. A first glass insulating ring layer is screen printed onto a substrate through a mask having a pattern therein. Subsequently, the relative rotational orientation between the mask pattern and the first screened layer is altered by a predetermined number of degrees and a second screened layer is deposited on top of the first layer. By this technique, a uniformly thick layer of glass frit (finely divided particles) is deposited on the substrate despite any imperfections or variations in the thickness of the mask or the uniformity of the pattern contained in the mask.

Claims

1. A method for depositing a uniform screen printed thick layer of material on a substrate, comprising the steps of:

depositing a first layer of a material onto a substrate by using a pattern bearing mask wherein said pattern is an annular ring and through which said first layer of material passes,

then altering the relative rotational orientation between the mask pattern and the substrate by a predetermined number of degrees, and

subsequently depositing a second layer of said material onto said first layer by utilizing said pattern bearing mask, through which said second layer of material passes, whereby a thick uniform layer of said material is deposited on said substrate despite imperfections and variations in any of the deposited layers.

2. A method according to claim 1 wherein said predetermined number of degrees is equal to a multiple of 360°

/N, where N equals the total number of layers of said material to be deposited on said substrate by using said pattern mask.

3. A method according to claim 2 wherein said predetermined number of degrees is equal to 90°

and said number of layers to be deposited on said substrate by using said mask is four.

4. A method according to claim 1 which includes the step of driving said first layer such that any solvent in said material is substantially evaporated before depositing said second layer.

5. A method according to claim 1 wherein said material comprises glass frit particles.

6. A method according to claim 5 wherein said base substrate comprises a ceramic body having a planar surface on which said layers are to be deposited.

7. A method according to claim 6 wherein said ceramic body and said layers of glass frit are heated to a temperature such that said glass frit softens and becomes bonded to said ceramic substrate.

8. A method according to claim 1 wherein said pattern bearing mask comprises a screen coated with an exposed photosensitive emulsion which defines a pattern corresponding to said layers.

9. A method according to claim 1 wherein said pattern contained in said mask is rotationally symmetric in multiples of a predetermined angle.

10. A method for manufacturing a uniform screen printed glass seal for a capacitive transducer, comprising the steps of:

depositing a first layer of a material onto a planar substrate surface in a pattern defining the periphery of an inner area of the substrate surface by using a pattern bearing mask wherein said pattern is an annular ring and through which said first layer of material passes, said first layer having a predetermined rotational orientation with respect to said substrate surface,

then altering the relative rotational orientation between the mask pattern and the substrate by a predetermined number of degrees, and

subsequently depositing a second layer of said material onto said first layer by utilizing said pattern bearing mask, through which said second layer of material passes, whereby a thick uniform layer of said material is deposited on said substrate despite imperfections and variations in any of the deposited layers.