Etchant for silicon dioxide films disposed atop silicon or metallic silicides

• US 4,230,523 A
• Filed: 12/29/1978
• Issued: 10/28/1980
• Est. Priority Date: 12/29/1978
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Gajda, Joseph J.
• Primary Examiner(s): Massie, Jerome W.
• Application Number:
  US05/974,573
• Time in Patent Office: 669 Days
• Field of Search: 156/653, 156/656, 156/657, 156/662, 156/667, 252/79.1, 252/79.3, 252/79.4, 252/143, 134/3
• US Class Current: 438/756
• CPC Class Codes: H01L 21/31111 by chemical means

Abstract

An etchant comprising a solution of hydrogen fluoride dissolved in an organic solvent such as glycerine. The solution is substantially free of unbound water and ammonium fluoride. The etchant is particularly suitable for removing silicon dioxide disposed atop a metallic silicide formed in a silicon semiconductor where the silicon may be exposed.

Claims

1. In a process for selectively etching a silicon oxide layer which is disposed atop a metallic silicide layer and wherein exposed silicon may be present below or adjacent to said silicide, the step of contacting said oxide layer with an etchant comprising:

hydrogen fluoride in polyhydric alcohol, the solution being substantially free of unbound water and ammonium fluoride;

said etchant not substantially attacking either said silicide layer or said silicon.

2. A process as defined in claim 1 wherein said alcohol is glycerine.

3. A process as in claim 1 wherein said etchant contains from 1-4 percent hydrogen fluoride solution which includes water.

4. A process as in claim 2 wherein said etchant contains around 2 percent hydrogen fluoride solution which includes water.

5. A process as in claims 1, 2, 3 or 4 wherein said etchant includes a wetting agent.

6. A process as in claims 1, 2, 3 or 4 wherein said exposed silicon has an N+ or N type impurity concentration.

7. A process as in claims 1, 2, 3 or 4 wherein said metallic silicide is platinum silicide.