Method for fabricating stacked semiconductor diodes for high power/low loss applications

• US 4,237,600 A
• Filed: 11/16/1978
• Issued: 12/09/1980
• Est. Priority Date: 11/16/1978
• Status: Expired due to Term

• Current Assignee: RCA Corporation
• Original Assignee: RCA Corporation
• Inventors: Rosen, Arye, Mykietyn, Edward, Gombar, Anna M.
• Primary Examiner(s): Tupman, W. C.
• Application Number:
  US05/961,471
• Time in Patent Office: 754 Days
• Field of Search: 29/577, 29/580, 29/583, 29/576 J
• US Class Current: 438/109
• CPC Class Codes: H01L 23/482 consisting of lead-in layers inseparably applied to the semiconductor body electrodes H01L29/40
• CPC Class Codes: H01L 25/074 Stacked arrangements of non-apertured devices
• CPC Class Codes: H01L 29/6609 Diodes
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10S 148/028 Dicing

Abstract

A semiconductor wafer is appropriately doped to create a P-N or P-I-N junction, and metallized on both its planar surfaces with electrode material. The wafer is then bonded to a second similarly processed wafer. Without damaging the semiconductor material, the stacked wafer is processed so as to delineate a plurality of diodes on each side of the center metallization, such that the diodes on each side are registered with each other. The center metallization is then cut so as to yield a plurality of stacked semiconductor diodes.

Claims

1. A method for batch fabricating stacked semiconductor devices, wherein the stack consists of two diodes, comprising the steps of:

(a) depositing a metallization layer on both planar surfaces of two appropriately doped semiconductor wafers;

(b) bonding one wafer to the second wafer such that they form a stacked, concentric configuration with complete surface contact;

(c) generating a plurality of electrode areas on both planar surfaces of the stacked wafer, such that the electrode areas on each surface are registered with each other;

(d) etching through the semiconductor material on both sides of the stacked wafer, using the electrode areas as an etch mask, such that the metallization layer at the center of the stack is exposed; and

,

(e) separating the stacked wafer along the exposed center metallization boundaries, so as to create a plurality of stacked semiconductor devices.

2. A method in accordance with claim 1, wherein the bonding is accomplished by soldering across the entire interface between the two wafers.

3. A method in accordance with claim 1, wherein prior to metallization, each of the semiconductor wafers is doped so as to create a surface layer of N-type conductivity, an opposite surface layer of P-type conductivity, and a P-N junction in the interior of the wafer, at the interface of the two surface layers.

4. A method in accordance with claim 1, wherein prior to metallization, each of the semiconductor wafers is doped so as to create a P-I-N junction, with a surface layer of N-type conductivity, an opposite surface layer of P-type conductivity, and an intermediate layer of intrinsic semiconductor.

5. A method in accordance with claim 1, wherein the metallization layer is comprised of a gold thin film overlying a chromium thin film.

6. A method in accordance with claim 5 wherein after bonding the two wafers, additional gold metallization is deposited on the gold thin film layer which covers each surface of the stacked wafer.

7. A method in accordance with claims 1 or 6, wherein the electrode areas are delineated by generating a photoresist pattern on the metallization on each surface of the stacked wafer;

removing the metallization from the areas which are not covered by photoresist; and

, removing the photoresist.

8. A method in accordance with claim 7, wherein the steps of generating the photoresist pattern, removing the metallization, and removing the photoresist, are performed on both surfaces simultaneously.