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Mechanical resonator arrangements

  • US 4,244,225 A
  • Filed: 06/08/1979
  • Issued: 01/13/1981
  • Est. Priority Date: 06/08/1979
  • Status: Expired due to Term
First Claim
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1. An acceleration sensing means comprising:

  • a block having a comb-like array of three cantilevers with a semiconductor filament fixed in tension between each adjacent pair, a central cantilever being longer than the other two.

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