Mechanical resonator arrangements
First Claim
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1. An acceleration sensing means comprising:
- a block having a comb-like array of three cantilevers with a semiconductor filament fixed in tension between each adjacent pair, a central cantilever being longer than the other two.
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Abstract
An acceleration sensor including a block having comb-like projections forming three cantilever beams. A semiconductor filament is then fixed in tension between each adjacent pair of the beams. The beam on one extreme side has a length equal to that of the beam on the other, whereas the center beam is longer than the other two.
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2 Claims
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1. An acceleration sensing means comprising:
- a block having a comb-like array of three cantilevers with a semiconductor filament fixed in tension between each adjacent pair, a central cantilever being longer than the other two.
- View Dependent Claims (2)
Specification