Apparatus for treatment with gas plasma

• US 4,245,154 A
• Filed: 06/28/1978
• Issued: 01/13/1981
• Est. Priority Date: 09/24/1977
• Status: Expired due to Term

• Current Assignee: Tokyo Ohka Kogyo K.K.
• Original Assignee: Tokyo Ohka Kogyo K.K.
• Inventors: Kiyota, Hiroyuki, Uehara, Akira, Nakane, Hisashi, Toda, Shozo
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US05/919,856
• Time in Patent Office: 930 Days
• Field of Search: 350/96.26, 350/96.25, 350/96.27, 250/227, 250/551, 313/231.3
• US Class Current: 250/227.11
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge

Abstract

An improved apparatus for plasma treatment of silicon semiconductor wafers is proposed in which the end point of the plasma etching or ashing can be readily detected by monitoring with an optical fiberscope penetrating the wall of the plasma reaction chamber with one terminal located inside the plasma reaction chamber with a condenser lens attached thereto and the other terminal located outside the plasma reaction chamber at a distanced position free from the influence of the high frequency electric field inherent to plasma generation which otherwise interferes with the photoelectric recording by the photocell connected to the outer terminal of the optical fiberscope.

Claims

1. Plasma treatment apparatus for treatment of silicon semiconductor wafers and the like comprising

a plasma reaction chamber having an inlet for plasma forming gas and an outlet for connection to a vacuum source,

means for supporting a semiconductor wafer during plasma treatment and comprising,

a wafer table located within said chamber and being movable between upper and lower positions relative to said chamber.

high frequency electrode means associated with said chamber and connected to a high frequency generator for creating plasma within said chamber,

an optical fiberscope having first and second terminals, said first terminal penetrating a wall of the chamber and said second terminal being connected to a photoelectric transducer means for detecting light intensity, said second terminal and photoelectric transducer means being positioned at a location remote from said high frequency electrode means to avoid any significant electrical interference therefrom on said photoelectric transducer means, and

a condenser lens located within said chamber and being connected to said first terminal of said optical fiberscope for collecting light emitted from the plasma within said chamber.

2. The apparatus as claimed in claim 1 wherein said high frequency electrode means comprises an electrode located within said chamber and an electrode located outside said chamber, said electrodes being connected respectively to said generator means.

3. The apparatus as claimed in claim 2 including means for moving said wafer table between said upper and lower positions.

4. The apparatus as claimed in any one of claims 1 to 3 and including a grounded cage of wire netting surrounding said chamber to shield said photoelectric transducer means from high frequency electric fields from said high frequency electrode means.

5. Plasma treatment apparatus for treatment of a semiconductor wafer comprising

a plasma reaction chamber,

a high frequency generator,

high frequency electrode means connected to said generator for creating plasma within said chamber,

means for monitoring the surface condition of the semiconductor wafer during plasma treatment thereof by monitoring the light intensity of the plasma, said means comprising,

an optical fiberscope having first and second terminals, said first terminal being positioned to collect light from the plasma in said chamber, said second terminal being connected to a photoelectric transducer, said second terminal and said photoelectric transducer being positioned at a location sufficiently remote from said electrode means and chamber to avoid interference from an electric field created by the electrode means, and means for detecting changes in the electrical output of said photoelectric transducer to thereby detect changes in the intensity of the light of the plasma and to thereby monitor the extent of plasma treatment of the semiconductor wafer.

6. Apparatus according to claim 5 wherein a condenser lens is connected to said first terminal of said optical fibroscope so that from the plasma passes through said lens to said first terminal.

7. Apparatus according to claim 6 wherein at least a portion of said lens is within said reaction chamber.

8. Apparatus according to any one of claims 5 to 7 wherein said first terminal penetrates a wall of the reaction chamber.

9. Apparatus according to claim 5 wherein said chamber has an inlet for plasma forming gas and an outlet for connection to a vacuum source, and means for flowing said plasma forming gas to said inlet at a predetermined rate.