Acoustic wave device

• US 4,268,808 A
• Filed: 05/21/1979
• Issued: 05/19/1981
• Est. Priority Date: 05/21/1979
• Status: Expired due to Term

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Melngailis, John
• Primary Examiner(s): Nussbaum, Marvin L.
• Application Number:
  US06/040,667
• Time in Patent Office: 729 Days
• Field of Search: 333/193-196, 333/150-155, 333/187, 333/142, 333/143, 333/147, 310/313
• US Class Current: 333/195
• CPC Class Codes: H03H 9/02622 of the surface, including back surface
• CPC Class Codes: H03H 9/02653 Grooves or arrays buried in the substrate
• CPC Class Codes: H03H 9/0296 Surface acoustic wave [SAW] devices having both acoustic and non-acoustic properties

Abstract

A surface acoustic wave (SAW) device including a crystal substrate having two substantially planar surfaces and at least one SAW-to-plate mode coupler positioned on one of the surfaces. The SAW-to-plate mode coupler includes a plurality of parallel, linear surface perturbations. The surface perturbations are adapted to convert a portion of an incident SAW to a bulk acoustic wave (BAW). In addition, the coupler is adapted to convert a portion of an incident BAW (from the crystal bulk region) to a SAW at those surface perturbations. In addition, the planar surfaces of the crystal substrate are adapted to reflect portions of incident BAW'"'"'s. The coupler is positioned with respect to the crystal characteristics so that SAW'"'"'s and BAW'"'"'s resonantly interact at the coupler. In alternative configurations, a second SAW-to-plate mode coupler is positioned on the second surface of the crystal substrate. This second surface coupler also is adapted to convert a portion of an incident SAW to a bulk acoustic wave (BAW) at a plurality of parallel surface perturbations, and to convert a portion of an incident BAW to a SAW at those perturbations. The couplers are positioned in view of the crystal characteristics so that the BAW'"'"'s and SAW'"'"'s resonantly interact at the couplers.

Claims

1. A surface acoustic wave (SAW) device comprising:

A. a crystal substrate having two substantially planar surfaces,

B. a first SAW-to-plate mode coupler on a first of said surfaces, said first coupler including;

first SAW converting means for converting a portion of an incident SAW to a bulk acoustic wave (BAW), said first SAW converting means including a plurality of parallel linear surface perturbations, and

first BAW converting means for converting a portion of an incident BAW to a SAW, said first BAW converting means including said plurality of surface perturbations,

C. a first BAW reflector on the first of said surfaces including means for reflecting a portion of an incident BAW,

D. a second BAW reflector on the second of said surfaces including means for reflecting a portion of an incident BAW,

wherein said second BAW reflector is positioned to reflect a portion of BAW'"'"'s incident thereon and propagating from said first SAW converting means and said first BAW reflector, to said first BAW converting means, and

wherein said first BAW reflector is positioned to reflect a portion of BAW'"'"'s incident thereon and propagating from said second BAW reflector, to said second BAW reflector, and

whereby SAW'"'"'s propagating on said first surface at said first BAW converting means resonantly interact with SAW'"'"'s produced on said first surface by said first BAW converting means.

2. A SAW filter according to claim 1 wherein said planar surfaces are substantially parallel and separated by a distance T.

3. A SAW filter according to claim 1 wherein said SAW-to-plate mode coupler on said first surface is a shallow groove grating.

4. A SAW device according to claim 1 wherein said SAW-to-plate mode coupler on said first surface is an array of film elements.

5. A SAW device according to claim 1 wherein said crystal is piezoelectric and said SAW-to-plate mode coupler on said first surface is an array of field shorting elements.

6. A SAW device according to claim 1 further comprising a second SAW-to-plate mode coupler on said second surface, said second coupler including:

second BAW converting means for converting a portion of an incident BAW to a SAW, said second BAW converting means including a plurality of parallel linear surface perturbations, and second SAW converting means for converting a portion of an incident SAW to a BAW, said second SAW converting means including said plurality of surface perturbations,

wherein said second BAW converting means is positioned to convert to SAW'"'"'s a portion of BAW'"'"'s incident thereon and propagating from said first SAW converting means and said first BAW reflector,

wherein said second SAW converting means is positioned so that a portion of BAW'"'"'s from said second SAW converting means is incident on said first BAW reflector,

whereby SAW'"'"'s propagating on said second surface at said second BAW converting means resonantly interact with SAW'"'"'s produced on said second surface by said second BAW converting means.

7. A SAW device according to claim 6 wherein said perturbations of said first and second couplers are substantially parallel.

8. A SAW device according to claims 1 or 2 wherein said surface perturbations are substantially periodic having a period P₁.

9. A SAW device according to claims 1 or 2 wherein the spacing between said surface perturbations is a monotonic function.

10. A SAW device according to claim 1 further comprising:

an input transducer coupled to said first surface on one side of said first coupler, said input transducer including means for generating a SAW on said first surface and having a velocity component directed toward said perturbations of said first coupler, and

an output transducer coupled to said first surface on the other side of said first coupler, said output transducer including means for receiving a SAW propagating on said first surface and having a velocity component directed away from said first coupler and including means for converting said received SAW to a signal representative thereof,

whereby the transfer function between said input and output transducers is characterized by a plurality of relatively narrow stop bands.

11. A SAW device according to claim 2 further comprising a second SAW-to-plate mode coupler on said second surface, said second coupler including:

second BAW converting means for converting a portion of an incident BAW to a SAW, said second BAW converting means including a plurality of parallel linear surface perturbations, and

second SAW converting means for converting a portion of an incident SAW to a BAW, said second SAW converting means including said plurality of surface perturbations,

wherein said second BAW converting means is positioned to convert to SAW'"'"'s a portion of BAW'"'"'s incident thereon and propagating from said first SAW converting means and said first BAW reflector,

wherein said second SAW converting means is positioned so that a portion of BAW'"'"'s from said second SAW converting means is incident on said first BAW reflector,

whereby SAW'"'"'s propagating on said second surface at said second BAW converting means resonantly interact with SAW'"'"'s produced on said second surface by said second BAW converting means.

12. A SAW device according to claim 11 wherein said perturbations of said first and second couplers are substantially parallel.

13. A SAW device according to claim 11 wherein said SAW-to-plate mode couplers on said first and second surfaces are shallow groove gratings.

14. A SAW device according to claim 11 wherein said SAW-to-plate mode couplers on said first and second surfaces are arrays of film elements.

15. A SAW device according to claim 11 wherein said crystal is piezoelectric and said SAW-to-plate mode couplers on said first and second surfaces are arrays of field shorting elements.

16. A SAW device according to claim 11 wherein said surface perturbations of said first surface coupler are substantially periodic, having period P₁, and wherein said surface perturbations of said second surface coupler are substantially periodic, having period P₂.

17. A SAW device according to claim 11, wherein the spacing between said surface perturbations of each of said first and second couplers is a monotonic function.

18. A SAW device according to claim 16 wherein P₁ equals P₂, and wherein said first and second couplers are mutually positioned whereby at least a portion of a BAW generated by an incident SAW at one of said couplers is coupled to the other coupler.

19. A SAW device according to claim 18 further comprising:

an input transducer coupled to said first surface on one side of said first and second couplers, said input transducer including means for generating a SAW on said first surface having a velocity component directed toward said first coupler, and

an output transducer coupled to said second surface on the other side of said first and second couplers, said output transducer including means for receiving a SAW propagating on said second surface and having a velocity component directed away from said second coupler, and including means for converting said received SAW to a signal representative thereof.

20. A SAW device according to claim 19 wherein said second coupler includes a portion displaced with respect to said first coupler in the direction of propagation of a SAW generated by said first transducer.

whereby the transfer function between said input and output transducers is characterized by a plurality of pass-bands, each of said pass-bands having a center frequency with a corresponding SAW wavelength less than P₁.

21. A SAW device according to claim 19 wherein said second coupler includes a portion displaced with respect to said first coupler in the direction opposite to the direction of propagation of a SAW generated by said first transducer

whereby the transfer function between said input and output transducers is characterized by a plurality of pass-bands, each of said pass-bands having a center frequency with a corresponding SAW wavelength greater than P₁.