Reference electrode of insulated gate field effect transistor

• US 4,269,682 A
• Filed: 12/11/1978
• Issued: 05/26/1981
• Est. Priority Date: 12/12/1977
• Status: Expired due to Term

• Current Assignee: Kuraray Company Limited, Tadayuki Matsuo
• Original Assignee: Kuraray Company Limited, Tadayuki Matsuo
• Inventors: Yano, Makoto, Shibatani, Kyoichiro, Shimada, Kiyoo, Makimoto, Tsutomu
• Primary Examiner(s): Tung, T.
• Application Number:
  US05/968,418
• Time in Patent Office: 897 Days
• Field of Search: 204/195 F, 204/195 M
• US Class Current: 204/418
• CPC Class Codes: G01N 27/414 Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02675 using laser beams

Abstract

A reference electrode of an insulated gate field effect transistor having the surface of the gate region thereof coated with a hydrophobic organic polymer membrane. Since this reference electrode is much smaller in size than conventional reference electrodes, an integrated measurement system can easily be constructed by using this reference electrode. This measurement system is especially effective for measuring various ions in the living body.

Claims

1. A system for measuring chemical properties of substances in an electrolyte solution, comprising:

a measuring unit comprising an insulated gate FET which selectively detects specific chemical substances;

a reference electrode comprising an insulated gate FET whose gate region is overlayed with a membrane, said membrane consisting of a hydrophobic organic polymeric membrane material that is impermeable to the electrolyte solution, free of an ionic dissociate group and insensitive to chemical properties of the solution;

a pseudo reference electrode formed of a good electrical conductor which applies bias to each FET transducer and fixes the electric potential of the electrolyte solution.

2. A system as set forth in claim 1 wherein said measuring unit comprises:

a FET having an insulated gate region overlaid with an orgaic polymeric membrane containing a ligand capable of selectively absorbing a specific chemical substance so that the sensor is sensitive to said specific chemical substance.

3. A system as set forth in claim 1 wherein said measuring unit comprises:

a FET having a gate insulating layer arranged in direct contact with the electrolyte solution to determine the pH or pNa of said solution.

4. A system as set forth in claim 1 wherein said hydrophobic organic polymeric membrane comprises:

a membrane in which the degree of water content is lower than 0.5% by weight.

5. A system as set forth in claim 1, further comprising:

said hydrophobic organic membrane having a thickness ranging from 500 A to 10,000 A.

6. A system as set forth in claim 1 wherein said hydrophobic organic polymeric membrane comprises:

a membrane of a polymer obtained by polymerizing a monomer selected from the group consisting of mono-olefins, halogenated ethylenes, conjugated dienes and halogenated conjugated dienes.

7. A system as set forth in claim 1 wherein said hydrophobic organic polymeric membrane comprises:

a membrane of a homopolymer obtained by polymerizing one monomer selected from the group consisting of mono-olefins, halogenated ethylenes, conjugated dienes and halogenated conjugated dienes.

8. A system as set forth in claim 1 wherein said hydrophobic organic polymeric membrane comprises:

a membrane of copolymer obtained by polymerizing at least two members selected from the group consisting of mono-olefins, halogenated ethylenes, conjugated dienes and halogenated conjugated dienes.

9. A system as set forth in claim 8, further comprising:

said mono-olefin having 2 to 5 carbon atoms.

10. A system as set forth in claim 8, wherein the mono-olefin is ethylene.

11. A system as set forth in claim 8, wherein said halogenated ethylene comprises:

a compound represented by the following general formula;

##STR4## wherein X₁, X₂, X₃ and X₄ stand for an atom selected from the group consisting of hydrogen, chlorine and fluorine atoms with the proviso that the case where all of X₁ to X₄ stands for a hydrogen atom excluded.

12. A system as set forth in claim 8 wherein the halogenated ethylene is trifluoroethylene or tetrafluoroethylene.

13. A system as set forth in claim 8 wherein the halogenated ethylene is vinyl chloride or vinylidene chloride.

14. A system as set forth in claim 8 wherein the conjugated diene or halogenated conjugated diene is a compound represented by the following general formula:

##STR5## wherein Y₁ to Y₆ stand for a member selected from the group consisting of hydrogen, chlorine and fluorine atoms and alkyl groups having 1 to 3 carbon atoms.

15. A measuring system as set forth in claim 14, wherein the conjugated diene or halogenated conjugated diene is butadiene or hexachlorobutadiene.

16. A system as set forth in claim 1, wherein said hydrophobic organic polymeric membrane comprises:

a membrane of a polysiloxane represented by the following general formula;

##STR6## wherein Z₁ and Z₂ stand for an alkyl or aryl group having 1 to 10 carbon atoms, in which one or more of the carbon atoms may have a halogen or cyano substituent, and n is a number of at least 100.

17. A system as set forth in claim 16, wherein the polysiloxane is polydimethylsiloxane or polyphenylsiloxane.

18. A system as set forth in claim 1, further comprising:

said measuring unit, said reference electrode and said pseudo reference electrode being formed on a common silicon wafer.