Pressure sensor
First Claim
1. A pressure sensor comprising:
- (a) a diaphragm assembly including a silicon diaphragm block which has a diaphragm, a diffused resistor formed as a pressure-sensitive element on a front surface of the diaphragm, and a silicon support plate bonded to the diaphragm block so as to cover a back surface of the diaphragm, and a first passage communicating from the back of the diaphragm to an opening in the surface of the diaphragm assembly;
(b) a hollow package sealingly accommodating the diaphragm assembly therein such that the assembly is bonded to the inside of the package at a portion of the assembly remote from the diaphragm in the direction of extension of the bonded surfaces of the block and the support plate, and said portion including the opening to the first passage, and that the front surface of the diaphragm and the diffused resistor thereon are spaced from the inside of the package, and having a second passage formed in the package and communicating from the opening to the first passage to the outside of the package; and
(c) a plurality of terminals extending outside the package and electrically connecting to the diffused resistor.
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Accused Products
Abstract
A diaphragm assembly includes a silicon diaphragm block which has a diaphragm at an eccentric position thereof, a diffused resistor formed as a pressure-sensitive element on a front surface of the diaphragm, and a silicon support plate bonded to the diaphragm block so as to cover a back surface of the diaphragm. The diaphragm assembly is accommodated sealingly within and bonded to the inside of a hollow package at an end portion of the assembly remote from the diaphragm in the direction of extension of the bonded surfaces of the block and the support plate. The front surface of the diaphragm and the diffused resistor thereon are exposed to a vacuum while a fluid pressure subject to measurement is introduced through a passage extending through the package and the end portion of the assembly bonded to the package so as to arrive at a back surface of the diaphragm.
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Citations
10 Claims
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1. A pressure sensor comprising:
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(a) a diaphragm assembly including a silicon diaphragm block which has a diaphragm, a diffused resistor formed as a pressure-sensitive element on a front surface of the diaphragm, and a silicon support plate bonded to the diaphragm block so as to cover a back surface of the diaphragm, and a first passage communicating from the back of the diaphragm to an opening in the surface of the diaphragm assembly; (b) a hollow package sealingly accommodating the diaphragm assembly therein such that the assembly is bonded to the inside of the package at a portion of the assembly remote from the diaphragm in the direction of extension of the bonded surfaces of the block and the support plate, and said portion including the opening to the first passage, and that the front surface of the diaphragm and the diffused resistor thereon are spaced from the inside of the package, and having a second passage formed in the package and communicating from the opening to the first passage to the outside of the package; and (c) a plurality of terminals extending outside the package and electrically connecting to the diffused resistor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification