Semiconductor variable capacitance pressure transducer assembly

• US 4,277,814 A
• Filed: 09/04/1979
• Issued: 07/07/1981
• Est. Priority Date: 09/04/1979
• Status: Expired due to Term

• Current Assignee: Ford Motor Company
• Original Assignee: Ford Motor Company
• Inventors: Giachino, Joseph M., Haeberle, Russell J., Crow, Joseph W.
• Primary Examiner(s): Goldberg, E. A.
• Application Number:
  US06/072,503
• Time in Patent Office: 672 Days
• Field of Search: 361/283, 361/405, 73/718, 73/724, 357/26
• US Class Current: 361/283.1
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

A capacitive pressure transducer assembly having a semiconductor transducer device, a substrate, and a cover for use in conducting a fluid pressure to be sensed to the exterior surfaces of the transducer device. The transducer device may have a glass, silicon or other nonconductive material as a base on which a metal capacitor plate is formed. The other capacitor plate may be formed of doped silicon or other semiconductor material. Also, the substrate on which the transducer device is mounted may have additional and related circuitry implemented in thick film technology (ceramic substrate) or integrated circuit technology (semiconductor substrate).

Claims

1. An improved variable capacitance pressure transducer assembly of the type which has a capacitive pressure transducer device comprising at least two spaced conductive plates subject to variation in the spacing between the plates, and resultant variation of the electrical capacitance between the plates, in response to fluctuations in fluid pressure acting on at least one of the plates, characterized by:

(a) a substrate, the substrate having electrically conductive strips thereon; and

(b) the pressure transducer device has conductive bumps on one of its surfaces, the conductive pumps being attached to the conductive strips of the substrate;

wherein the transducer assembly includes a cover surrounding the capacitive pressure transducer device, the cover being bonded to the substrate with a closed-path seal which crosses the conductive strips on the substrate without electrical contact to such conductive strips.

2. An improved transducer assembly according to claim 1 wherein the substrate is ceramic.

3. An improved transducer assembly according to claim 1 wherein the substrate is a semiconductive material.

4. An improved transducer assembly according to claim 1 wherein the capacitive pressure transducer device comprises a semiconductor material forming one of the conductive plates of the transducer device and a dielectric material having a first surface bonded to the semiconductor material and having a conductive material thereon forming another of the conductive plates of the transducer device, the dielectric material having a second surface on which the conductive bumps are located.

5. An improved transducer assembly according to claim 3 wherein the substrate is ceramic.

6. An improved variable capacitance pressure transducer assembly of the type which has a capacitive pressure transducer device comprising at least two spaced conductive plates subject to variation in the spacing between the plates, and resultant variation of the electrical capacitance between the plates, in response to fluctuations in fluid pressure acting on at least one of the plates, characterized by:

(a) a substrate, the substrate having electrically conductive strips thereon; and

(b) the pressure transducer device has conductive bumps on one of its surfaces, the conductive bumps being attached to the conductive strips on the substrate;

wherein the transducer assembly includes a cover surrounding the capacitive pressure transducer device, the conductive strips on the substrate extending outside of the cover, the substrate having thereon additional conductive paths connected with the conductive strips extending outside of the cover.

7. An improved transducer assembly according to claim 6 wherein the volume between the capacitor plates of the pressure transducer device is closed and at a predetermined pressure and wherein the cover includes conduit means extending therefrom for allowing fluid pressure to be measured to be applied to the pressure transducer device on an external area thereof, thereby, to permit the fluid pressure to be measured to produce deflection of the area of the pressure transducer device subjected to such fluid pressure.