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Semiconductor variable capacitance pressure transducer assembly

  • US 4,277,814 A
  • Filed: 09/04/1979
  • Issued: 07/07/1981
  • Est. Priority Date: 09/04/1979
  • Status: Expired due to Term
First Claim
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1. An improved variable capacitance pressure transducer assembly of the type which has a capacitive pressure transducer device comprising at least two spaced conductive plates subject to variation in the spacing between the plates, and resultant variation of the electrical capacitance between the plates, in response to fluctuations in fluid pressure acting on at least one of the plates, characterized by:

  • (a) a substrate, the substrate having electrically conductive strips thereon; and

    (b) the pressure transducer device has conductive bumps on one of its surfaces, the conductive pumps being attached to the conductive strips of the substrate;

    wherein the transducer assembly includes a cover surrounding the capacitive pressure transducer device, the cover being bonded to the substrate with a closed-path seal which crosses the conductive strips on the substrate without electrical contact to such conductive strips.

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