Cryopumping apparatus

• US 4,277,951 A
• Filed: 04/10/1980
• Issued: 07/14/1981
• Est. Priority Date: 04/10/1980
• Status: Expired due to Term

• Current Assignee: APD Cryogenics, Inc.
• Original Assignee: Air Products and Chemicals Incorporated (Linde Plc)
• Inventors: Longsworth, Ralph C.
• Primary Examiner(s): Capossela, Ronald C.
• Application Number:
  US06/139,032
• Time in Patent Office: 460 Days
• Field of Search: 62/55.5, 62/100, 62/268, 417/901, 55/269
• US Class Current: 62/55.5
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

A cryopump consisting of cryopanels attached to an elongated source of refrigeration in which heat is transferred from cryopumping surfaces to various stages of refrigeration by conduction including a chevron baffle or louver mounted parallel to the long axis of the refrigerator source and directly to the warmest stage of refrigeration.

Claims

1. In a cryopumping apparatus of the type including an elongated source of refrigeration adapted for mounting to a vacuum chamber and capable of producing a warm refrigeration stage of from 40 to 120K and a cold refrigeration stage of from 10 to 30K, the improvement comprising:

a generally open top pan-shaped housing adopted for mounting said refrigeration source to said vacuum chamber whereby said open top of said pan can mate to and close a complementing opening in said vacuum chamber;

a first or warm panel thermally connected to said warm refrigeration stage and adapted to shield said refrigeration source from ambient radiant heat;

a second or cold panel thermally connected to said cold stage of refrigeration; and

a chevron baffle or louver closing a substantial portion of the open top of said housing and in thermal contact with said warm refrigeration stage.

2. An apparatus according to claim 1 wherein said louver is disposed parallel to the long axis of said refrigerator.

3. An apparatus according to claim 1 wherein a substantial portion of said warm stage and all of said cold stage of said refrigeration source extends across the open top portion of said housing.

4. An apparatus according to claim 1 or 2 wherein said warm panel is in the shape of an open top pan complementary to but smaller than said housing.

5. An apparatus according to claim 1 or 2 wherein said cold panel is in the shape of an open top pan mounted with said open top facing the bottom of said pan shaped housing.

6. An apparatus according to claim 1 wherein said refrigerator source is mounted so that only said cold stage extends across the open top portion of said housing.

7. An apparatus according to claim 1 wherein said refrigeration source is a closed cycle two-stage cryogenic refrigerator.

8. An apparatus according to claim 1 wherein said first and second panels are mechanically connected to the warm and cold stages of the refrigeration source respectively by means of solid conductors capable of rapid thermal transfer of refrigeration or heat.

9. An apparatus according to claim 1 wherein said housing, said warm panel and said cold panel are circular in cross-section.

10. An apparatus according to claim 1 wherein a gas adsorbing material is disposed on the inner surface of said second or cold panel.