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Piezoelectric bi-morph mirror actuator

  • US 4,280,756 A
  • Filed: 01/02/1979
  • Issued: 07/28/1981
  • Est. Priority Date: 01/02/1979
  • Status: Expired due to Term
First Claim
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1. A piezoelectric wavefront modulator actuator comprising:

  • a. a first layer of a piezoelectric medium (1) internally polarized in a given direction and having a first and second surface;

    b. a second layer of a piezoelectric medium (2) mechanically coupled to said first layer and having a first and second surface, also internally polarized in said given direction;

    c. a plurality of electrodes (3, 7,

         9);

    d. a mirror (16);

    e. a driver (13) coupled between a centralized portion of said first layer and said mirror;

    f. a variable voltage control source (4);

    g. a support (18,

         19);

    h. means (21,

         22) for clamping opposite non-centralized portions of said first and second layers to said support; and

    i. means (6, 8,

         11) for electrically coupling said variable voltage control source to said a plurality of electodes for increasing the internal electric field in one layer while decreasing the internal electric field in the other layer for changing the degree of bending of said actuator, thereby to control the degree of displacement of said mirror.

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