Solid state ion responsive and reference electrodes
First Claim
1. A pH electrode comprisingan electrically insulating substrate,a metallic layer on said substrate,a solid electrolyte layer on said metallic layer, andan RF sputtered pH glass layer on said last-mentioned layer and having a thickness of 10 to 10,000 Angstroms.
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Abstract
A solid state ion concentration measuring electrode having the ion concentration measuring electrode structure formed by successive layers on an insulating substrate with an outer ion sensitive glass layer being deposited on a substantially thermally matched supporting solid electrolyte layer by RF sputtering. The reference electrode is similarly formed by depositing an outer layer of glass onto a supporting solid electrolyte layer by RF sputtering with the temperature expansion of the glass and supporting solid electrolyte structure being selected to produce a differential expansion causing random cracking of the glass layer during temperature cycling of the referenece electrode. A combination structure is provided wherein the ion concentration measuring electrode and the reference electrode are formed on opposite sides of the same electrically insulating substrate with a thermal compensating element being included in the integrated package.
33 Citations
41 Claims
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1. A pH electrode comprising
an electrically insulating substrate, a metallic layer on said substrate, a solid electrolyte layer on said metallic layer, and an RF sputtered pH glass layer on said last-mentioned layer and having a thickness of 10 to 10,000 Angstroms.
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5. A reference electrode comprising
an electrically insulating substrate, a metallic layer on said substrate, a solid electrolyte layer on said metallic layer and a cracked glass layer on said electrolyte layer and having a coefficient of thermal expansions substantially mismatched with respect to a coefficient of thermal expansion of said electrolyte layer to produce differential expansion therebetween.
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8. A combination electrode comprising
an electrically insulating substrate means, a first metallic layer on said substrate means, a first solid electrolyte layer on said metallic layer, a pH glass layer on said electrolyte layer, a second metallic layer on said substrate means and electrically insulated from said first metallic layer, said first electrolyte layer and said pH glass layer, a second solid electrolyte layer on said second metallic layer and electrically insulated from said first metallic layer, said first electrolyte layer and said pH glass layer, and a cracked glass layer on said second electrolyte layer and electrically insulated from said first metallic layer, said first electrolyte layer and said pH glass layer, said second glass layer having a coefficient of thermal expansion mismatched with respect to said second electrolyte layer to produce differential expansion therebetween.
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15. A combination electrode comprising
an electrically insulating substrate means, a first metallic layer on said substrate means, a first solid electrolyte layer on said metallic layer, a pH glass layer on said electrolyte layer, a second metallic layer on said substrate means and electrically insulated from said first metallic layer, said first electrolyte layer and said pH glass layer, a second solid electrolyte layer on said second metallic layer and electrically insulated from said first metallic layer, said first electrolyte layer and said pH glass layer, and an ion conducting path layer on said second electrolyte layer and electrically insulated from said first metallic layer, said first electrolyte layer and said pH glass layer.
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17. An ion concentration measuring electrode comprising
an electrically insulating substrate, a metallic layer on said substrate, a solid electrolyte layer on said metallic layer, and an RF sputtered ion selective layer on said last-mentioned layer.
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20. A combination electrode comprising
an electrically insulating substrate means, a first metallic layer on said substrate means, a first solid electrolyte layer on said metallic layer, an ion selective layer on said electrolyte layer, a second metallic layer on said substrate means and electrically insulated from said first metallic layer, and first electrolyte layer and said ion selective layer, a second solid electrolyte layer on said second metallic layer and electrically insulated from said first metallic layer, said first electrolyte layer and said ion selective layer, and a cracked glass layer on said second electrolyte layer and electrically insulated from said first metallic layer, and first electrolyte layer and said ion selective layer, said cracked glass layer having a coefficient of thermal expansion mismatched with respect to said second electrolyte layer to produce differential expansion therebetween.
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24. A combination electrode comprising
an electrically insulating substrate means, a first metallic layer on said substrate means, a first solid electrolyte layer on said metallic layer, an ion selective layer on said electrolyte layer, a second metallic layer on said substrate means and electrically insulated from said first metallic layer, said first electrolyte layer and said ion selective layer, a second solid electrolyte layer on said second metallic layer and electrically insulated from said first metallic layer, said first electrolyte layer and said ion selective layer, and an ion conducting path layer on said second electrolyte layer and electrically insulated from said first metallic layer, said first electrolyte layer and said ion selective layer.
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27. An ion concentration measuring electrode comprising
a metallic layer, an electrolyte layer on said metallic layer and an ion selective layer deposited by RF sputtering on said electrolyte layer and having a thickness of 10 to 10,000 Angstroms.
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30. An ion concentration measuring electrode comprising
an electrolyte layer, an electrical connection means for providing an electrical connection to said electrolyte layer and an ion selective layer deposited by RF sputtering on said electrolyte layer spaced from said electrical connection means and having a thickness of 10 to 10,000 A.
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32. An ion concentration measuring electrode comprising
an electrolyte means for supporting an ion selective layer thereon, electrical connection means for providing an electrical connection to said electrolyte means and ion selective layer means deposited by RF sputtering on said electrolyte means spaced from said electrical connection means.
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33. An ion concentration measuring electrode comprising
an electrolyte means for supporting an ion selective layer thereon, electrical connection means for providing an electrical connection to said electrolyte means and ion selective layer means deposited by RF sputtering on said electrolyte means spaced from said connection means and having a thickness of 10 to 10,000 A.
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35. A reference electrode comprising
a metallic layer, an electrolyte layer on said metallic layer and an ion conducting path layer on said electrolyte layer deposited by RF sputtering.
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38. A reference electrode comprising
an electrolyte layer, electrical connection means for providing an electrical connection to said electrolyte layer and an ion conducting path layer on said electrolyte layer deposited by RF sputtering spaced from said connection means.
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40. A reference electrode comprising
electrolyte means for supporting an ion conducting layer thereon, electrical connection means for providing an electrical connection to said electrolyte means and ion conducting path layer means on said electrolyte layer means spaced from said connection means, said ion conducting path layer means being a cracked glass layer having a coefficient of thermal expansion substantially mismatched with respect to a coefficient of thermal expansion of said electrolyte layer to produce differential expansion therebetween.
Specification