Methods and apparatus for generating plasmas
First Claim
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1. A method of separately activating at least two potentially reactive species to form a reactive plasma when combined, each of said potentially reactive species having a different activation level, said method comprising the steps of:
- (a) forming a non-reactive plasma so as to create therein an activated species of at least one of said potentially reactive species;
(b) separately activating the other of said potentially reactive species having the higher activation level; and
(c) flowing the activated species having the higher activation level into said non-reactive plasma to create a reactive plasma.
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Abstract
An RF-excited radial-flow, cylindrical plasma reactor (10) includes a toroidal waveguide (17) of rectangular cross-section connected to a microwave source (21). One of the reactive species (37) is flowed through the waveguide and pre-ionized, thus, permitting independent control over the activation of both reactive species.
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Citations
25 Claims
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1. A method of separately activating at least two potentially reactive species to form a reactive plasma when combined, each of said potentially reactive species having a different activation level, said method comprising the steps of:
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(a) forming a non-reactive plasma so as to create therein an activated species of at least one of said potentially reactive species; (b) separately activating the other of said potentially reactive species having the higher activation level; and (c) flowing the activated species having the higher activation level into said non-reactive plasma to create a reactive plasma. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. Apparatus for separately activating at least two potentially reactive species to form a reactive plasma when combined, each of said potentially reactive species having a different activation level, said apparatus comprising:
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means for forming a non-reactive plasma so as to create therein an activated species of at least one of said potentially reactive species; means for separately activating the other of said potentially reactive species having the higher activation level; and means for flowing the activated species having the higher activation level into said non-reactive plasma to create a reactive plasma. - View Dependent Claims (18)
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19. Apparatus for separately activating at least two potentially reactive species to form a reactive plasma when combined, each of said potentially reactive species having a different activation level, said apparatus comprising:
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means for forming a non-reactive plasma so as to create therein an activated species of at least one of said potentially reactive species; means for separately activating the other of said potentially reactive species having the higher activation level, said separately activating means further comprising; a waveguide positioned within said apparatus, said reactive species having the higher activation level flowing through said waveguide; and a source of a beam of microwave energy connected to said waveguide. - View Dependent Claims (20, 21, 22, 23, 24, 25)
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Specification