High selectivity thin film polarizer

• US 4,289,381 A
• Filed: 07/02/1979
• Issued: 09/15/1981
• Est. Priority Date: 07/02/1979
• Status: Expired due to Term

• Current Assignee: Hughes Electronics Corporation (Rtx Corporation)
• Original Assignee: Hughes Aircraft Company (Rtx Corporation)
• Inventors: Garvin, Hugh L., Pinnow, Douglas A.
• Primary Examiner(s): Punter, William H.
• Application Number:
  US06/054,361
• Time in Patent Office: 806 Days
• Field of Search: 350/147, 350/152, 350/395, 350/320, 343/909, 219/121LJ, 219/121 EK, 427/38, 427/43.1, 427/163, 156/643
• US Class Current: 427/163.1
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A thin film polarizer for dividing electromagnetic energy into two mutually orthogonal components with a high degree of selectivity. A plurality of wire grids having an interelement spacing of less than one wavelength is supported by a substrate of electrically insulative material. The substrate is invisible to the wavelength of the polarized electromagnetic energy. The planar wire grids are substantially parallel and spaced less than one wavelength therebetween to achieve an efficient and compact thin film polarizer. The process of this invention for forming the plurality of wire grids comprises photolithographically defining each grid layer by the interference pattern of at least two coherent beams such as laser beams, one forming step being required for each grid, an anti-reflective layer being inserted between adjacent grid layers.

Claims

1. A method for making a thin film polarizer on a substrate surface comprising:

placing a first metal layer on said surface;

first photolithographically forming a grid in said first metal layer defined by the interference pattern of at least two coherent beams;

placing an insulating layer over said first metal layer;

placing a second metal layer over said insulating layer;

placing an anti-reflective coating over said second layer;

placing a photoresistive layer over said anti-reflective coating; and

second photolithographically forming a grid in said second metal layer defined by the interference pattern of at least two coherent beams, wherein said anti-reflective coating substantially prevents formation of standing waves within said photoresistive layer during said second photolithographic forming step.

2. The method of claim 1 wherein said antireflective layer is removed after said second photolithographically forming step.

3. The method of claim 1 wherein said second forming step comprises forming a grid in said second metal layer which is sufficiently nearly parallel to said grid in said first metal layer formed during said first forming step so that the extinction ratio across the two grids is proportional to the product of their individual extinction ratios.

4. The method of claim 1 wherein said first and second photolithographic forming steps comprise forming said grids so as to have a grid spacing less the the wave length λ

of incident radiation to be polarized, said forming steps further comprising forming said grids so that they are sufficiently nearly parallel to one another so that the extinction ratio across the two grids is proportional to the product of their individual extinction ratios.