Apparatus for measuring a gradient of a surface

• US 4,289,400 A
• Filed: 02/07/1980
• Issued: 09/15/1981
• Est. Priority Date: 03/08/1977
• Status: Expired due to Term

• Current Assignee: Sony Corporation (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Kubota, Shigeo, Kikuchi, Masahiro, Ishihara, Tadao
• Primary Examiner(s): Punter, William H.
• Application Number:
  US06/119,354
• Time in Patent Office: 586 Days
• Field of Search: 356/124, 356/138, 356/152-153, 356/237, 356/371, 356/375-376, 356/400, 356/445, 356/448
• US Class Current: 356/613
• CPC Class Codes: G01B 11/255 for measuring radius of curvature measuring diameter G01B11/08

Abstract

An apparatus for continuously measuring a gradient of a curved surface at a number of different points thereon is disclosed in which a laser beam reflected at the point to be measured on the surface makes a beam spot on a photo sensor. The photo sensor follows the beam spot while the center of the beam spot and the center of the photo sensor coincide. The displacement between the beam spot from the point subjected to measurement and the beam spot from a reference point on the surface of the photo sensor is proportional to the gradient at the point subjected to measurement. The photo sensor is, for example, a differential type which comprises four photo diodes. The numerical control table is used to determine the positional relationship of the point to be measured with respect to the laser beam and an X-Y recorder is used to follow the beam spot.

Claims

1. Apparatus for determining the gradient at different points on the surface of an optical lens comprising, an NC table having a deck for supporting said lens, said deck being mounted for movement in one plane, a drive and controller therefor for moving said deck of said table in said plane, a light detector, a recorder having a deck upon which said light detector is mounted, said recorder having means to record the position of said recorder deck in X and Y coordinates, means for producing a beam of light and directing it normal to said deck toward a point on a surface of said corrective lens whose gradient is to be measured, a half mirror mounted at 45 degrees to the path of said light beam and said beam passing therethrough, a second mirror mounted at 90 degrees to said half mirror and laterally offset therefrom, said beam being reflected from said surface of said lens back to said half mirror where it is deflected to said second mirror and then again deflected to form a spot on said light detector, said recorder including means for moving said light detector until the center of said light detector coincides with the center of the deflected beam, said recorder including means to record the X and Y distances which said recorder deck was required to move from reference X and Y positions to bring the center of said light detector into coincidence with the center of said light spot falling on said light detector and including means for generating Δ

X and Δ

Y signals, a value Δ

l obtained from which signals according to the equation;

Δ

l² =X² +Y² is proportional to the slopes of the surface of said corrective lens at said selected point in the X and Y directions and a drive controller for causing movement of said deck of said NC table to cause said light beam to strike said lens at a different point on the surface thereof, so that the slope at said different point can be obtained upon movement of said recorder deck to a position where the center of said light spot coincides with said center of said light detector to obtain Δ

X and Δ

Y signals for said different point from which the gradient θ

can be determined from the equation Δ

l =L tan 2θ

, where L is the distance which said light beam travels from said lens to said light detector.

2. Apparatus as set forth in claim 1, wherein the plane of movement of said NC table deck is parallel to the plane of movement of the deck carrying said light detector.

3. Apparatus as set forth in claim 1, in which said beam of light is a laser beam.

4. Apparatus as set forth in claim 1, in which said photo detector comprises two pairs of diodes differentially connected.

5. Apparatus as set forth in claim 1, in which said beam of light which passes through said half mirror to said optical lens is perpendicular to the deck of said NC table.

6. Apparatus as set forth in claim 1, which includes a monitor connected between said controller of said X-Y recorder and said drive controller of said NC table, whereby said optical lens may be examined for gradients at successively different points on the surface of said lens.

7. A method of measuring a gradient of a surface comprising the steps of:

(a) providing an object movable in a horizontal plane which is subjected to measurement of a gradient of the surface thereof;

(b) illuminating a selected point on said surface by a vertical light beam, said light beam being reflected vertically at said selected point, then reflected horizontally and then reflected vertically to a photo detector;

(c) a photo detector on a horizontal plane remote from said surface for detecting Δ

X and Δ

Y displacements on said horizontal plane between a spot of said reflected light beam from a reference position;

(d) converting said Δ

X and Δ

Y displacements into gradients (θ

) at said selected point by using the equation Δ

l=L tan 2θ

where L is the distance the light beam travels between the object and the photo detector and where Δ

l² =Δ

X² +Δ

Y².