Dark field surface inspection illumination technique

• US 4,297,032 A
• Filed: 02/14/1980
• Issued: 10/27/1981
• Est. Priority Date: 02/14/1980
• Status: Expired due to Term

• Current Assignee: the united states of america as represented by the secretary of the navy
• Original Assignee: the united states of america as represented by the secretary of the navy
• Inventors: Temple, Paul A.
• Primary Examiner(s): Punter, William H.
• Application Number:
  US06/121,625
• Time in Patent Office: 621 Days
• Field of Search: 356/364-370, 356/337, 356/239-240, 356/237, 250/225, 250/572
• US Class Current: 356/366
• CPC Class Codes: G01N 21/552 Attenuated total reflection
• CPC Class Codes: G01N 21/88 Investigating the presence of flaws or contamination

Abstract

A method and apparatus for observing imperfections on the surface of and imbedded in an optical sample using a dark field technique. Linearally polarized laser light is entered by a prism-fluid index matching method which causes internal reflection at the critical angle. The internally reflected beam then coherently combines with the incident beam in the vicinity of the sample surface. This results in a standing wave pattern which can be adjusted by changing the laser wavelength, the angle of incidence or polarization to selectively illuminate variously regions at and below the surface. One polarization will have maximum intensity at the surface level while the alternate polarization will have a null at the surface level. Defects within the optical sample scatter light such that it does not reach the surface at an angle equal to or greater than the critical angle. This light is emitted from the sample surface and appears as a pattern of bright spots on a dark background. A viewing piece is used to systematically scan the surface of the sample. Using the above standing wave pattern, it is possible to illuminate the surface with a maximum intensity, to learn the position of optical sample imperfections and to determine the sizes of those imperfections. Placing a drop of oil on the surface of the sample removes surface irregularities as a source of scattered light. The oil drop also permits greater control of standing wave patterns within the sample.

Claims

1. A surface inspection method for finding defects contained in or on an optical sample comprising the steps of:

coating one side of a prism whose index of refraction is similar to said optical sample with an index matching fluid;

placing said optical sample on said fluid coated side;

establishing an observation point above said optical sample to view the surface at a normal angle;

directing a beam of monochromatic polarized light into said prism such that said beam reflects off of the upper surface of said optical sample at the critical angle beneath said observation point so as to create a standing wave pattern which scatters light off of imperfections smaller than the wavelength of said standing waves except when said imperfections are located at null points of said standing waves;

varying the standing wave pattern so that the null points of said standing waves occur at different depths within the optical sample, the imperfections appear and disappear as null points pass through it;

comparing the possible depths at which the imperfections appear for a plurality of different standing wave patterns to uniquely identify the depth in the sample of each imperfection; and

moving said optical sample so that all areas of said optical sample are viewed from said observation point to observe said scattered light which has been scattered toward said upper surface at less than the critical angle.

2. A surface inspection method for finding defects contained in or on an optical sample as described in claim 1 where the standing wave pattern is varied by:

changing the polarization of said polarized light such that the standing wave patterns within said optical sample vary the locations of peaks and nulls to locate the position of imperfections with said optical sample.

3. A surface inspection method for finding defects contained in or on an optical sample as described in either of claims 1 or 2 further comprising the step of:

altering the incident angle of said beam of polarized light to one greater than the critical angle such that the standing wave pattern expands to show imbedded imperfections at different depths in said optical sample.

4. An apparatus for locating defects in or on an optical sample comprising:

a source of monochromatic light for emitting a beam of polarized light, said polarization capable of being changed, along an optical path;

a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample;

a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern which scatters light off of imperfections smaller than the wavelength of said standing waves except when said imperfections are located at null points of said standing waves; and

means for observing the surface of said optical sample above the area where total internal reflection occurs to observe said scattered light which has been scattered toward said upper surface at less than the critical angle said observation means observing light emitted normal to said optical sample.

5. An apparatus for locating defects in or on an optical sample as described in claim 4 wherein said source of polarized light is comprised of a tunable laser.

6. An apparatus for locating defects in or on an optical sample as described in claim 4 wherein said observing means is a microscope.

7. An apparatus for locating defects in or on an optical sample as described in any of claims 4, 5, or 6 further comprising means for altering the path of said beam in said optical sample such that it is reflected at angles greater than the critical angle.

8. An apparatus for locating defects in or on an optical sample comprising:

a tunable laser for emitting a beam of polarized light along a predetermined path;

a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample;

a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern;

a microscope for observing the surface of said optical sample above the area where total internal reflection occurs;

a coating on the surface of said optical sample to remove surface irregularities so that only imbedded imperfections are observed; and

means for altering the path of said beam in said optical sample such that it is reflected at angles greater than the critical angle.

9. An apparatus for locating microbes in a coating on an optical sample where the coating and optical sample have matching indexes of refraction comprising:

a tunable laser for emitting a beam of polarized monochromatic light along a predetermined path, said polarization capable of being changed;

a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample;

a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfaces with itself after reflection so as to create a standing wave pattern which scatters light off of imperfections smaller than the wavelength of said standing waves except when said imperfections are located at null points of said standing waves;

a microscope for observing the coating on said optical sample where total internal reflection occurs said microscope placed to observe light emitted normal to said optical sample; and

means for altering the path of said beam in said optical sample such that it is reflected at angles greater than the critical angle except for scattered light which has been scattered off of imperfections toward said upper surface at less than the critical angle.

10. A surface inspection method for finding defects contained in or on an optical sample comprising the steps of:

coating one side of a prism whose index of refraction is similar to said optical sample with an index matching fluid;

placing said optical sample on said fluid coated side;

covering said optical sample with a coating to remove all surface irregularities such that the only imperfections viewed at said observation point are those imbedded within said optical sample;

establishing an observation point above said optical sample;

directing a beam of polarized light into said prism such that said beam reflects off of the upper surface of said optical sample at the critical angle beneath said observation point so as to create a standing wave pattern; and

moving said optical sample so that all areas of said optical sample are viewed from said observation point.

11. A surface inspection method for finding defects contained in or on an optical sample as described in claim 10 further comprising the step of:

varying the characteristic wavelength of said polarized light such that the standing wave patterns within said optical sample vary the locations of peaks and nulls to locate the position of imperfections within said optical sample.

12. A surface inspection method for finding defects contained in or on an optical sample as described in claim 10 further comprising the step of:

changing the polarization of said polarized light such that the standing wave patterns within said optical sample vary the locations of peaks and nulls to locate the position of imperfections within said optical sample.

13. A surface inspection method for finding defects contained in or on an optical sample as described in claim 11 further comprising the step of:

changing the polarization of said polarized light such that the standing wave patterns within said optical sample vary the locations of peaks and nulls to locate the position of imperfections within said optical sample.

14. A surface inspection method for finding defects contained in or on an optical sample as described in either of claims 10, 11, 12, or 13 further comprising the step of:

altering the incident angle of said beam of polarized light to one greater than the critical angle such that the standing wave pattern expands to show imbedded imperfections at different depths in said optical sample.

15. An apparatus for locating defects in or on an optical sample comprising:

a source of polarized light for emitting a beam of light along an optical path;

a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample;

a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern;

a coating on the surface of said optical sample to remove surface irregularities so that only imbedded imperfections are observed; and

means for observing the surface of said optical sample above the area where total internal reflection occurs.

16. An apparatus for locating defects in or on an optical sample as described in claim 15 wherein said source of polarized light is comprised of a tunable laser.

17. An apparatus for locating defects in or on an optical sample as described in either claim 15 or 16 wherein said observing means is a microscope.