Defect inspection system

• US 4,302,773 A
• Filed: 02/14/1980
• Issued: 11/24/1981
• Est. Priority Date: 02/20/1979
• Status: Expired due to Term

• Current Assignee: Hajime Industries Limited
• Original Assignee: Hajime Industries Limited
• Inventors: Yoshida, Hajime
• Primary Examiner(s): Bookbinder, Marc E.
• Assistant Examiner(s): Coles, Edward L.
• Application Number:
  US06/121,516
• Time in Patent Office: 649 Days
• Field of Search: 358/106, 358/107, 250/562, 250/872, 356/237
• US Class Current: 348/125
• CPC Class Codes: G01N 21/88 Investigating the presence of flaws or contamination

Abstract

A defect inspection system which inspects the defects on an object to be inspected by photosensing the inspected object with a monochrome television camera. A pair of detection circuits are provided which receive such image signal corresponding to the inspected object from the television camera and have different sensitivities so that both or only one of the pair outputs a signal in accordance with the rate of change of the image signal level with respect to time. Both of the outputs from the pair of detection circuits are supplied to a mixer circuit. In this case, the mixer circuit is so formed that it will only output a defect detection signal when only one of the above mentioned pair of detection circuits shall output a signal.

Claims

1. A defect inspection system comprising:

(a) pick-up means for sensing an object to be inspected and to produce a video signal thereof;

(b) a plurality of detecting means each having respective predetermined detecting sensitivities connected in parallel to said pick-up means to simultaneously receive the video signals therefrom said, detecting sensitivities of said plurality of detecting means being so selected that all or some of said plurality of detecting means produce signals in response to a the rate of level change of said video signal with respect to time; and

(c) means connected simultaneously to outputs of each of said plurality of detecting means for producing a defect detection signal when at least some of said plurality of detecting means produce a signal.

2. A defect inspection system according to claim 1 further including means between said pick up means and said plurality of detecting means for amplifying said video signal and removing unnecessary components thereof.

3. A defect inspection system according to claim 1 further including means connected to said last-mentioned means for indicating an alarm when said last-mentioned means produces the defect detection signal.

4. A defect inspection system according to claim 1 further including means connected to said last-mentioned means to segregate an object when said last-mentioned means delivers the defect detection signal.

5. A defect inspection system as claimed in claim 1, in which said pick up means is a monochrome television camera.

6. A defect inspection system according to claim 5 further including a monitor television receiver connected to said television camera to reproduce an image of said object to be observed by a human eye.