Mechanical resonator arrangements

• US 4,305,298 A
• Filed: 06/08/1979
• Issued: 12/15/1981
• Est. Priority Date: 08/28/1978
• Status: Expired due to Term

• Current Assignee: ITT Industries (ITT, Inc.)
• Original Assignee: ITT Industries (ITT, Inc.)
• Inventors: Greenwood, John C.
• Primary Examiner(s): MYRACLE, JERRY
• Application Number:
  US06/046,867
• Time in Patent Office: 921 Days
• Field of Search: 29/569, 73/652, 73/653, 73/651, 73/777, 73/778, 73/649, 73/655, 356/26, 356/256, 428/547
• US Class Current: 73/651
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G10K 11/04 Acoustic filters ; Acoustic resonators
• CPC Class Codes: H03H 9/0519 for cantilever H03H9/1021 takes precedence
• CPC Class Codes: H03H 9/0595 the holder support and resonator being formed in one body

Abstract

Semiconductor transducer devices are provided, some being formed from a single crystal and having a flexible portion which is vibratable. Also a multi-element is disclosed which is a body including mechanical semiconductor resonator. The body has a transverse valley across its width. A comb-like array of flexible silicon cantilevers extend from one end of the body. Each cantilever is adapted to respond to a periodic force such that each has a different vibrational frequency. An alternative embodiment includes an accelerometer having a block with a three cantilever array with a semiconductor filament fixed in tension between each adjacent pair. The middle cantilever is longer than the other two. A further alternative employs elements to support a crystal at two nodal points of vibration.

Claims

1. A multi-element semiconductor mechanical resonator comprising:

a substantially rectangular silicon body formed from a single crystal and having a transverse valley across its width; and

a comb-like array of flexible silicon cantilevers extending from one end of said body, each said cantilever being adapted to respond to a periodic force such that each has a different vibrational frequency.