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Induction plasma system

  • US 4,306,175 A
  • Filed: 02/29/1980
  • Issued: 12/15/1981
  • Est. Priority Date: 02/29/1980
  • Status: Expired due to Term
First Claim
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1. An induction plasma system comprisingmeans defining a plasma chamber,a high frequency electrical coil surrounding said chamber,an oscillator for energizing said coil to establish a plasma maintaining condition in said chamber,said oscillator including a tank circuit tuned essentially to resonance with a plasma condition in said chamber,means for flowing gas through said chamber, andignition means for disposition in said chamber to initiate a plasma condition,said ignition means being constructed such that insertion of said ignition means into said chamber in the absence of a plasma condition shifts the impedance condition in said chamber to essentially the resonance condition that is established with said plasma condition without retuning said tank circuit.

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