Elastic wave accelerometer

• US 4,306,456 A
• Filed: 03/25/1980
• Issued: 12/22/1981
• Est. Priority Date: 03/30/1979
• Status: Expired due to Term

• Current Assignee: Thomson-CSF (Thales SA)
• Original Assignee: Thomson-CSF (Thales SA)
• Inventors: Maerfeld, Charles
• Primary Examiner(s): Gill, James J.
• Application Number:
  US06/133,958
• Time in Patent Office: 637 Days
• Field of Search: 73/517 R, 73/517 AV, 73/DIG. 4, 73/516 R, 310/313 R, 310/313 B, 310/313 D, 310/329, 310/328, 310/338
• US Class Current: 73/514.28
• CPC Class Codes: G01P 15/0975 by acoustic surface wave resonators or delay lines
• CPC Class Codes: Y10S 73/04 Piezoelectric

Abstract

The invention discloses an elastic wave accelerometer for measuring acceleration at least in one direction.

The device comprises a solid support, a seismic mass and a piezoelectric wafer embedded in the seismic mass and in the solid support. An acceleration in one direction in the plane of the wafer produces an extension in one portion of the wafer and a compression in the other. Elastic waves are excited in the two portions of the wafer. Two oscillators are obtained by means of amplifiers and the frequency difference between the two oscillators is proportional to the acceleration.

The invention applies to accelerometers for inertial navigation.

Claims

1. An elastic wave accelerometer comprising:

(a) a piezoelectric substrate thin wafer;

(b) support means for mounting said wafer and including at least one seismic mass, said support means delimiting two portions on the surface of said wafer;

(c) surface acoustic wave transducer means disposed on at least one face of said wafer, for forming an acoustic delay line or filter on each portion of said two portions, with the waves on said portions propagating in opposite directions, said waves being effected by the component of an acceleration applied to the accelerometer in the direction of propagation of the elastic waves, said two portions being deformed in said direction one by extension and the other by compression;

(d) means for measuring said extension and compression in each portion of said delay line or filter, including oscillators having amplifier means connected to said delay lines or filters for forming oscillations in each portion in accordance with said extension and compression;

(e) frequency subtraction means for giving the difference of frequency of the two oscillators corresponding to said two delay lines or filters, said frequency difference being proportional to the acceleration parallel to said propagation direction of said two waves.

2. The accelerometer as claimed in claim 1, wherein said support means includes a support, and said wafer has two ends which are rigidly embedded in edges of said support;

said one seismic mass being placed at an equal distance from the embedded ends and rigidly connected to said wafer.

3. The accelerometer as claimed in claim 1 wherein said support means comprise a pillar, said wafer being embedded rigidly in said pillar, and two seismic masses being connected rigidly on two ends of said wafer.

4. The accelerometer as claimed in claim 1, wherein said acoustic filters comprise resonators, with each of the portions of said wafer comprising at each end two engraved reflecting gratings.

5. The accelerometer as claimed in claim 4 wherein, at the end opposite the grating of each wafer portion, electro-acoustic transducers are disposed, one serving as input, the other as output for the electric signals.

6. The accelerometer as claimed in claim 4, wherein a single transducer is disposed between said two gratings and serves as input and output for the electric signals.

7. The accelerometer as claimed in claim 1, wherein each filter comprises an input transducer and an output transducer and wherein said amplifier means has an output signal connected to the output transducer thus forming said oscillator.

8. The accelerometer as claimed in claim 7, wherein the two oscillators corresponding to each portion of said wafer are connected to said subtraction means supplying the frequency difference of the two oscillators.

9. The accelerometer as claimed in claim 1, wherein each acoustic filter comprises an input transducer and an output transducer, wherein the input transducer is connected to an electric signal sinusoidal oscillator and wherein the electric signal collected at the output transducer is applied to said subtraction means.

10. The accelerometer as claimed in claim 9, wherein the phase shift values corresponding to each said wafer portion are applied to circuits supplying the phase shift difference of these portions.

11. The accelerometer as claimed in claim 1, wherein said filters are connected to circuits for measuring their delay time as well as to circuits supplying the difference of the delay time of the filters of the two portions.

12. The accelerometer as claimed in claim 1, wherein the said waves are excited elastic waves which are surface waves of the Rayleigh type.

13. The accelerometer as claimed in claim 1, wherein said waves are excited elastic waves which are volume waves of the Bleustein-Gylyaev type or S.B.W. (Skimming Bulk Waves).

14. The accelerometer as claimed in claim 1, wherein the waves are excited waves which are volume waves of the Anld type.

15. The accelerometer as claimed in claim 1, wherein said support means comprise a blade or ball or needle bearing suspension allowing said seismic mass to move along an axis parallel to the direction of propagation of the acoustic waves of the wafer.

16. The accelerometer as claimed in claim 1, wherein, on each of said wafer portion, there are disposed on the two faces acoustic lines formed by input and output transducers.

17. The accelerometer as claimed in claim 6, wherein the output transducer of one face of a wafer portion is connected to the input transducer of the opposite face of the same portion and wherein the two lines form a single filter.

18. The accelerometer as claimed in claim 16, wherein the acoustic lines disposed on said two wafer portions and on the two faces form four filters and wherein said wafer is embedded in a seismic mass able to have movements parallel to the wafer and perpendicular to this wafer.

19. The accelerometer as claimed in claim 18, wherein, to each of the four filters, there corresponds an oscillator, wherein these oscillators are connected to frequency addition and subtraction means and supply proportional frequencies, one to the acceleration along an axis xx'"'"' parallel to the wafer, the other to the acceleration along an axis zz'"'"' perpendicular to the wafer.

20. The accelerometer as claimed in claim 18, wherein two blades placed along the direction xx'"'"' and the other along a perpendicular yy'"'"' are embedded in said seismic mass and each having four filters associated with oscillators and wherein these eight oscillators are connected to circuits supplying the frequency sums connected to circuits supplying frequency differences for determining the accelerations along directions xx'"'"', yy'"'"' and zz'"'"'.

21. The accelerometer as claimed in claim 1, wherein said wafer and the seismic mass are obtained by ionic or chemical machining from a monolithic block.

22. The accelerometer as claimed in claim 1, wherein two seismic masses are provided, the first being welded below said wafer, the second being welded above the wafer on the same vertical axis of symmetry, an axis of rotation at the base of the first mass being orthogonal to the axis of symmetry and supported by the solid support, the value of the first mass being less than the value of the second mass.