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Elastic wave accelerometer

  • US 4,306,456 A
  • Filed: 03/25/1980
  • Issued: 12/22/1981
  • Est. Priority Date: 03/30/1979
  • Status: Expired due to Term
First Claim
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1. An elastic wave accelerometer comprising:

  • (a) a piezoelectric substrate thin wafer;

    (b) support means for mounting said wafer and including at least one seismic mass, said support means delimiting two portions on the surface of said wafer;

    (c) surface acoustic wave transducer means disposed on at least one face of said wafer, for forming an acoustic delay line or filter on each portion of said two portions, with the waves on said portions propagating in opposite directions, said waves being effected by the component of an acceleration applied to the accelerometer in the direction of propagation of the elastic waves, said two portions being deformed in said direction one by extension and the other by compression;

    (d) means for measuring said extension and compression in each portion of said delay line or filter, including oscillators having amplifier means connected to said delay lines or filters for forming oscillations in each portion in accordance with said extension and compression;

    (e) frequency subtraction means for giving the difference of frequency of the two oscillators corresponding to said two delay lines or filters, said frequency difference being proportional to the acceleration parallel to said propagation direction of said two waves.

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