Method of manufacturing an electrostatically controlled picture display device
First Claim
1. A method of manufacturing an electrode which is secured to a supporting plate by means of flexible stripshaped parts so as to be movable, characterized by(a) providing a first layer of a material which can be etched by means of a first etchant,(b) providing a second layer of an electrode material which can be etched by means of a second etchant,(c) providing by means of a photoetching method and the second etchant a plurality of apertures in the parts of the second layer which should not remain secured to the supporting plate,(d) removing parts of the first layer by underetching, via the apertures in the second layer, by means of the first etchant.
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Abstract
A method for manufacturing an electrode which is secured to a supporting plate by means of flexible strip-shaped parts so as to be movable. The method includes the steps of providing a first layer of material which can be etched by means of a first etchant and a second layer which can be etched by means of a second etchant. The method also includes the step of providing by means of a photoetching method and a second etchant a plurality of apertures in the parts of the second layer which should not remain secured to the supporting plate. Parts of the first layer are removed by underetching by the apertures in the second layer with the first etchant.
51 Citations
1 Claim
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1. A method of manufacturing an electrode which is secured to a supporting plate by means of flexible stripshaped parts so as to be movable, characterized by
(a) providing a first layer of a material which can be etched by means of a first etchant, (b) providing a second layer of an electrode material which can be etched by means of a second etchant, (c) providing by means of a photoetching method and the second etchant a plurality of apertures in the parts of the second layer which should not remain secured to the supporting plate, (d) removing parts of the first layer by underetching, via the apertures in the second layer, by means of the first etchant.
Specification
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- Resources
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Current AssigneeUS Philips Corporation (Koninklijke Philips N.V.)
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Original AssigneeUS Philips Corporation (Koninklijke Philips N.V.)
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InventorsTe Velde, Ties S.
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Primary Examiner(s)Powell, William A.
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Application NumberUS06/037,268Time in Patent Office972 DaysField of Search430/316, 29/25.13-25.18, 357/67, 357/68, 357/69, 357/71, 313/348, 313/350, 313/255, 313/257, 313/265, 427/90, 156/629, 156/630, 156/632, 156/633, 156/634, 156/644, 156/650-652, 156/654-656, 156/659.1, 156/661.1US Class Current216/13CPC Class CodesG09F 9/372 the positions of the elemen...
