Method and apparatus for pretreating and depositing thin films on substrates

• US 4,310,614 A
• Filed: 03/19/1979
• Issued: 01/12/1982
• Est. Priority Date: 03/19/1979
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Connell, G. A. Neville, Johnson, Richard I.
• Primary Examiner(s): Newsome, John H.
• Application Number:
  US06/021,731
• Time in Patent Office: 1,030 Days
• Field of Search: 427/38, 427/39, 427/40, 427/76, 427/109, 427/124, 427/53, 427/251, 346/76 L, 346/135.1, 346/137, 118/719, 118/720, 118/723, 118/730, 118/50, 118/50.1, 430/271
• US Class Current: 430/270.12
• CPC Class Codes: B41M 5/24 Ablative recording, e.g. by burning marks; Spark recording marking by high energetic means, e.g. by laser otherwise than burning or ablative removal B41M5/26; materials or methods for recording or reproduction by optical means G11B7/00
• CPC Class Codes: C23C 14/022 by means of bombardment with energetic particles or radiation

Abstract

Deposition of continuous pin-hole free tellurium films with thicknesses to less than 150A on a suitable substrate is achieved by first pretreating the substrate prior to film deposition. Ion sputtering or bombardment of the substrate surface with an inert gas prior to tellurium evaporation creates a dense coverage of nucleation sites on the substrate which improves the adhesiveness and resistance to abrasion and oxidation of the deposited film while providing very thin pinhole free films of uniform thickness and desired crystallite orientation.

Claims

1. A method for pretreating a glass or plastic surfaced article prior to the deposition of a thin film comprising a coating capable of being ablated upon intense radiation and wherein the molecular characteristic of the thin film to be deposited does not possess good reactive properties with the material of the article to insure an acceptable level of adhesion of the deposited film to the article comprising:

providing a chamber,

rotatably mounting the article in the chamber,

evacuating the chamber,

generating a source of high energy ions in the chamber, the energy distribution of the ions being greater than the energy threshold level necessary to induce sputtering of the article, said energy threshold level characteristic of the material comprising the article and

focusing the generated ions into at least one ion beam for bombardment of the article surface and directing the generated ion beam to a sector of the article surface while rotating the article in the chamber, the bombardment of the ions being maintained for a period of time sufficient to create a plurality of nucleation sites uniformly over a majority of the bombarded article surface.

2. The method of claim 1 which includes the step of

providing a source of electrons in proximity to said article surface outside of the article pretreatment section to aid in neutralizing the surface charge deposited on the article surface during the step of bombardment.

3. The method of claim 1 wherein the source of generated ions is produced from a plasma generated between a pair of planar cathode and anode electrodes, with a potential applied therebetween, the cathode electrode being positioned in close proximity to the article surface.

4. The method of claim 1 wherein the source of generated ions is generated from an rf sputtering system.

5. The method of claim 1 wherein the source of generated ions is generated from either an ion sputtering gun or a saddle field ion source.

6. In the manufacture of optically sensitive mediums for optical recording and playback, a method of pretreating and forming a thin film comprising a coating capable of being ablated upon intense radiation, said film of less than 300 A in thickness on the surface of a glass or plastic surfaced article, said film being of uniform thickness, pin-hole free with improved film adhesion and resistance to abrasion comprising the steps of

providing a chamber having an article pretreatment section and an article vapor deposition section,

rotatably mounting the article in the chamber,

evacuating the chamber,

generating a source of high energy ions in the chamber, the energy distribution of the ions being greater than the energy threshold level necessary to induce sputtering of the article, said energy threshold level characteristic of the material comprising the article,

focusing the generated ions into at least one ion beam for bombardment of the article surface and directing the ion beam to a sector of the article surface while rotating the article in the chamber, the bombardment of the ions being maintained for a period of time sufficient to create a plurality of nucleation sites uniformly over a majority of the article surface,

extinguishing the ion bombardment and evacuating the chamber, and

vapor depositing said coating on a sector of the nucleated article surface while rotating the article in the chamber whereby a thin film is uniformly deposited on the nucleated article surface.

7. The method of claim 6 wherein the source of generated ions is produced from a plasma generated between a pair of planar cathode and anode electrodes, with a potential applied therebetween, the cathode electrode being positioned in close proximity to the article surface.

8. The method of claim 6 wherein the source of generated ions is generated from an rf sputtering system.

9. The method of claim 6 wherein the source of generated ions is generated from either an ion sputtering gun or a saddle field ion source.

10. The method of claim 6 which includes the step of

providing a source of electrons in proximity to said article surface outside of the article pretreatment section to aid in neutralizing the surface charge deposited on the article surface during the step of bombardment.

13. An optical recording medium comprising a thin film comprising a coating capable of being ablated upon intense radiation having a thickness in the range of 25 A to 300 A deposited on a surface of said article in accordance with the method of any one of the method claims 6, 7 and 10.

11. In the manufacture of optically sensitive mediums for optical recording and playback, a method of pretreating and forming a thin film of tellurium or its alloys of less than 300 A in thickness on the surface of a glass or plastic surfaced article, said film being of uniform thickness, pin-hole free with improved film adhesion and resistance to abrasion and oxidation to minimal film thicknesses of about 25 A and comprising the steps of

providing a chamber having an article pretreatment section and an article vapor deposition section,

rotatably mounting the article in the chamber,

evacuating the chamber and introducing a working gas into the chamber,

establishing a plasma in the chamber,

maintaining a working gas flow through the chamber while lowering the chamber pressure by continuous chamber evacuation while increasing the voltage supplied to the plasma whereby the energy distribution in the gas ions established in said plasma is greater than the energy threshold level necessary to induce sputtering of the article, said energy threshold level characteristic of the material comprising the article,

focusing the generated ions into a plurality of ion beams for bombardment of the article surface and directing the ion beams to a sector of the article surface while rotating the article in the chamber, the bombardment of the ions being maintained for a period of time sufficient to create a plurality of nucleation sites uniformly over a majority of the article surface,

extinguishing said plasma and evacuating the chamber of the working gas, and

vapor depositing said thin film on a sector of the nucleated article surface while rotating the article in the chamber whereby said thin film is uniformly deposited on the nucleated article surface with the tellurium or the tellurium alloy polycrystallites having their C-axis orientation in the plane of the article.

12. The method of claim 11 which includes the step of

providing a source of electrons in proximity to said article surface outside of the article pretreatment section to aid in neutralizing the surface charge deposited on the article surface during the step of bombardment.

14. An optical recording medium comprising a thin film of tellurium or alloy thereof within the range of 25 A to 300 A deposited on a surface of said article in accordance with the method of claim 11.

15. Apparatus for the pretreatment of a surface of a support medium prior to deposition of a thin film on said surface comprising

a chamber,

means in said chamber to rotatably support said medium including drive means to rotate said medium at a desired rotational speed,

a first electrode supported in said chamber adjacent to said medium surface, said first electrode having a planar extent that is in a plane substantially parallel to the plane of said medium and adapted to cover only a sector of said medium surface, said first electrode being a cathode,

a second electrode supported in said chamber in spaced relation from said first electrode, said second electrode having a planar extent substantially parallel to said first electrode, said second electrode being an anode,

means to evacuate said chamber and introduce and maintain a working gas flow through said chamber as said chamber is continuously evacuated,

means to apply a potential between said electrodes to generate a plasma therebetween,

means to control the pressure in said chamber and the amount of said potential whereby the energy distribution in the gas ions established in said plasma is greater than the energy threshold level necessary to induce sputtering of the medium surface, said energy level characteristic of the material comprising said medium, whereby ions from said plasma bombard and sputter said medium sector surface through said first electrode as said medium is rotated in said chamber to create a plurality of nucleation sites uniformly over a majority of said medium surface.

16. The apparatus of claim 15 which includes means at said electrodes to produce a plurality of ion beams for bombardment of said medium surface sector.

17. The apparatus of claim 15 wherein each of said electrodes includes a plurality of parallel grids in the planar extent thereof, the grids of said first electrodes being disposed at an angle transverse to the grids of said second electrode to cause focusing of said ions into a plurality of beams for bombardment of said medium surface sector.

18. The apparatus of claim 17 wherein said electrodes are of annular shape.

19. The apparatus of claim 15 wherein said chamber is divided into two sections, said electrodes supported in one section, vapor deposition means in the other section and including an evaporation source and means between said evaporation source and said medium to confine vapor issuing from said evaporation source to a sector of said medium surface whereby said vapor is uniformly deposited on said medium surface as said medium is rotated in said chamber.

20. The apparatus of claim 19 wherein said evaporation source is tellurium or an alloy thereof.

21. Apparatus for the pretreatment of a surface of a support medium prior to the depositing of a thin film of a material on said surface wherein the molecular characteristic of the material to be deposited does not possess good reactive properties with the material of the support medium to insure an acceptable level of adhesion of the deposited film to the support medium comprising

a chamber,

means in said chamber to rotatably support said medium including drive means to rotate said medium at a desired rotational speed,

means to evacuate said chamber,

a source of high energy ions in said chamber, the energy distribution of the ions being greater than the energy threshold level necessary to induce sputtering of the medium, said energy threshold level characteristic of the material comprising the support medium,

means to focus ions generated from said source to only a sector of the medium surface whereby ions from said source bombard and sputter said medium sector surface as said medium is rotated in said chamber to create a plurality of nucleation sites uniformly over a majority of said medium surface.

22. The apparatus of claim 21 wherein said ion source comprises a pair of electrodes supported in spaced parallel relation in said chamber, the planar extent of said electrodes in a plane substantially parallel to the plane of said medium, one of said electrodes positioned in close proximity to said medium surface and adapted to cover only a sector of said medium surface, and

means to apply a potential between said electrodes to generate a plasma therebetween.

23. The apparatus of claim 21 wherein said ion source comprises an rf sputtering system.

24. The apparatus of claim 21 wherein said ion source comprises an ion sputtering gun.

25. The apparatus of claim 21 wherein said ion source comprises a saddle field ion source.

26. The apparatus of claim 21 which includes a source of electrons adjacent to said source of high energy ions and in proximity to said medium surface to aid in neutralizing the surface charge deposited on said medium surface during ion bombardment and sputtering thereof.

27. The apparatus of claim 21 wherein said chamber is divided into two sections comprising a pretreatment section and a vapor deposition section, said vapor deposition section includes an evaporation source, means between said evaporation source and said medium to confine vapor issuing from said evaporation source to a sector of said nucleated medium surface whereby said vapor is uniformly deposited on said medium surface as said medium is rotated in said chamber.

28. The apparatus of claim 27 wherein said evaporation source is tellurium or an alloy thereof.