Cryogenic pump

• US 4,311,018 A
• Filed: 09/22/1980
• Issued: 01/19/1982
• Est. Priority Date: 12/17/1979
• Status: Expired due to Term

• Current Assignee: Ebara Technologies Incorporated (Ebara Corporation)
• Original Assignee: Varian Associates, Inc.
• Inventors: Welch, Kimo M.
• Primary Examiner(s): Capossela, Ronald C.
• Application Number:
  US06/189,524
• Time in Patent Office: 484 Days
• Field of Search: 62/55.5, 62/100, 62/268, 55/269, 417/901
• US Class Current: 62/55.5
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

A cryogenic apparatus comprises refrigeration means utilizing a two-stage expansion of compressed helium gas that circulates in a closed loop, whereby a first pumping stage can be maintained at a temperature in the range from 50° K. to 80° K. and a second pumping stage can be maintained at a colder temperature in the range from 10° K. to 20° K. The first pumping stage comprises an array of louvers of chevron configuration. These louvers enclose the second pumping stage, and serve as baffles to shield the pumping surfaces of the second stage from thermal radiation that would reduce the usable refrigeration capacity of the second stage for removing gases from a chamber to be evacuated. The chevroned baffles also protect a cryosorbent coating on the interior surfaces of the second stage from becoming iced or plugged by gas species that cryocondense at the higher temperature of the first stage. The assembly comprising the first-stage array of chevroned baffles surrounding the second-stage pumping surfaces may be disposed directly in the chamber to be evacuated, or may be mounted in a housing structure coupled to the chamber. The housing structure preferably has a radially bulging cylindrical configuration that permits substantially unimpeded conductance of gases from the chamber to the first-stage chevroned baffles.

Claims

1. A cryogenic pumping apparatus comprising:

a first-stage expansion chamber to accommodate expansion of a refrigerant gas whereby a portion of said first-stage expansion chamber can be maintained at a first temperature;

a second-stage expansion chamber to accommodate a further expansion of said refrigerant gas whereby a portion of said second-stage expansion chamber can be maintained at a second temperature, said second temperature being lower than said first temperature;

a first-stage pumping structure in intimate thermal contact with said first-stage expansion chamber;

a second-stage pumping structure in intimate thermal contact with said second-stage expansion chamber;

said first-stage pumping structure comprising an array of baffles, the baffles of said array being spaced apart from each other and arranged to form a wall around said second-stage pumping structure, said wall preventing line-of-sight transmission of radiation to said second-stage pumping structure, gas conductance to said second-stage pumping structure being permitted uniformly through said wall via spaces between adjacent baffles of said array.

2. The apparatus of claim 1 wherein each of said baffles has a cross-sectional configuration resembling a chevron, and wherein said baffles are arranged with respect to each other so that a cross section through adjacent baffles resembles nested chevrons.

3. The apparatus of claim 1 wherein said baffles are arranged to form a generally conical structure around said second-stage pumping structure.

4. The apparatus of claim 1 wherein said second-stage pumping structure has a reflective exterior surface and a cryosorbent-coated interior surface.

5. The apparatus of claim 1 wherein said second-stage pumping structure is configured to conform generally to the silhouette of said first-stage pumping structure.

6. The apparatus of claim 5 wherein said array of baffles forms a generally conical structure surrounding said second-stage pumping structure, and wherein said second-stage pumping structure is of frustoconical configuration.

7. The apparatus of claim 6 wherein said second-stage pumping structure comprises a hollow frustoconical outer member surrounding a coaxially disposed hollow cylindrical inner member.

8. The apparatus of claim 7 wherein the inner surface of said hollow frustoconical member and the outer and inner surfaces of said hollow cylindrical member are coated with a cryosorbent material.

9. The apparatus of claim 8 wherein said cryosorbent material is charcoal.

10. The apparatus of claim 8 wherein said crysorbent material is an artifical zeolite.

11. The apparatus of claim 1 wherein said first-stage pumping structure said second-stage pumping structure are enclosed within a housing structure that can be coupled to a chamber to be evacuated.

12. The apparatus of claim 11 wherein said housing structure is of generally cylindrical configuration with an axial bulge in the vicinity of said first-stage pumping structure.

13. The apparatus of claim 1 wherein said baffles are blackened.

14. A cryogenic pumping apparatus comprising:

a first-stage expansion chamber is accommodate expansion of a refrigerant gas whereby a portion of said first-stage expansion chamber can be maintained at a first temperature;

a second-stage expansion chamber to accommodate a further expansion of said refrigerant gas whereby a portion of said second-stage expansion chamber can be maintained at a second temperature, said second temperature being lower than said first temperature;

a first-stage pumping structure in intimate thermal contact with said first-stage expansion chamber;

a second-stage pumping structure in initimate thermal contact with said second-stage expansion chamber;

said first-stage pumping structure comprising an array of baffles, the baffles of said array being spaced apart from each other and arranged to form a wall around said second-stage pumping structure, said wall preventing line-of-sight transmission of radiation to said second-stage pumping structure, the baffles of said array being arranged so that a multiplicity of substantially evenly distributed gas flow paths having substantially equal flow conductance are provided through the array to the second-stage structure.

15. A cryogenic pumping apparatus comprising:

a first-stage expansion chamber to accommodate expansion of a refrigerant gas whereby a portion of said first-stage expansion chamber can be maintained at a first temperature;

a second-stage expansion chamber to accommodate a further expansion of said refrigerant gas whereby a portion of said second-stage expansion chamber can be maintained at a second temperature, said second temperature being lower than said first temperature;

a first-stage pumping structure in intimate thermal contact with said first-stage expansion chamber;

a second-stage pumping structure in intimate thermal contact with said second-stage expansion chamber;

said first-stage and second-stage expansion chambers being co-axial with a longitudinal axis, the first and second stage pumping structures being co-axial with the longitudinal axis, the second-stage chamber and structure being closer to the axis than the first-stage chamber and structure;

said first-stage pumping structure comprising an array of balles, the baffles of said array being spaced apart from each other and arranged to form a wall around said second-stage pumping structure, said wall preventing line-of-sight transmission of radiation to said-second stage pumping structure, the baffles of said array being arranged so that a multiplicity of gas flow paths having radial and longitudinal components relative to the axis are provided through the array to the second structure.

16. The apparatus of claim 15 wherein the baffles of the array are arranged so that a multiplicity of substantially evenly distributed gas flow paths are provided through the array to the second-stage structure.

17. The apparatus of claim 15 wherein the baffles of the array are arranged so that a multiplicity of substantially evenly distributed gas flow paths having substantially equal flow conductance are provided through the array to the second stage structure.

18. A cryogenic pumping apparatus comprising:

a first-stage expansion chamber to accommodate expansion of a refrigerant gas whereby a portion of said first-stage expansion chamber can be maintained at a first temperature;

a second-stage expansion chamber to accommodate a further expansion of said refrigerant gas whereby a portion of said second-stage expansion chamber can be maintained at a second temperature, said second temperature being lower than said first temperature;

a first-stage pumping structure in intimate thermal contact with said first-stage expansion chamber;

a second-stage pumping structure in intimate thermal contact with said second-stage expansion chamber;

said first-stage pumping structure comprising an array of baffles, the baffles of said array being spaced apart from each other and arranged to form a wall around said second-stage pumping structure, said wall preventing line-of-sight transmission of radiation to said second-stage pumping structure, the baffles of said array being arranged so that a multiplicity of substantially evenly distributed gas flow paths are provided through the array to the second stage structure.

19. In a cryogenic pumping apparatus having a first-stage expansion chamber to accommodate expansion of a refrigerant gas whereby a portion of said first-stage expansion chamber can be maintained at a first temperature;

a second-stage expansion chamber to accommodate a further expansion of said refrigerant gas whereby a portion of said second-stage expansion chamber can be maintained at a second temperature, said second temperature being lower than said first temperature;

a second-stage pumping structure in intimate thermal contact with said second-stage expansion chamber;

a first-stage pumping structure adapted to be mounted in intimate thermal contact with said first-stage expansion chamber comprising;

an array of baffles, the baffles of said array being spaced apart from each other and arranged so they are adapted to form a wall around said second-stage pumping structure, said wall being adapted to prevent line-of-sight transmission of radiation to said second-stage pumping structure, the baffles of the array adapted to provide uniform gas conductance from the first chamber to the second-stage through said wall via spaces between adjacent baffles of the wall.

20. The apparatus of claim 19 wherein the baffles of the array are arranged so that a multiplicity of substantially evenly distributed gas flow paths having substantially equal flow conductance are adapted to be provided through the array to the second stage structure.

21. The apparatus of claim 19 wherein the baffles of the array are arranged so that a multiplicity of substantially evenly distributed gas flow paths are adapted to be provided through the array to the second stage structure.