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Pressure sensor

  • US 4,314,226 A
  • Filed: 01/04/1980
  • Issued: 02/02/1982
  • Est. Priority Date: 02/02/1979
  • Status: Expired due to Term
First Claim
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1. A pressure sensor comprising:

  • a package having a hollow interior space and an inlet for introducing into the hollow interior space a fluid pressure to be measured;

    a silicon diaphragm block confined within and bonded to the interior space of said package, said diaphragm block including a diaphragm spaced from the inside of said package;

    said diaphragm including a base layer, said base layer including a pressure-sensitive element comprising a diffused resistor on a surface thereof, and a protective layer opposite in conductive type to said resistor and covering said diffused resistor;

    a plurality of aluminum electrodes extending through said protective layer;

    an internal diffused layer being of the same conductive type as said diffused resistor and disposed substantially between said base and said protective layer, said internal diffused layer electrically connecting said aluminum electrodes and said diffused resistor; and

    diffused areas in said protective layer surrounding said aluminum electrodes, said diffused areas being opposite in conductive type to said protective layer and formed by diffusing said aluminum electrodes by a heat treatment into said protective layer.

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