Method of photographing electron microscope images on a single photographic plate and apparatus therefor

• US 4,316,087 A
• Filed: 10/30/1979
• Issued: 02/16/1982
• Est. Priority Date: 11/01/1978
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Topcon
• Original Assignee: International Precision, Inc.
• Inventors: Shirota, Kohei, Yanaka, Takashi
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US06/089,371
• Time in Patent Office: 840 Days
• Field of Search: 250/306, 250/307, 250/311, 250/397, 250/327, 250/442, 250/359, 313/361
• US Class Current: 250/307
• CPC Class Codes: H01J 37/04 Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement H01J37/32009, H01J37/32623, H01J37/3266, H01J37/32697 take precedence; electron or ion-optical systems for localised treatment of objects H01J37/3007
• CPC Class Codes: H01J 37/224 Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen

Abstract

This invention relates to a method and apparatus for obtaining a single photograph of electron microscope images, with low gain in magnification, of relatively thick specimen, which photograph is suitable for direct comparison with a corresponding photograph of the same specimen obtained with an optical microscope: wherein either the specimen or the electron beam is so manipulated that the electron beam passes discretely and stepwisely through sequential portions of the specimen, and prior to impinging on the photographic plate the electron beam is screened to eliminate any portion thereof which would produce aberrations or other distortion and is controllably directed to impinge on a portion of the photographic plate which corresponds to the portion of the specimen through which the beam is passing.

Claims

1. A method of photographing electron microscope images of different portions of a specimen included in the view of the observation, one after another, on corresponding portions of a single photographic plate, which method comprises the steps of:

selecting a portion of said specimen as a section of observation, and obtaining only the electron beam which emerges from said selected portion of the specimen;

applying the electron beam emerging from the selected portion of said specimen to an intermediate lens and a projector lens, on or near the axis thereof;

selecting a portion of the photographic plate as a sectional position of exposure which corresponds to the position relative to the view of the observation where said selected portion of the specimen should be imaged, and deflecting the electron beam passed through the intermediate lens and projector lens at a position between the projector lens and the photographic plate to said selected portion of the photographic plate;

exposing the electron beam emerging from said selected portion of said specimen to said selected portion of the photographic plate; and

repeating the above steps by selecting other portions of the specimen different from said portion, one after another, applying the electron beam emerging from a selected other portion of said specimen to the intermediate lens and the projector lens, deflecting the electron beam passed through the intermediate lens and the projector lens at the position between the projector lens and the photographic plate to another selected portion of the same photographic plate as that used in the former exposing step, and exposing the deflected electron beam.

2. A method as claimed in claim 1, wherein said selected portion of the specimen corresponds to a portion defined by an aperture of a grid for holding said specimen.

3. A method as claimed in claim 1 or 2, wherein the portion of said specimen to be observed is selected by moving the specimen in a plane perpendicular to the longitudinal axis of the microscope.

4. A method as claimed in claim 1 or 2, wherein the portion of said specimen to be observed is selected by deflecting the electron beam applied to the specimen.

5. An apparatus for photographing electron microscope images of different portions of a specimen on the portions of a single photographic plate which correspond to the positions where said portions of a specimen should be imaged respectively, comprising:

an objective lens;

an intermediate lens positioned under said objective lens;

a projector lens positioned under said intermediate lens;

a photographic plate positioned under said projector lens;

a specimen stage disposed in said objective lens;

a selector means provided in the vicinity of said objective lens for selecting a portion of said specimen as a section of observation, one after another;

a regulation means for regulating the electron beam to apply toward said selected portion of the specimen, and to travel on or near the axis of said intermediate lens and projector lens;

a deflection means positioned between said projector lens and the photographic plate for deflecting the electron beam passed through the intermediate lens and projector lens toward each portion of said photographic plate corresponding to each selected portion of said specimen, on which each of said portions of a specimen should be imaged;

a shutter provided between said objective lens and said photographic plate for exposing multiple images of the different portions of the specimen on the different portions of one photographic plate; and

control means electrically connected to said selector means, deflection means and shutter for controlling their operations.

6. An apparatus as claimed in claim 5, wherein said selector means comprises drive means connected to the specimen stage which adjusts the position of said specimen by displacing said specimen stage in a plane perpendicular to the axis of said objective lens in order to bring the selected portion of said specimen on or near said axis.

7. An apparatus as claimed in claim 5, wherein said selector means comprises scanner means for scanning the electron beam.

8. An apparatus as claimed in claim 5, 6 or 7, wherein said regulation means comprises an aperture means provided between said objective lens and projector lens which allows only the electron beam emerging from the selected portion of the specimen to travel through the intermediate lens and projector lens on or near the axis thereof.

9. An apparatus as claimed in claim 5, 6 or 7, wherein said regulation means comprises a member which makes and applies an electron beam spot on the specimen.