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Method of photographing electron microscope images on a single photographic plate and apparatus therefor

  • US 4,316,087 A
  • Filed: 10/30/1979
  • Issued: 02/16/1982
  • Est. Priority Date: 11/01/1978
  • Status: Expired due to Term
First Claim
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1. A method of photographing electron microscope images of different portions of a specimen included in the view of the observation, one after another, on corresponding portions of a single photographic plate, which method comprises the steps of:

  • selecting a portion of said specimen as a section of observation, and obtaining only the electron beam which emerges from said selected portion of the specimen;

    applying the electron beam emerging from the selected portion of said specimen to an intermediate lens and a projector lens, on or near the axis thereof;

    selecting a portion of the photographic plate as a sectional position of exposure which corresponds to the position relative to the view of the observation where said selected portion of the specimen should be imaged, and deflecting the electron beam passed through the intermediate lens and projector lens at a position between the projector lens and the photographic plate to said selected portion of the photographic plate;

    exposing the electron beam emerging from said selected portion of said specimen to said selected portion of the photographic plate; and

    repeating the above steps by selecting other portions of the specimen different from said portion, one after another, applying the electron beam emerging from a selected other portion of said specimen to the intermediate lens and the projector lens, deflecting the electron beam passed through the intermediate lens and the projector lens at the position between the projector lens and the photographic plate to another selected portion of the same photographic plate as that used in the former exposing step, and exposing the deflected electron beam.

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