Scanning X-ray microscope

• US 4,317,036 A
• Filed: 03/11/1980
• Issued: 02/23/1982
• Est. Priority Date: 03/11/1980
• Status: Expired due to Term

• Current Assignee: Nanodynamics, Inc.
• Original Assignee: Chia-Gee Wang
• Inventors: Wang, Chia-Gee
• Primary Examiner(s): Smith, Alfred E.
• Assistant Examiner(s): Grigsby, T. N.
• Application Number:
  US06/129,287
• Time in Patent Office: 714 Days
• Field of Search: 250/272, 250/273, 250/274, 250/275
• US Class Current: 378/45
• CPC Class Codes: G01N 2223/076 X-ray fluorescence
• CPC Class Codes: G01N 23/223 by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence

Abstract

A scanning X-ray microscope including an X-ray source capable of emitting a beam of X-rays, a collimator positioned to receive the beam of X-rays and, to collimate this beam, a focusing cone means to focus the beam of X-rays, directed by the collimator, onto a focal plane, a specimen mount for supporting a specimen in the focal plane to receive the focused beam of X-rays, and X-ray beam scanning means to relatively move the specimen and the focusing cone means and collimator to scan the focused X-ray beam across the specimen, a detector disposed adjacent the specimen to detect flourescent photons emitted by the specimen upon exposure to the focused beam of X-rays to provide an electrical output representative of this detection, means for displaying and/or recording the information provided by the output from the detector, means for providing information to the recording and/or display means representative of the scan rate and position of the focused X-ray beam relative to the specimen whereby the recording and/or display means can correlate the information received to record and/or display quantitive and distributive information as to the quantity and distribution of elements detected in the specimen. Preferably there is provided an X-ray beam modulation means upstream, relative to the direction of emission of the X-ray beam, of the focusing cone means.

Claims

1. A scanning X-ray microscope including an X-ray source capable of emitting a beam of X-rays, a collimator positioned to receive the beam of X-rays, to collimate this beam, a focusing cone means to focus the beam of X-rays, directed by the collimator, onto a focal plane, a specimen mount for supporting a specimen in the focal plane to receive the focused beam of X-rays, an X-ray beam scanning means to relatively move the specimen and the focusing cone means and collimator to scan the focused X-ray beam across the specimen, a detector disposed adjacent the specimen to detect emmissions by the specimen upon exposure to the focused beam of X-rays to provide an electrical output representative of this detection, means for displaying and/or recording the information provided by the output from the detector, means for providing information to the recording and/or display means representative of the scan rate and position of the focused X-ray beam relative to the specimen whereby the recording and/or display means can correlate the information received to record and/or display quantitative and distributive information as to the quantity and distribution of elements detected in the specimen.

2. A scanning X-ray microscope according to claim 1, comprising X-ray beam modulation means upstream, relative to the direction of emission of the X-ray beam, of the focusing cone means.

3. A scanning X-ray microscope according to claim 2, wherein the modulation means is disposed upstream of the collimator.

4. A scanning X-ray microscope according to claim 2, wherein the modulation means modulates the X-ray beam to provide an alternating energy level which is alternately above and below one or more characteristic peaks of responsiveness to X-rays of a desired target element.

5. A scanning X-ray microscope according to claim 4, wherein the modulation means is a modulator for the anode biasing electrical supply of the X-ray generator and this modulator modulates that supply to provide a square wave the respective high levels and low levels of which provide the desired modulation of the X-ray beam.

6. A scanning X-ray microscope according to claim 4, wherein the modulation means is a modulator filter disposed between the X-ray source and the focusing cone means, the modulator filter consisting of a least a first area consisting of a filter material which will filter unwanted frequencies from the X-ray generated by the X-ray source and a second discrete area consisting of a material which will filter said unwanted frequencies and the frequency of X-rays required to excite the desired peak or peaks of the target element.

7. A scanning X-ray microscope according to claim 2, wherein a lock-in amplifier receives the information produced by the detector and modulation information from the modulator and compares these to determine the difference between signals from the detector when the specimen is exposed to the different levels of modulation of the X-ray beam, the lock-in amplifier providing an output to the record and/or display means representing the difference between the signals produced by the detector with the different levels of modulation.

8. A scanning X-ray microscope according to claim 1, wherein the record and/or display means is a cathode ray tube display device.

9. A scanning X-ray microscope according to claim 1, wherein the detector is a scintillation detector.

10. A scanning X-ray microscope according to claim 1, wherein the X-ray beam scanning means deflects the collimator and focusing cone means to scan the beam across a specimen.

11. A scanning X-ray microscope according to claim 10 wherein the X-ray beam scanning means scans the beam in a step-by-step manner sequentially exposing discrete areas of the specimen to the focused X-ray beam for discrete periods of time.