Scanning X-ray microscope
First Claim
1. A scanning X-ray microscope including an X-ray source capable of emitting a beam of X-rays, a collimator positioned to receive the beam of X-rays, to collimate this beam, a focusing cone means to focus the beam of X-rays, directed by the collimator, onto a focal plane, a specimen mount for supporting a specimen in the focal plane to receive the focused beam of X-rays, an X-ray beam scanning means to relatively move the specimen and the focusing cone means and collimator to scan the focused X-ray beam across the specimen, a detector disposed adjacent the specimen to detect emmissions by the specimen upon exposure to the focused beam of X-rays to provide an electrical output representative of this detection, means for displaying and/or recording the information provided by the output from the detector, means for providing information to the recording and/or display means representative of the scan rate and position of the focused X-ray beam relative to the specimen whereby the recording and/or display means can correlate the information received to record and/or display quantitative and distributive information as to the quantity and distribution of elements detected in the specimen.
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Accused Products
Abstract
A scanning X-ray microscope including an X-ray source capable of emitting a beam of X-rays, a collimator positioned to receive the beam of X-rays and, to collimate this beam, a focusing cone means to focus the beam of X-rays, directed by the collimator, onto a focal plane, a specimen mount for supporting a specimen in the focal plane to receive the focused beam of X-rays, and X-ray beam scanning means to relatively move the specimen and the focusing cone means and collimator to scan the focused X-ray beam across the specimen, a detector disposed adjacent the specimen to detect flourescent photons emitted by the specimen upon exposure to the focused beam of X-rays to provide an electrical output representative of this detection, means for displaying and/or recording the information provided by the output from the detector, means for providing information to the recording and/or display means representative of the scan rate and position of the focused X-ray beam relative to the specimen whereby the recording and/or display means can correlate the information received to record and/or display quantitive and distributive information as to the quantity and distribution of elements detected in the specimen. Preferably there is provided an X-ray beam modulation means upstream, relative to the direction of emission of the X-ray beam, of the focusing cone means.
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Citations
11 Claims
- 1. A scanning X-ray microscope including an X-ray source capable of emitting a beam of X-rays, a collimator positioned to receive the beam of X-rays, to collimate this beam, a focusing cone means to focus the beam of X-rays, directed by the collimator, onto a focal plane, a specimen mount for supporting a specimen in the focal plane to receive the focused beam of X-rays, an X-ray beam scanning means to relatively move the specimen and the focusing cone means and collimator to scan the focused X-ray beam across the specimen, a detector disposed adjacent the specimen to detect emmissions by the specimen upon exposure to the focused beam of X-rays to provide an electrical output representative of this detection, means for displaying and/or recording the information provided by the output from the detector, means for providing information to the recording and/or display means representative of the scan rate and position of the focused X-ray beam relative to the specimen whereby the recording and/or display means can correlate the information received to record and/or display quantitative and distributive information as to the quantity and distribution of elements detected in the specimen.
Specification