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Optical ray deflection apparatus

  • US 4,317,611 A
  • Filed: 05/19/1980
  • Issued: 03/02/1982
  • Est. Priority Date: 05/19/1980
  • Status: Expired due to Term
First Claim
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1. Optical ray deflection apparatus, comprisinga base member,a torsion bar arranged on said base member for torsional movement with respect thereto and having an area defining an optically reflective surface,said torsion bar being an integral part of a torsion bar plate and said reflective surface area comprising an enlarged portion centrally located and an integral part of said torsion bar,said torsion bar plate being made of single crystal silicon and formed by an anisotropic etching process, andelectrodes arranged on said base member for producing an electrostatic field adjacent said torsion bar in turn for producing deflecting movement of said reflective surface area.

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