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Thermally compensated silicon pressure sensor

  • US 4,320,664 A
  • Filed: 02/25/1980
  • Issued: 03/23/1982
  • Est. Priority Date: 02/25/1980
  • Status: Expired due to Term
First Claim
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1. A thermally compensated silicon pressure sensor comprising:

  • (a) a single crystal of silicon including;

    (1) a diaphragm portion with a top surface and a bottom surface, having a thickness permitting flexure when a pressure differential is applied between said top surface and said bottom surface and having a continuous loop resistor element disposed adjacent to said top surface in a position for exhibiting piezoresistivity when said diaphragm is flexed, a first resistor disposed in a central portion of said diaphragm portion, a second resistor connected to said first resistor and disposed in a peripheral portion of said diaphragm portion, a third resistor connected to said second resistor and disposed in a central portion of said diaphragm portion and a fourth resistor connected to said first and third resistors and disposed in a peripheral portion of said diaphragm portion; and

    (2) a clamp ring portion disposed around the entire perimeter of said diaphragm portion having a thickness providing mechanical support to said diaphragm portion and permitting virtually no flexure of said clamp ring portion when a pressure differential is applied between said top surface and said bottom surface of said diaphragm portion, and further having a temperature sensitive resistor disposed therein;

    (b) a first set of electrical terminals including a first electrical terminal disposed in ohmic contact with said continuous loop resistor element at the connection between said first and second resistors, a second electrical terminal in ohmic contact with said continuous loop resistor element at the connection between said second and third resistors, a third electrical terminal in ohmic contact with said continuous loop resistor element at the connection between said third and fourth resistors and a fourth electrical terminal disposed in ohmic contact with said continuous loop resistor element at the connection between said first and fourth resistors; and

    (c) a second set of electrical terminals disposed in ohmic contact with said temperature sensitive resistor. PG,24

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