Far ultraviolet dielectric multilayer film

• US 4,320,936 A
• Filed: 09/26/1979
• Issued: 03/23/1982
• Est. Priority Date: 09/27/1978
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Sawamura, Mitsuharu
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Arnold, Bruce Y.
• Application Number:
  US06/079,083
• Time in Patent Office: 909 Days
• Field of Search: 350/1.6, 350/1.7, 350/164, 350/166, 350/288, 350/290, 350/299
• US Class Current: 359/359
• CPC Class Codes: G02B 5/0833 comprising inorganic materials only
• CPC Class Codes: G02B 5/0891 Ultraviolet [UV] mirrors apparatus for microlithography exposure G03F7/70; X-ray multilayer structures G21K1/06
• CPC Class Codes: G02B 5/283 designed for the ultraviolet
• CPC Class Codes: G03F 7/2008 characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
• CPC Class Codes: G03F 7/70575 Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength

Abstract

A far ultraviolet dielectric multilayer film is disclosed which is composed of a first group of films on a substrate and a second group of films overlaid on the first group of films. The first group of films comprises alternate layers of a high refractive index dielectric which absorbs rays in the ultraviolet region and a low refractive index dielectric. The second group of films comprises alternate layers of an intermediate refractive index dielectric which does not absorb rays in ultraviolet region and a low refractive index dielectric.

Claims

1. An ultraviolet multilayer film which reflects beams of light in the far ultraviolet region but transmits beams of light in other wavelength regions, said ultraviolet multilayer film comprising:

a substrate;

a first group of thin films provided on said substrate and comprising alternate layers of high refractive dielectric having a refractive index not less than 1.9 and low refractive dielectric having a refractive index not more than 1.5; and

a second group of thin films provided on said first group of thin films and comprising alternate layers of intermediate refractive dielectric having a refractive index between 1.5 and 1.9 and low refractive dielectric having a refractive index not more than 1.5;

said refractive indices being determined in the wave length region of 200-300 nm.

2. An ultraviolet multilayer film according to claim 1, wherein the layer in said first group of thin films which is in contact with said substrate is one of said high refractive dielectric layers, the number of layers of said first group is even, and the layer in said second group which is in contact with said first group is one of said intermediate refractive dielectric layers.

3. An ultraviolet multilayer film according to claim 2, wherein the endmost layer in said second group is one of said intermediate refractive dielectric layers.

4. An ultraviolet multilayer film according to claim 1, wherein the layer in said first group of thin films which is in contact with said substrate is one of said high refractive dielectric layers, wherein the number of layers of said first group is odd, and the layer in said second group which is in contact with said first group is one of said low refractive dielectric layers.

5. An ultraviolet multilayer film according to claim 1, wherein the layer in said first group of thin films which is in contact with said substrate is one of said high refractive dielectric layers, wherein the number of layers of said first group is odd, and the layer in said second group which is in contact with said first group is one of said intermediate refractive dielectric layers.