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Continuous sputtering apparatus and method

  • US 4,331,526 A
  • Filed: 09/24/1979
  • Issued: 05/25/1982
  • Est. Priority Date: 09/24/1979
  • Status: Expired due to Term
First Claim
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1. An inline continuous sputtering apparatus for sputtering insulating material onto the surface of a continuous generally planar web of flexible substrate material passing through the apparatus which comprises:

  • A. a source of r.f. power of megahertz frequency,B. a sputtering vessel having grounded metallic walls defining a horizontally extending elongate sputtering chamber, there being at least top, bottom and opposite end walls,C. first air lock means in both said opposite end walls and pump means for evacuating said first air lock means, said first air lock means isolating said sputtering chamber and together are adapted to receive and provide for the uninterrupted continuous passage of a flexible single web of substrate material into the sputtering chamber from the exterior of the sputtering chamber through one of the opposite end walls thereof and out of the sputtering chamber through the other of said opposite end walls thereof by way of said first air lock means wthout affecting the physical conditions on the interior of the chamber and without exposure to ambient air,D. means within the chamber for supporting and guiding the web of substrate material throughout its continuous passage into, through and out of the sputtering chamber,E. a plurality of electrode pairs in the sputtering chamber spaced horizontally one pair from the other along the length of the sputtering chamber, each electrode pair comprising a generally planar target formed of the substance to be sputtered onto the web surface and an opposed anode facing the target and having a generally conforming planar configuration and spaced from said target defining a sputtering gap, within which sputtering plasma is adapted to form, the continuous web adapted to be led through an individual sputtering plasma vapor cloud formed in each sputtering gap,i. each target having grounded shielding surrounding the same but for its planar exposed surface which faces the anode and defines the sputtering gap therewith,ii. each target being mounted to the walls of the sputtering vessel electrically insulated therefrom,F. means coupling the source of r.f. power to all of the electrode pairs and including at least an individual match box coupled to each respective electrode pair for enabling efficient power transfer from the said source to the electrode pairs, each individual match box having one direct connection to the target electrode of the electrode pair it serves,G. means for driving the web of substrate material through the chamber of the vessel in a continuous movement successively through each plasma vapor cloud in each sputtering gap,H. means for connecting the anode of each electrode pair to substantially ground potential, andI. means cooperating with said r.f. power source and electrode pairs for establishing a sputtering condition within all said gaps.

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