Fluid damped saw accelerometer
First Claim
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1. A damped, cantilevered mass accelerometer comprising:
- a beam comprised of piezoelectric material rigidly disposed at a proximal end so as to form a cantilever and having an inertial mass disposed at the distal end thereof, a surface acoustic wave device formed on a first surface of said beam near said distal end, and circuit means for providing a signal indication of the acoustic velocity of a surface wave in said surface acoustic wave device;
characterized bysaid beam being disposed within an enclosed chamber including a damping fluid, said surface acoustic wave device being isolated from said damping fluid by a thin wall sealed to said beam so that said surface acoustic wave device is encapsulated between said beam and said wall.
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Abstract
An accelerometer comprising a mass 10 supported on a piezoelectric cantilevered beam 12 with SAW resonators 17, 46 disposed on the surface of the beam includes cover plates 66, 68 over the SAW resonators and sealed to the beam by seals 70, 72 which may be rigid (glass frit) or soft (filled polyimid).
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Citations
5 Claims
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1. A damped, cantilevered mass accelerometer comprising:
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a beam comprised of piezoelectric material rigidly disposed at a proximal end so as to form a cantilever and having an inertial mass disposed at the distal end thereof, a surface acoustic wave device formed on a first surface of said beam near said distal end, and circuit means for providing a signal indication of the acoustic velocity of a surface wave in said surface acoustic wave device; characterized by said beam being disposed within an enclosed chamber including a damping fluid, said surface acoustic wave device being isolated from said damping fluid by a thin wall sealed to said beam so that said surface acoustic wave device is encapsulated between said beam and said wall. - View Dependent Claims (2, 3, 4, 5)
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Specification
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Current AssigneeUnited Technologies Corporation (Rtx Corporation)
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Original AssigneeUnited Technologies Corporation (Rtx Corporation)
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InventorsGrudkowski, Thomas W., Cullen, Donald E., Gilden, Meyer
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Primary Examiner(s)Gill, James J.
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Application NumberUS06/203,823Time in Patent Office582 DaysField of Search73/517 R, 73/516 R, 310/326, 310/327, 310/329, 310/330, 310/313 RUS Class Current73/514.12CPC Class CodesG01P 15/0975 by acoustic surface wave re...
