Pattern position detecting system

• US 4,334,241 A
• Filed: 04/14/1980
• Issued: 06/08/1982
• Est. Priority Date: 04/16/1979
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Kashioka, Seiji, Miyatake, Takafumi, Shima, Yoshihiro
• Primary Examiner(s): Martin, John C.
• Assistant Examiner(s): Coles, Edward L.
• Application Number:
  US06/140,415
• Time in Patent Office: 785 Days
• Field of Search: 358/105, 358/93, 358/107, 358/101, 358/106, 358/903, 340/146.3 H, 340/146.3 Q, 340/146.3 AC, 340/146.3 AE, 364/515, 364/559, 356/388, 356/390, 356/397
• US Class Current: 348/87
• CPC Class Codes: H01L 21/67144 Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment
• CPC Class Codes: H01L 21/681 using optical controlling means

Abstract

A pattern position detecting system includes an image pickup device to pick up the image of an object which includes a target pattern which is to be detected. On the basis of the output of the pickup device, local patterns of the image surface are successively cut out and positional coordinates of the local patterns are successively generated to indicate the typical positions of each of these local patterns. The respective local patterns are then compared with a standard pattern having the same feature as that of the target pattern and the degree of coincidence therebetween is detected. The different degrees of coincidence of the local patterns in the vicinity of a particular local pattern are then compared so as to successively sample the local pattern whose degrees of coincidence become a maximum, and the positional coordinates and degrees of coincidence of the respective local patterns whose degrees of coincidence become a maximum are then stored. The positional coordinates fulfilling the positional relationship inherent to the target pattern from among the positional coordinates finally selected are then sampled and the sampled positional coordinates are identified as indicating a position of the target pattern.

Claims

1. A pattern position detecting system comprising imaging means to pick up an image of an object which includes a target pattern to-be-detected, first means connected with said imaging means and to successively cut out local patterns of an image surface on the basis of image signals delivered from said imaging means, second means to successively generate positional coordinates which indicate typical positions of the respective local patterns cut out, third means to compare the respective local patterns with a standard pattern having the same feature as that of the target pattern and to obtain degrees of coincidence, fourth means connected with said second and third means and to compare the degree of coincidence with the degrees of coincidence of the other local patterns in the vicinity of the particular local pattern so as to successively sample the local patterns whose degrees of coincidence become the maximum, said fourth means storing the positional coordinates and degrees of coincidence of the respective local patterns whose degrees of coincidence become the maximum, and fifth means connected with said fourth means and to sample positional coordinates fulfilling a positional relationship inherent to the target pattern from among the positional coordinates finally left in said fourth means, the sampled positional coordinates being identified as indicating a position of said target pattern.

2. A pattern position detecting system according to claim 1, wherein said fourth means comprises means to divide the imaged picture surface into a plurality of sections in advance and to generate an address of one section in which the positional coordinates generated by said second means are included, in response to said positional coordinates, memory means having a plurality of data storage areas for storing degrees of coincidence and positional coordinates in correspondence with the section addresses, and means to read out data indicative of the degrees of coincidence from the data storage areas within said memory means corresponding to said section addresses, to compare them with new degrees of coincidence provided from said third means and to replace the contents of said data storage areas with the new degrees of coincidence and positional coordinates generated by said second means, in accordance with the comparison results.

3. A pattern position detecting system according to claim 1 or 2, wherein said fifth means examines for the positional relationship for the identification of the target pattern, only those of the plurality of positional coordinates left in said fourth means whose degrees of coincidence with said standard pattern are at least a predetermined value.

4. A pattern position detecting system according to claim 2, wherein in the section address generating means, vertical and horizontal dimensions of said each section are made equal to minimum values of Y-directional and X-directional intervals among respective typical coordinates of the plurality of patterns which are included in the imaged picture surface and which have the same feature as that of the target pattern, whereby said typical coordinates of the respective patterns are located in the separate sections.

5. A pattern position detecting system according to claim 2 or 4,

further comprising sixth means to generate clock pulses which determine operating timings of said first means and said second means,

said second means comprising:

a counter which counts the clock pulses of said sixth means and which provide X-abscissas and carry pulses; and

a counter which counts the carry pulses and which provide Y-ordinates,

the section address generating means comprising;

first and second registers for storing an X-abscissa and a Y-ordinate of the first local pattern to be compared with the standard pattern;

third and fourth registers for storing values to prescribe the X-directional and Y-directional dimensions of one section;

first detection means to compare the content of said first register and the X-abscissa provided from said second means and to provide a pulse upon coincidence;

a first counter which is reset by the pulse from said first detection means and which counts the clock pulses from said sixth means;

second detection means to compare the content of said first counter and the content of said third register and to provide a pulse upon coincidence, the output pulse of said second detection means resetting said first counter;

a second counter which is reset by the output pulse of said first detection means and which counts the output pulses from said second detection means;

third detection means to compare the content of said second register and the Y-ordinate provided from said second means and to provide a pulse upon coincidence;

a third counter which is reset by the pulse from said third detection means and which counts the carry pulses of said second means;

fourth detection means to compare the content of said third counter and the content of said fourth register and to provide a pulse upon coincidence, the output pulse of said fourth means resetting said third counter; and

a fourth counter which is reset by the output pulse from said third detection means and which counts the output pulses from said fourth detection means;

values of said second counter and said fourth counter being respectively provided as the X- and Y-addresses of said section.

6. A pattern position detecting system according to claim 3, wherein in the section address generating means, vertical and horizontal dimensions of said each section are made equal to minimum values of Y-directional and X-directional intervals among respective typical coordinates of the plurality of patterns which are included in the imaged picture surface and which have the same feature as that of the target pattern, whereby said typical coordinates of the respective patterns are located in the separate sections.

7. A pattern position detecting system according to claim 6,

further comprising sixth means to generate clock pulses which determine operating timings of said first means and said second means,

said second means comprising:

a counter which counts the clock pulses of said sixth means and which provide X-abscissas and carry pulses; and

a counter which counts the carry pulses and which provide Y-ordinates;

the section address generating means comprising;

first and second registers for storing an X-abscissa and a Y-ordinate of the first local pattern to be compared with the standard pattern;

third and fourth registers for storing values to prescribe the X-directional and Y-directional dimensions of one section;

first detection means to compare the content of said first register and the X-abscissa provided from said second means and to provide a pulse upon coincidence;

a first counter which is reset by the pulse from said first detection means and which counts the clock pulses from said sixth means;

second detection means to compare the content of said first counter and the content of said third register and to provide a pulse upon coincidence, the output pulse of said second detection means resetting said first counter;

a second counter which is reset by the output pulse of said first detection means and which counts the output pulses from said second detection means;

third detection means to compare the content of said second register and the Y-ordinate provided from said second means and to provide a pulse upon coincidence;

a third counter which is reset by the pulse from said third detection means and which counts the carry pulses of said second means;

fourth detection means to compare the content of said third counter and the content of said fourth register and to provide a pulse upon coincidence, the output pulse of said fourth means resetting said third counter; and

a fourth counter which is reset by the output pulse from said third detection means and which counts the output pulses from said fourth detection means;

values of said second counter and said fourth counter being respectively provided as the X- and Y-addresses of said section.