Hard gold surfaces
First Claim
1. A process for fabricating an electrical contact with at least one hard metallic film with Vickers Hardness Numbers greater than 100 on a substrate, said metallic film comprising gold, comprising the step of sputtering a gold alloy composition onto the substrate using a carrier gas characterized in that the gold alloy composition consists essentially of between 0.05 and 5 weight percent noble refractory metal remainder gold, said noble refractory metal consisting essentially of at least one element selected from the group consisting of rhodium and ruthenium and the substrate is maintained at a temperature below 80 degrees C. during the sputtering procedure.
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Abstract
A process is described for making hard gold films suitable for electrical contact surfaces. A particular advantage of these films is that they operate well at high temperatures without forming resistive films on the contact surface.
10 Citations
6 Claims
- 1. A process for fabricating an electrical contact with at least one hard metallic film with Vickers Hardness Numbers greater than 100 on a substrate, said metallic film comprising gold, comprising the step of sputtering a gold alloy composition onto the substrate using a carrier gas characterized in that the gold alloy composition consists essentially of between 0.05 and 5 weight percent noble refractory metal remainder gold, said noble refractory metal consisting essentially of at least one element selected from the group consisting of rhodium and ruthenium and the substrate is maintained at a temperature below 80 degrees C. during the sputtering procedure.
Specification