Process for making solid-state color imaging device
First Claim
1. In a process for making a color imaging device, said color imaging device comprising an array of charge-handling semiconductive photosensors with an array of color filter elements superimposed in micro-registration with the sensing area of said photosensors, the process comprising the steps of:
- (1) successively coating on an array of semiconductive photosensors a plurality of photoresponsive layers;
(2) subjecting each photoresponsive layer in succession to active radiation whereby to provide an exposed area of that particular layer;
(3) removing unexposed photoresponsive coating of each layer in succession; and
(4) dyeing exposed areas of each layer of said coating in succession to obtain a series of chromatic filter elements.
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Accused Products
Abstract
Processes for making an electronic color imaging device, the color imaging device comprising a planar array of charge-handling semiconductive photosensors and a multicolor filter means, the multicolor filter means comprising a planar array of color filter elements superimposed in micro-registration over the sensing area of said photosensors. In general, the processes comprise the steps of: (1) successively coating on a planar array of semiconductive photosensors a plurality of photoresponsive layers; (2) subjecting each photoresponsive layer in succession to radiation whereby to provide an exposed area of said layer; (3) removing unexposed photoresponsive coating from each layer in succession; and, (4) dyeing exposed areas of each layer said coating in succession to obtain a series of chromatic filter elements. The processes are capable of producing color filter elements having dimensions of approximately 6 by 6 micrometers.
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Citations
10 Claims
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1. In a process for making a color imaging device, said color imaging device comprising an array of charge-handling semiconductive photosensors with an array of color filter elements superimposed in micro-registration with the sensing area of said photosensors, the process comprising the steps of:
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(1) successively coating on an array of semiconductive photosensors a plurality of photoresponsive layers; (2) subjecting each photoresponsive layer in succession to active radiation whereby to provide an exposed area of that particular layer; (3) removing unexposed photoresponsive coating of each layer in succession; and (4) dyeing exposed areas of each layer of said coating in succession to obtain a series of chromatic filter elements.
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2. In a process for making a color imaging device, said color imaging device comprising an array of charge-handling semiconductive photosensors with an array of color filter elements superimposed in micro-registration with the sensing area of said photosensors, the process comprising the steps of:
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(1) applying a first coating of photoresponsive material on said array of semiconductive photosensors, said photoresponsive material being adapted to be hardened as a result of photoexposure to radiation incident on said material; (2) exposing said first photoresponsive coating to active radiation incident in a pattern representing a first set of filter elements to provide selectively exposed areas of said first coating; (3) removing unexposed photoresponsive coating; (4) dyeing the remaining areas of said first coating with a first color to obtain a first series of chromatic filter elements; (5) applying a second coating of photoresponsive material on said array of semiconductive photosensors; (6) exposing said second photoresponsive coating to active radiation incident in a pattern representing a second set of filter elements to provide selectively exposed areas of said second coating; (7) removing unexposed photoresponsive coating; (8) dyeing the remaining areas of said second coating with a second color to obtain a second series of chromatic filter elements; (9) applying a third coating of photoresponsive material on said array of semiconductive photosensors; (10) exposing said third photoresponsive coating to active radiation incident in a pattern representing a third set of filter elements to provide selectively exposed areas of said third coating; (11) removing unexposed photoresponsive coating; and
,(12) dyeing the remaining areas of said third coating with a third color to obtain a third series of chromatic filter elements. - View Dependent Claims (3, 4, 5, 6, 7, 8)
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9. A color imaging device, an array of charge-handling semiconductive photosensors having an array of color filter elements superimposed in micro-registration with the sensing area of said photosensors, constructed by the steps of:
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(1) applying a first coating of photoresponsive material on said array of semiconductive photosensors, said photoresponsive material being adapted to be hardened as a result of selective photoexposure to radiation incident on said material; (2) exposing said first photoresponsive coating to active radiation in a pattern representing a first set of filter elements to provide selectively exposed areas of said first coating; (3) removing unexposed photoresponsive coating;
p1 (4) dyeing the remaining areas of said first coating with a first color to obtain a first series of chromatic filter elements;(5) applying a second coating of photoresponsive material on said array of semiconductive photosensors; (6) exposing said second photoresponsive coating to active radiation in a pattern representing a second set of filter elements to provide selectively exposed areas of said second coating; (7) removing unexposed photoresponsive coating; (8) dyeing the remaining areas of said second coating with a second color to obtain a second series of chromatic filter elements; (9) applying a third coating of photoresponsive material on said array of semiconductive photosensors; (10) exposing said third photoresponsive coating to active radiation in a pattern representing a third set of filter elements to provide selectively exposed areas of said third coating; (11) removing unexposed photoresponsive coating; and
,(12) dyeing the remaining areas of said third coating with a third color to obtain a third series of chromatic filter elements an adhesive layer between each of said photoresponsive coatings. - View Dependent Claims (10)
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Specification