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Adjustable electrode plasma processing chamber

  • US 4,340,462 A
  • Filed: 02/13/1981
  • Issued: 07/20/1982
  • Est. Priority Date: 02/13/1981
  • Status: Expired due to Term
First Claim
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1. An adjustable electrode plasma processing chamber comprising:

  • a sealable assembly including an electrode housing having a first electrode formed at one terminal end thereof and a reaction chamber body having formed therein a second electrode and an aperture for receiving and sealing about said first electrode terminal end of said electrode housing, said electrodes being electrically insulated from one another and positioned adjacent to one another to establish a plasma reaction region between adjacent surfaces thereof, said electrode housing and said reaction chamber body being moveable with respect to each other for changing said separation distance of said adjacent surfaces of said electrodes, the assembly being adapted to receive a workpiece within said plasma reaction region, the assembly further including a workpiece transfer aperture to allow a workpiece to enter or exit the plasma reaction region, a processing gas inlet aperture for infusing plasma processing gases into the plasma reaction region and an exhaust aperture for removing gases from the plasma reaction region; and

    an electrode positioning means for moving said electrode housing with respect to said reaction chamber body whereby said separation distance between adjacent surfaces of said electrodes may be controlled, the positioning means being operable from outside the sealed plasma processing chamber.

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