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Pyroelectric detector arrays

  • US 4,341,012 A
  • Filed: 09/29/1980
  • Issued: 07/27/1982
  • Est. Priority Date: 09/29/1980
  • Status: Expired due to Term
First Claim
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1. A method for mounting a pyroelectric detector array on silicon integrated circuits comprising the steps of:

  • forming a silicon dioxide layer on a silicon substrate;

    forming a series of holes in said silicon dioxide layer;

    coating said silicon dioxide layer with a series of nontouching strips of soft metal with each strip being over and around one of said holes, wherein each strip is the output terminal for a pyroelectric detector;

    coating one side of a pyroelectric detector strip with a series of strips of soft metal;

    mounting said pyroelectric detector strip over said series of holes such that said series of strips of soft metal on said detector strips are in contact with said series of strips on said silicon dioxide layers; and

    forming a metal layer on the side opposite said one side of said pyroelectric detector strip to provide a ground connection for the pyroelectric detector array.

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