Pyroelectric detector arrays
First Claim
1. A method for mounting a pyroelectric detector array on silicon integrated circuits comprising the steps of:
- forming a silicon dioxide layer on a silicon substrate;
forming a series of holes in said silicon dioxide layer;
coating said silicon dioxide layer with a series of nontouching strips of soft metal with each strip being over and around one of said holes, wherein each strip is the output terminal for a pyroelectric detector;
coating one side of a pyroelectric detector strip with a series of strips of soft metal;
mounting said pyroelectric detector strip over said series of holes such that said series of strips of soft metal on said detector strips are in contact with said series of strips on said silicon dioxide layers; and
forming a metal layer on the side opposite said one side of said pyroelectric detector strip to provide a ground connection for the pyroelectric detector array.
1 Assignment
0 Petitions
Accused Products
Abstract
A pyroelectric detector array and the method for making it. A series of holes 13 formed through a silicon dioxide layer 12 on the surface of a silicon substrate 11 forms the mounting fixture for the pyroelectric detector array. A series of nontouching strips of indium 14 are formed around the holes 13 to make contact with the backside electrodes 16 and form the output terminals for individual detectors. A pyroelectric detector strip 15 with front and back electrodes 17 and 16, respectively, is mounted over the strips 14. Biasing resistors 18 are formed on the surface of the silicon dioxide layer and connected to the strips 14. A metallized pad 19 formed on the surface of layer 12 is connected to each of the biasing resistors 18 and to the film 17 to provide the ground for the pyroelectric detector array.
17 Citations
7 Claims
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1. A method for mounting a pyroelectric detector array on silicon integrated circuits comprising the steps of:
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forming a silicon dioxide layer on a silicon substrate; forming a series of holes in said silicon dioxide layer; coating said silicon dioxide layer with a series of nontouching strips of soft metal with each strip being over and around one of said holes, wherein each strip is the output terminal for a pyroelectric detector; coating one side of a pyroelectric detector strip with a series of strips of soft metal; mounting said pyroelectric detector strip over said series of holes such that said series of strips of soft metal on said detector strips are in contact with said series of strips on said silicon dioxide layers; and forming a metal layer on the side opposite said one side of said pyroelectric detector strip to provide a ground connection for the pyroelectric detector array. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification