Batch chip placement system

• US 4,342,090 A
• Filed: 06/27/1980
• Issued: 07/27/1982
• Est. Priority Date: 06/27/1980
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: O'Neill, Brian C., Tappen, Frank M., Koestner, Joseph H., Caccoma, George A.
• Primary Examiner(s): Ruggiero, Joseph F.
• Application Number:
  US06/163,671
• Time in Patent Office: 760 Days
• Field of Search: 364/474, 364/489, 364/490, 364/491, 364/559, 29/407, 29/740, 29/759, 29/771, 29/589, 29/703, 29/742, 29/783, 29/809, 29/743, 29/400 R, 29/832, 29/833, 29/834, 29/836, 228/102, 228/180 A, 228/180 R, 228/103, 228/9, 228/12, 228/179, 228/6 A, 318/640, 358/101, 358/107
• US Class Current: 716/118
• CPC Class Codes: H01L 21/67 Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere processes per se H01L21/30, H01L21/46, H01L23/00; simple temporary support means, e.g. using adhesives, electric or magnetic means H01L21/68, H01L21/302; apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto H01L24/74;
• CPC Class Codes: Y10T 29/49133 with component orienting
• CPC Class Codes: Y10T 29/49769 Using optical instrument [excludes mere human eyeballing]
• CPC Class Codes: Y10T 29/49895 Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"]
• CPC Class Codes: Y10T 29/53178 Chip component
• CPC Class Codes: Y10T 29/53261 Means to align and advance work part

Abstract

A batch chip placement system for batch positioning semiconductor chips, or the like, upon a substrate containing an array of chip sites or footprints whose actual position on the substrate deviates from the theoretical or nominal position over successive substrates. The positioning is achieved by first sensing the X and Y offsets of a pair of alignment marks on the substrate from their theoretical or nominal position to determine the ΔX and ΔY correction factors required to obtain the actual X,Y position of the alignment marks. The actual X,Y position of the alignment marks is used to determine actual X,Y chip position values, θ rotation and shrinkage factor corrections required to obtain proper orientation and positioning for batch chip placement.

Claims

1. A batch component placement system for the batch positioning of components at pre-assigned sites upon a substrate where the sites vary in position from substrate to substrate, comprising:

substrate means having pre-assigned sites including at least one pair of alignment marks thereon;

optical means for locating the actual position of said pair of alignment marks on said substrate means;

means to compare the actual position of said pair of alignment marks with the theoretical position of said marks to determine the amount of misalignment;

a plurality of component locator means, each one of which is arranged to align and locate a component thereon;

means to position components on each of said plurality of component locator means;

means to individually position each of said plurality of component locator means in accordance with said amount of misalignment; and

component pickup means to remove said components from each of said plurality of component locator means and position same at said pre-assigned sites upon said substrate means.

2. The batch component placement system as set forth in claim 1 wherein said components are circuit chips each having an array of contact points on one side thereof.

3. The batch component placement system as set forth in claim 2 wherein said pre-assigned sites comprise an array of connection points matching said array of contact points on the said one side of said circuit chips.

4. The batch component system as set forth in claim 3 wherein said array of contact points on the said one side of said circuit chips comprise an array of solder balls.

5. The batch component placement system as set forth in claim 4 wherein each of said plurality of component locator means include a recess having tapered walls arranged to cause the said solder balls on one side of said chip to slide thereon to finely locate said chip within said recess.

6. The batch component placement system as set forth in claim 5 comprising batch chip feed means including a plurality of parallel feed banks which act to feed chips via tracks to respective ones of a plurality of parallel chip pockets whereby said chips are coarsely located.

7. The batch component placement system as set forth in claim 6 wherein said means to position components on each of said plurality of component locator means comprise parallel vacuum pickup means for picking up in parallel the respective chips located in the said plurality of parallel chip pockets of said batch chip feed means.

8. The batch component placement system as set forth in claim 7 wherein said alignment marks each comprise one of said pre-assigned sites comprising said array of connection points.

9. The batch component placement system as set forth in claim 8 wherein said optical means includes vidicon camera means.

10. The batch component placement system as set forth in claim 7 wherein the difference between the said actual position of said pair of alignment marks and said theoretical position of said pair of alignment marks is used to determine the variation in orientation of said actual alignment marks from said theoretical alignment marks.

11. The batch component placement system as set forth in claim 10 wherein the difference between the said actual positions of said pair of alignment marks is used to determine the amount of shrinkage encountered by said substrate after assignment of said pre-assigned sites.

12. The batch component placement system as set forth in claim 11 wherein said plurality of component locator means are positioned by the said means to individually position in accordance with said variation in orientation and said amount of shrinkage.

13. A batch chip placement system for batch positioning rows of electronic chips to pre-assigned sites upon a substrate where the position of said sites varies from substrate to substrate, comprising:

substrate means having pre-assigned sites thereon including at least one pair of alignment marks with each of said sites for receiving said chips including an array of electrical contact points;

optical alignment means for locating the actual position of said pair of alignment marks on said substrate means;

means to compare the said actual position of said pair of alignment marks with the theoretical position of said pair of alignment marks to determine the extent of misalignment in position and orientation between said actual position and said theoretical position of said marks;

batch compensator means including a plurality of chip locator means each one of which is arranged to align and locate a chip thereon;

means to position chips on each of said plurality of chip locator means;

means to position said batch compensator means relative to said substrate means in accordance with the actual position of said pair of alignment marks so that one of said chip locator means is lineally related to the actual position of one of said pre-assigned sites for receiving said chips;

means to rotate said batch compensator means about said one of said chip locator means to correct for said misalignment in orientation; and

pickup means to remove said chips from each of said plurality of chip locator means and position same at said pre-assigned sites upon said substrate means.

14. The batch chip placement system as set forth in claim 13 wherein the difference between the actual positions of said pair of alignment marks determines the amount of shrinkage encountered after said pre-assigned sites are positioned upon said substrate means.

15. The batch chip placement system as set forth in claim 14 wherein the said plurality of chip locator means of said batch compensator means are arrayed in a row and wherein means are provided to position each of said chip locator means other than said one of said chip locator means to correct for said amount of shrinkage.

16. The batch chip placement system as set forth in claim 15 wherein each of said chips includes an array of solder balls on one side thereof matching the said array of electrical contact points of said sites on said substrate means.

17. The batch chip placement system as set forth in claim 16 wherein individual chip locator means of said plurality of chip locator means each comprise a holding means having a top recess with tapered side walls arranged to guide the said solder balls on the one side of said chip to finely locate said chip within said recess.

18. The batch chip placement system as set forth in claim 17 comprising batch chip feed means including a plurality of parallel feed banks which act to feed chips via tracks to respective ones of a plurality of parallel chip pockets whereby said chips are coarsely located.

19. The batch chip placement system as set forth in claim 18 wherein said means to position chips on each of said plurality of chip locator means comprises parallel vacuum pick-up means for picking up in parallel the respective chips located in the said plurality of chip pockets of said batch chip feed means and positioning same on respective ones of each of said plurality of chip locator means.

20. The batch chip placement system as set forth in claim 19 wherein said alignment marks each comprise one of said pre-assigned sites including an array of electrical contact points.

21. The batch chip placement system as set forth in claim 20 wherein said substrate means includes an NXN array of pre-assigned sites and wherein said batch compensator means with one compensator means assigned to position chips for each respective row of chips of said substrate.

22. The batch chip placement system as set forth in claim 20 wherein said one of said chip locator means is the center chip locator means.

23. A batch chip placement process for batch positioning rows of electronic chips at pre-assigned sites upon a substrate where the theoretical position of said sites varies form substrate to substrate, comprising the steps of:

positioning substrate means having said pre-assigned sites thereon including at least one pair of alignment marks within the captive range of optical alignment means;

optically scanning said alignment marks to locate the actual position of said pair of alignment marks on said substrate means;

comparing the said actual position of said pair of alignment marks with the theoretical position of said pair of alignment marks to determine the extent of misalignment in position and orientation between the said actual position and the said theoretical position of said pair of alignment marks;

positioning of row of chips so that each chip is referenced to a known point;

moving said row of chips relative to said substrate means in accordance with said extent of misalignment in position so that one of the chips of said row of chips is in a position which is lineally related to the actual position of the corresponding one of said pre-assigned sites;

rotating said row of chips about said one of said chips to correct for said misalignment in orientation; and

lineally moving said row of chips to position same at said pre-assigned sites upon said substrate means.

24. The batch chip placement process as set forth in claim 23 wherein the difference between the actual positions of said pair of alignment marks is used to determine the amount of shrinkage encountered after said pre-assigned sites are fabricated upon said substrate means.

25. The batch chip placement process as set forth in claim 24 comprising the further step of moving each chip of said row of chips other than said one of said chips to correct for said amount of shrinkage.

26. A batch component placement system for positioning components at sites on a substrate where the sites vary in position from substrate to substrate, comprising:

substrate means having sites thereon including component sites;

automatic means for locating the position of said sites on said substrate means;

a plurality of component locator means positionable with respect to one another; and

means to individually position with respect to one another said plurality of component locator means in accordance with the located position of said sites.

27. The batch component placement system as set forth in claim 26 including batch component pickup means for batch moving components from said plurality of component locator means to component sites on said substrate means.

28. The batch component placement system as set forth in claim 27 wherein said automatic means for locating the position of said sites on said substrate means includes optical means for locating the position of said sites on said substrate means.

29. The batch component placement system as set forth in claim 27 wherein said components are circuit chips each having an array of contact points on one side thereof.

30. The batch component placement system as set forth in claim 29 wherein said component sites include an array of connection points matching the said array of contact points on the said one side of said circuit chips.

31. The batch component placement system as set forth in claim 30 wherein said automatic means for locating the position of said sites on said substrate means includes means to measure the location of at least two of said sites on said substrate means whereby the difference between the measured location and the theoretical location of said sites is used to provide translation, rotation and shrinkage adjustment to said means to individually position each of said plurality of component locator means.

32. The batch component placement system as set forth in claim 26 wherein said automatic means for locating the position of said sites on said substrate means includes means to measure the location of at least two of said sites on said substrate means whereby the difference between the measured location and the theoretical location of said sites is used to provide translation, rotation and shrinkage adjustment to said means to individually position each of said plurality of component locator means.

33. A batch component placement method for positioning components at sites on a substrate where said sites vary in position from substrate to substrate, comprising the steps of:

locating the position of at least two sites on said substrate;

individually positioning remote from said substrate each of a plurality of components with respect to one another in an array in accordance with the located position of said sites on said substrate; and

moving in a single step said plurality of components to said substrate in the same relative position as they appear in said array.