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Method of making multiple electrical components in integrated microminiature form

  • US 4,342,143 A
  • Filed: 05/01/1978
  • Issued: 08/03/1982
  • Est. Priority Date: 02/04/1974
  • Status: Expired due to Term
First Claim
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1. A method of making an integrated one-piece microminiature series circuit having a central opening comprising at least a capacitor and a helical inductor coil which are integrated with one another and which are disposed so that one overlies the other, said capacitor and said coil both having central openings and being contained within the same transverse area;

  • said method comprising the steps of providing a substrate, applying and bonding to each other a plurality of superposed films on said substrate to define said series circuit, each said films having a central opening, alternate layers of said films being comprised of electrically conductive material and dielectric material, said layers of conductive material being separated from one another by said layers of dielectric material, interconnecting some of said adjacent overlying layers of conductive material to provide said helical inductor coil, one of the layers of conductive material defining a first capacitor plate, the layer of conductive material defining the end of turn of said helical coil which is closest to said first capacitor plate comprising a second capacitor plate whereby said first and second capacitor plates define said capacitor, and providing electrical connection means at the other end turn of said inductor coil and from said first capacitor plate so that said inductor coil and said capacitor comprise an integrated one piece series circuit.

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