High deflection bandwidth product polymeric piezoelectric flexure mode device and method of making same
First Claim
1. A piezoelectric flexure mode device, comprising:
- a sheet of polymeric piezoelectric material poled in a direction parallel with the thickness of the sheet;
a first electrode bonded to one side of said sheet, said first electrode comprising less than 1% of the total thickness of said flexure mode device, and a second electrode bonded to the other side of said sheet, said second electrode comprising between about 2% and about 37% of the total thickness of said flexure mode device, and being of a thickness sufficient to substantially maximize the Deflection Bandwidth Product of the flexure mode device.
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Abstract
A piezoelectric flexure mode device comprises: a sheet of polymeric piezoelectric material, poled in a direction parallel with the thickness of the sheet; a relatively thin electrode, being less than about 1% of the total thickness of the device, bonded to one side of the sheet; and a relatively thick electrode, being between about 2% and about 35% of the total thickness of the device, bonded to the other side of the sheet. The second electrode is of a thickness sufficient to substantially maximize a figure of merit, called Deflection Bandwidth Product, representing the deflection of the device times the first resonant frequency of the device, thereby providing a flexure mode device capable of large rapid deflections.
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Citations
15 Claims
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1. A piezoelectric flexure mode device, comprising:
- a sheet of polymeric piezoelectric material poled in a direction parallel with the thickness of the sheet;
a first electrode bonded to one side of said sheet, said first electrode comprising less than 1% of the total thickness of said flexure mode device, and a second electrode bonded to the other side of said sheet, said second electrode comprising between about 2% and about 37% of the total thickness of said flexure mode device, and being of a thickness sufficient to substantially maximize the Deflection Bandwidth Product of the flexure mode device. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- a sheet of polymeric piezoelectric material poled in a direction parallel with the thickness of the sheet;
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8. A method of making a piezoelectric flexure mode device comprising the steps of:
depositing a first layer of electrode material on one side of a sheet of polymeric piezoelectric material, said first layer comprising less than 1% of the total thickness of said device;
depositing a second layer of electrode material on the other side of said sheet of polymeric piezoelectric material, said second layer being of a thickness sufficient to substantially maximize the Deflection Bandwidth Product of the device, and comprising between about 2% and about 37% of the total thickness of said flexure mode device; and
poling said polymeric piezoelectric material by applying a voltage across said first and second layers of electrode material sufficient to polarize said piezoelectric material.- View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
Specification