High vacuum valve construction

• US 4,343,455 A
• Filed: 02/21/1980
• Issued: 08/10/1982
• Est. Priority Date: 02/26/1979
• Status: Expired due to Term

• Current Assignee: Balzers Aktiengesellschaft (OC Oerlikon Corporation AG)
• Original Assignee: Unaxis Balzers AG (Oerlikon USA, Inc. (Florida))
• Inventors: Winkler, Otto
• Primary Examiner(s): Weakley, Harold W.
• Application Number:
  US06/123,399
• Time in Patent Office: 901 Days
• Field of Search: 251/58, 251/167, 251/175, 251/195, 49/363
• US Class Current: 251/58
• CPC Class Codes: F16K 3/10 with special arrangements for separating the sealing faces or for pressing them together
• CPC Class Codes: F16K 3/188 by means of hydraulic forces
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A high vacuum valve comprises a casing having a valve inlet port and a va outlet port connected to the inlet port with a valve seat defined between the inlet and outlet ports. The casing also defines a valve movement passageway and a valve member is movable in the housing along the passageway between a position in which it is aligned with the valve seat for closing the valve and one in which it is out of alignment with the seat to open the valve. The valve member includes two separate relatively movable plate parts both of which move along the passageway together and one of which is movable when the valve member is aligned with the valve seat so as to move into engagement with the seat. For this purpose a fluid pressure operated force transmissive device is located between the two plate parts and when supplied with fluid pressure it is effective to move one of the plate parts firmly against the seat while it is braced against the other plate part with the other plate part itself being braced by the passageway of the casing.

Claims

1. A high-vacuum valve comprising a casing having a valve inlet port, a valve outlet port connected to said inlet port, a valve seat including a flange extending at least partly therearound, said seat defined in said casing between said valve inlet port and said valve outlet port, said casing also defining a valve movement passageway adjacent said valve seat, a valve member movable in said housing on said passageway between a position in which said valve member is aligned with said valve seat for closing the valve to a position in which said valve member is out of alignment with said valve seat for opening said valve, said valve member including at least two separate relatively movable plate parts both of which move along said passageway and one of which is movable relative to the other when said valve member is aligned with said valve seat and into firm engagement with said seat, and drive force transmission means acting between said plate parts to move at least one relatively to the other in a direction to place it against said seat, the other of said plate parts being braced by said casing passageway, a channel section member connected to said housing and engaged over a part of said flange, and with said valve member in its aligned position, engaged with said other of said plate parts, said other of said plate parts including a support element engaged over said flange in its aligned position.

2. A high vacuum valve according to claim 1 wherein said valve seat is rectangular and said valve member is rectangular and comprises two rectangular plate members, said channel section disposed along one side of said valve seat and said valve seat defined on said flange, said section overlying the flange and extending downwardly therefrom and having a lower flange extending toward said valve member, said valve member including a low plate portion having a front edge abutting into said channel section in a trailing edge with a top flange engageable over said valve seat flange and forming said support element on the end thereof away from said channel section.

3. A high-vacuum valve according to claim 1, wherein said inlet and outlet port portions are in alignment, said casing including an annular formation defining said seat, said valve passageway including a trackway defined in said casing between said inlet and outlet port and extending laterally therefrom, said valve member comprising two plates one interposed over the other, said means comprising fluid pressure operated force transmission means comprising a elastic spring body disposed between said plates and being expandible to force of said plates away from the other.

4. A high-vacuum valve according to claim 3 including a drive connected to said valve member for shifting it along said passageway.

5. A high vacuum valve according to claim 1 wherein said valve seat includes a cup shaped spring member having a bottom wall with an annular opening, one of said plate bars including a cup shaped spring member having a diameter permitting said spring member to engage the lip of said spring member of said seat.