Dual probe interferometer for object profile measuring

• US 4,347,441 A
• Filed: 10/06/1980
• Issued: 08/31/1982
• Est. Priority Date: 09/22/1980
• Status: Expired due to Term

• Current Assignee: US Philips Corporation (Koninklijke Philips N.V.)
• Original Assignee: US Philips Corporation (Koninklijke Philips N.V.)
• Inventors: Driessen, Johannes C., Dil, Jan G., Mesman, Wichert
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US06/193,972
• Time in Patent Office: 694 Days
• Field of Search: 250/560, 250/231 R, 356/355, 356/356, 356/357, 356/358
• US Class Current: 250/559.2
• CPC Class Codes: G01B 11/2408 for measuring roundness
• CPC Class Codes: G01B 11/303 using photoelectric detection means
• CPC Class Codes: G01B 21/20 for measuring contours or curvatures, e.g. determining profile

Abstract

An apparatus is described for accurately measuring the profile on an object. The apparatus comprises two probes for simultaneously scanning the object to be measured and the reference object, the objects being rotatable about the same axis. Each of the probes is provided with a reflecting element, which are respectively incorporated in the measuring arm and reference arm of an interferometer.

Claims

1. An apparatus for measuring the profile of an object, which apparatus comprises a rotatable measuring table for the object, a measuring probe having one end which is adapted to be pressed against the object and a second end carrying a reflecting element, and an interferometer, whose measuring arm incorporates the reflecting element of the measuring probe, characterized by a reference table for a reference object, which reference table is rotatable in synchronism with and about the same axis as the measuring table, a reference probe, having one end which is adapted to be pressed against the reference object, and a second end carrying a reflecting element which is incorporated in the reference arm of the interferometer.

2. An apparatus as claimed in claim 1, characterized in that two bars, carrying the probes, are connected to a column which is secured to a base plate, and that the shaft of a turntable, which comprises the measuring table and the reference table in the form of two platforms, is journalled in said base plate by air-bearing means.

3. An apparatus as claimed in claim 2, characterized in that on the ends of the bars there are arranged positioning tables for the probes and that on each of the two platforms of the turntable there is arranged a positioning table for respectively centring the object to be measured and the reference object relative to the turntable axis.

4. An apparatus as claimed in claim 3, characterized that the bars, the column, the base plate and the turntable consist of the material Zerodur and that the positioning tables for the object to be measured, the reference object and the probes are of the material Invar.

5. An apparatus as claimed in claim 1, 2, 3 or 4, characterized in that each of the probes is constituted by a rod, which is journalled by air-bearing means and which is provided with magnetic pressure means, whose pressure force is adjustable.

6. An apparatus as claimed in claim 5, characterized in that the magnetic pressure means are constituted by a soft-iron core arranged on the rod and by two coils, electric currents being simultaneously passed through the two coils, and that the sum of the currents through the two coils is constant.

7. An apparatus as claimed in any one of claims 1 to 4, characterized by a second reference probe for scanning a second reference object and by a second reference table which is rotatable in synchronism with and about the same axis as the measuring table and the first reference table.

8. An apparatus as claimed in any one of claims 1 to 4, characterized in that the radiation-sensitive detection system of the interferometer is a multiple photocell comprising a linear array of photodiodes, which are sequentially connected to an electronic circuit for processing the signal generated in the photodiodes by means of an electronic switch.