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Dual probe interferometer for object profile measuring

  • US 4,347,441 A
  • Filed: 10/06/1980
  • Issued: 08/31/1982
  • Est. Priority Date: 09/22/1980
  • Status: Expired due to Term
First Claim
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1. An apparatus for measuring the profile of an object, which apparatus comprises a rotatable measuring table for the object, a measuring probe having one end which is adapted to be pressed against the object and a second end carrying a reflecting element, and an interferometer, whose measuring arm incorporates the reflecting element of the measuring probe, characterized by a reference table for a reference object, which reference table is rotatable in synchronism with and about the same axis as the measuring table, a reference probe, having one end which is adapted to be pressed against the reference object, and a second end carrying a reflecting element which is incorporated in the reference arm of the interferometer.

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